US3771948A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heating devices for manufacturing semiconductor elements
Assignee: NISSHO SEMICONDUCTOR CO Ltd
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Filing: 1973-02-26
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Granted: 1973-11-13
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Expires: 1993-02-26
Abstract
Abstract The heating device for manufacturing semiconductor elements comprises conveyor means for successively conveying a plurality of semiconductor wafers coated with films to be heated, such as photoresist films, and a heating chamber disposed in the path of travel of the conveyor means. Microwave energy is irradiated in the heating chamber to heat the films. A plurality of pins are associated with the conveyor means. Means are provided to protrude and retract the pins with respect to the conveyor means, rotate and reciprocate the pins in parallel with the direction of travel of the conveyor means for uniformly distributing the microwave energy on the semiconductor wafers.
Inventors
- 👤 R Matsumiya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 06:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/168; H; H05; H05B; H05B6/00; H05B6/64; H05B6/78; H05B6/80; H05B6/806
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
113 words
A heating device for manufacturing semiconductor elements comprising conveyor means for successively conveying a plurality of semiconductor wafers coated with films to be heated, a heatIng chamber disposed in the path of travel of said conveyor means, means for irradiating microwave energy upon said semiconductor wafers when they are contained in said heating chamber, a plurality of pins associated with said conveyor means for arresting said semiconductor wafers in said heating chamber for an interval necessary for heating said semiconductor wafers, means for protruding and retracting said pins with respect to said conveyor means, and means for rotating and reciprocating said pins in parallel with the direction of travel of said conveyor means.
Claim 2
Dependent Claim
113 words
A heating device for manufacturing semiconductor elements comprising conveyor means for successively conveying a plurality of semiconductor wafers coated with films to be heated, a heatIng chamber disposed in the path of travel of said conveyor means, means for irradiating microwave energy upon said semiconductor wafers when they are contained in said heating chamber, a plurality of pins associated with said conveyor means for arresting said semiconductor wafers in said heating chamber for an interval necessary for heating said semiconductor wafers, means for protruding and retracting said pins with respect to said conveyor means, and means for rotating and reciprocating said pins in parallel with the direction of travel of said conveyor means.
Claim 3
Dependent Claim
34 words
The heating device as defined in claim 1 wherein said conveyor means is provided with slots extending in the direction of travel thereof, and said pins are rotated in and reciprocated along said slots.
Claim 4
Dependent Claim
58 words
The heating device as defined in claim 1 wherein said means for rotating and reciprocating said pins comprises a movable frame, means for rotatably mounting said pins upon said movable frame, an electric motor carried by said movable frame for rotating said pins, and means for reciprocating said movable frame in a direction parallel to said conveyor means.
Claim 5
Dependent Claim
22 words
The heating device as defined in claim 1 wherein said films to be heated are photoresist films coated on said semiconductor wafers.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-12 | 1977-05-14 | 1977-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-12 | 1981-05-14 | 1981-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-12 | 1985-05-14 | 1985-11-13 | $7700.00 | Window Closed / Lapsed |