US3836348A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing optical integrated circuits utilizing an external electric field
Assignee: Nippon Selfoc Co Ltd
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Filing: 1973-02-22
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Granted: 1974-09-17
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Expires: 1993-02-22
Abstract
Abstract A method for manufacturing optical integrated circuits forms light guide paths in a substrate by an ionic exchange process. Ions initially present in the substrate are replaced by ions from a source thereof to locally increase the substrate index of refraction, thereby forming light guides, in a pattern dependent upon a mask disposed intermediate the substrate and the ion source. An electric field is externally applied in the direction of ionic migration to provide light guide walls exhibiting abrupt variations in refractive index. In accordance with one aspect of the present invention, a light guide may be shifted into the interior of the substrate.
Inventors
- 👤 T Sumimoto
- 👤 S Matsushita
- 👤 T Yamazaki
- 👤 T Fujiwara
- 👤 K Koizumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 05:12
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1345; C; C03; C03C; C03C21/00; C03C21/001
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
112 words
The method for forming a light guide in a substrate by an ion exchange process in the fabrication of an optical integrated circuit, ions initially present in the substrate being replaced by ions from an ion source which locally increases the substrate index of refraction to form said light guide, a mask being employed intermediate said ion source and said substrate to selectively locally permit ion migration from said ion source to said substrate, the improvement comprising externally applying an electric field along the direction of ion migration from said ion source to said substrate to thereby provide a relatively large refractive index gradient for the light guide at the boundaries thereof.
Claim 2
Dependent Claim
61 words
A method as in claim 2, further comprising disposing said substrate with a formed light guide contiguous to an ionic source for supplying ions contributing relatively little to the substrate index of refraction, a mask being disposed intermediate said ionic source and said substrate, and applying an external electric field to move said light guide to the interior of said substrate.
Claim 3
Dependent Claim
29 words
A method as in claim 2, wherein said electric field applying step comprises disposing electrodes on either side of said substrate, and applying a source of electric potential therebetween.
Claim 4
Dependent Claim
33 words
A method as in claim 2, further comprising the step of disposing ion accepting means on said substrate remote from said mask to accept ions migrating from said substrate under electric field acceleration.
Claim 5
Dependent Claim
14 words
A method as in claim 2, wherein said ion source comprises a molten salt.
Claim 6
Dependent Claim
14 words
A method as in claim 2, wherein said ion source comprises a thin film.
References Cited (Backward Citations)
US3486808A
Cited
US3687649A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-09-16 | 1978-03-18 | 1978-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-09-16 | 1982-03-18 | 1982-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-09-16 | 1986-03-18 | 1986-09-17 | $7700.00 | Window Closed / Lapsed |