US3825449A
Expired / Lapsed
US
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Method of depositing epitaxial layers on a substrate from the liquid phase
Assignee: RCA Corp
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Filing: 1973-08-31
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Granted: 1974-07-23
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Expires: 1993-08-31
Abstract
Abstract THE SURFACE OF THE SUBSTRATE ON WHICH THE EPITAXIAL LAYER IS TO BE DEPOSITED IS COATED ALONG AT LEAST ONE EDGE PORTION WITH A STRIP OF A NON-REACTTIVE MATERIAL. AN EPITAXIAL LAYER IS THEN DEPOSITED ON THE SUBSTRATE BY CONVENTIONAL LIQUID PHASE TECHNIQUES BY MOVING THE SUBSTRATE THROUGH A SUITABLE DEPOSITION SOLUTION WITH THE SUBSTRATE PREFERABLY ORIENTED SO AS TO MAKE THE STRIP-COATED EDGE THE LEADING EDGE.
Inventors
- 👤 D Marinelli
- 👤 T Stockton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:14
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/063; H; H10; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/265; H10P14/27; H10P14/271; H10P14/34; H10P14/3402; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-07-22 | 1978-01-21 | 1978-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-07-22 | 1982-01-21 | 1982-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-07-22 | 1986-01-21 | 1986-07-23 | $7700.00 | Window Closed / Lapsed |