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US3849790A Expired / Lapsed US ⏱️ 0.0 years remaining

Laser and method of making same

Assignee: Licentia Patent Verwaltungs GmbH
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Filing: 1972-07-26
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Granted: 1974-11-19
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Expires: 1992-07-26
📄 Original PDF 🌐 Google Patents

Abstract

Abstract A semiconductor laser and methods of making same. The semiconductor laser is in the form of a diode, preferably a heterostructural diode. The diode includes a light-emitting active region. A layer of one conductivity type is disposed at a small distance from said light-emitting active region. Means are provided adjacent the layer of one conductivity type to block current flow through laterally extending portions of the layer for confining the curent to a narrow path through the layer. The method of making the semiconductor laser includes applying a mask to the surface of the semiconductor layer of the one conductivity type, the mask corresponding to the lateral outline of the current-conducting path to be formed. Thereafter, either the exposed portions of the surface are removed by etching or doping material is diffused into the layer of one conductive type through the exposed portions of the surface to produce regions therein of opposite conductivity type.

Inventors

  • 👤 H Gottsmann
  • 👤 J Specovius

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 09:57
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/227; H01S5/223; H10; H10H; H10H20/00; H10H20/80; H01S5/2275; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/065; Y10S148/067; Y10S148/072; Y10S148/145

