US3786323A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Capacitor with anodized electrode of tantalum silicon alloy
Assignee: AT&T Inc
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Filing: 1972-07-03
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Granted: 1974-01-15
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Expires: 1992-07-03
Abstract
Abstract A thin film material capable of functioning as the anode in electrochemically formed thin film capacitors and as the resistive track in anodized resistors in thin film integrated circuits comprising a film of sputtered tantalum and silicon.
Inventors
- 👤 F Peters
- 👤 N Schwartz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:02
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; C23C14/0057; H01B; H01B1/00; H01C7/00; H01C7/006; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
64 words
Technique for the fabrication of a thin film capacitor which comprises the steps of successively depositing upon a nonconducting substrate member a layer of an anodizable material, an anodic oxide of said anodizable material and a counter electrode characterized in that said anodizable material is formed by sputtering a layer of a tantalum-silicon alloy comprising from 2.5 to 12 weight percent silicon, remainder tantalum.
Claim 2
Dependent Claim
21 words
Technique in accordance with claim 2 wherein said anodizable material is formed by reactive sputtering of tantalum in a silane argon-mixture.
Claim 3
Dependent Claim
22 words
Technique in accordance with claim 2 wherein said anodizable material is formed by ac sputtering of tantalum and silicon water cooled rods.
Claim 4
Dependent Claim
24 words
Technique in accordance with claim 2 wherein said anodizable material is formed by sputtering a sintered cathode of tantalum and silicon in pure argon.
References Cited (Backward Citations)
US3483451A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-14 | 1977-07-16 | 1978-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-14 | 1981-07-16 | 1982-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-14 | 1985-07-16 | 1986-01-15 | $7700.00 | Window Closed / Lapsed |