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 242 words
IN A DOUBLE HETEROSTRUCTURE LASER DIODE INCLUDING A SEMICONDUCTOR BODY HAVING A LIGHT EMITTING ACTIVE LAYER, A HIGHLY DOPED FIRST LAYER OF A CONDUCTIVITY TYPE OVERLYING ONE MAJOR SURFACE OF SAID ACTIVE LAYER, A SECOND LAYER OF SAID FIRST CONDUCTIVITY TYPE OVERLYING SAID FIRST, A THIRD HIGHLY DOPED LAYER OF THE OPOSITE CONDUCTIVITY TYPE OVERLYING THE OPPOSITE MAJOR SURFACE OF SAID ACTIVE LAYER AND A FOURTH LAYER OF SAID OPPOSITE CONDUCTIVITY TYPE OVERLYING SAID THIRD LAYER, SAID FIRST AND THIRD LAYERS BEING FORMED OF A CRYSTAL WHOSE BAND SPACING BETWEEN THE VALANCE BAND AND THE CONDUCTIVE BAND IS GREATER THAN THAT OF THE CRYSTAL WHICH FORMS SAID ACTIVE LAYER, THE IMPROVEMENT COMPRISING: FIRST MEANS EXTENDING INTO SAID SEMICONDUCTOR BODY FROM ONE MAJOR SURFACE THEREOF THROUGH SAID SECOND LAYER AND AT LEAST INTO SAID FIRST LAYER FOR CONFINING THE CURRENT FLOW THROUGH SAID FIRST AND SECOND LAYERS TO A NARROW PATH AND FOR BLOCKING CURRENT FLOW THROUGH LATERALLY EXTENDING PORTIONS OF SAID FIRST AND SECOND LAYERS; AND FURTHER MEANS FOR LIMITING THE CURRENT FLOW IN SAID FOURTH LAYER TO A NARROW PATH WHICH IS ALIGNED WITH THE SAID NARROW PATH THROUGH SAID FIRST AND SECOND LAYERS, AND FURTHER MEANS COMPRISES SPACED APART SEMICONDUCTOR REGIONS OF SAID FIRST CONDUCTIVITY TYPE WITHIN SAID FOURTH LAYER AT THE INTERFACE OF SAID THIRD AND FOURTH LAYERS AND FORMING RESPECTIVE BARRIER LAYERS WITH SAID FOURTH LAYER, SAID NARROW PATH IN SAID FOURTH LAYER BEING BETWEEN SAID BARRIER LAYERS.
Claim 2
Dependent Claim 242 words
IN A DOUBLE HETEROSTRUCTURE LASER DIODE INCLUDING A SEMICONDUCTOR BODY HAVING A LIGHT EMITTING ACTIVE LAYER, A HIGHLY DOPED FIRST LAYER OF A CONDUCTIVITY TYPE OVERLYING ONE MAJOR SURFACE OF SAID ACTIVE LAYER, A SECOND LAYER OF SAID FIRST CONDUCTIVITY TYPE OVERLYING SAID FIRST, A THIRD HIGHLY DOPED LAYER OF THE OPOSITE CONDUCTIVITY TYPE OVERLYING THE OPPOSITE MAJOR SURFACE OF SAID ACTIVE LAYER AND A FOURTH LAYER OF SAID OPPOSITE CONDUCTIVITY TYPE OVERLYING SAID THIRD LAYER, SAID FIRST AND THIRD LAYERS BEING FORMED OF A CRYSTAL WHOSE BAND SPACING BETWEEN THE VALANCE BAND AND THE CONDUCTIVE BAND IS GREATER THAN THAT OF THE CRYSTAL WHICH FORMS SAID ACTIVE LAYER, THE IMPROVEMENT COMPRISING: FIRST MEANS EXTENDING INTO SAID SEMICONDUCTOR BODY FROM ONE MAJOR SURFACE THEREOF THROUGH SAID SECOND LAYER AND AT LEAST INTO SAID FIRST LAYER FOR CONFINING THE CURRENT FLOW THROUGH SAID FIRST AND SECOND LAYERS TO A NARROW PATH AND FOR BLOCKING CURRENT FLOW THROUGH LATERALLY EXTENDING PORTIONS OF SAID FIRST AND SECOND LAYERS; AND FURTHER MEANS FOR LIMITING THE CURRENT FLOW IN SAID FOURTH LAYER TO A NARROW PATH WHICH IS ALIGNED WITH THE SAID NARROW PATH THROUGH SAID FIRST AND SECOND LAYERS, AND FURTHER MEANS COMPRISES SPACED APART SEMICONDUCTOR REGIONS OF SAID FIRST CONDUCTIVITY TYPE WITHIN SAID FOURTH LAYER AT THE INTERFACE OF SAID THIRD AND FOURTH LAYERS AND FORMING RESPECTIVE BARRIER LAYERS WITH SAID FOURTH LAYER, SAID NARROW PATH IN SAID FOURTH LAYER BEING BETWEEN SAID BARRIER LAYERS.
Claim 3
Dependent Claim 44 words
A semiconductor laser as defined in claim 1 wherein said first means for confining the current to a narrow path comprises insulating means, said narrow path being defined by a portion of each of said first and second layers extending between said insulating means.
Claim 4
Dependent Claim 30 words
A semiconductor laser as defined in claim 1 wherein said first means for confining the current comprise spaced apart insulating regions, said narrow current path being between said insulating regions.
Claim 5
Dependent Claim 37 words
A semiconductor laser as defined in claim 1 wherein the surface area of said portion of said semiconductor body defined by said narrow current path is substantially strip-shaped in a plane substantially perpendicular to the current path.
Claim 6
Dependent Claim 36 words
A semiconductor laser as defined in claim 4 wherein said light-emitting active layer comprises a layer of substantially homogeneous material whereby light is emitted at least from an area of said layer of substantially homogeneous material.
Claim 7
Dependent Claim 34 words
A semiconductor laser as defined in claim 1 wherein said means for confining the current comprise spaced apart insulating regions, said insulating regions having a lower refractive index than said light emitting active layer.
Claim 8
Dependent Claim 25 words
A semiconductor laser as defined in claim 1 wherein said light-emitting active layer is operatively arranged to be excited in at least one transverse mode.
Claim 9
Dependent Claim 22 words
A semiconductor laser as defined in claim 1 wherein said light-emitting active layer comprises an active zone of compensatedly doped semiconductor material.
Claim 10
Dependent Claim 38 words
A semiconductor laser as defined in claim 1 wherein said light-emitting active layer comprises an active zone formed of a mixed crystal and at least one of said first and third layers is formed of a mixed crystal.
Claim 11
Dependent Claim 26 words
A semiconductor laser as defined in claim 1 wherein at least one of said active zone and said second and fourth layers is formed of GaAs.
Claim 12
Dependent Claim 26 words
A semiconductor laser as defined in claim 9 wherein at least one of said active zone and said first and third layers is formed of GaAlAs.
Claim 13
Dependent Claim 45 words
A semiconductor laser as defined in claim 1 wherein said means for confining the current extends through said first layer and said active layer and into said third layer to additionally confine the current in said active and said third layers to said narrow path.
Claim 14
Dependent Claim 29 words
A semiconductor laser as defined in claim 12 wherein said means for confining the current comprise spaced apart insulating regions, said narrow current path being between said insulating regions.
Claim 15
Dependent Claim 27 words
A semiconductor laser as defined in claim 12 wherein said means for confining the current comprise spaced apart recesses, said narrow current path being between said recesses.
Claim 16
Dependent Claim 42 words
A semiconductor laser as defined in claim 14 further comprising a layer of insulating material covering the surface of each of said recesses and the associated major surface of said semiconductor body outside of the portIon thereof constituting said narrow current path.
Claim 17
Dependent Claim 230 words
In a double heterostructure laser diode including a semiconductor body having a light emitting active layer, a highly doped first layer of a first conductivity type overlying one major surface of said active layer, a second layer of said first conductivity type overlying said first layer, a third highly doped layer of the opposite conductivity type overlying the opposite major surface of said active layer and a fourth layer of said opposite conductivity type overlying said third layer, said first and third layers being formed of a material whose band spacing between the valance band and the conductive band is greater than that of the material which forms said active layer, the improvement comprising means for confining the current flow through said active layer to a narrow path and for blocking current flow through laterally extending portions of said active layer, said means including spaced portions of said first layer extending through said active layer and into said third layer and isolating a narrow portion of said active layer between said spaced portions, and narrowly spaced apart semiconductor regions of said first conductivity type within said fourth layer at the interface of said third and fourth layers and forming respective barrier layers with said fourth layer, the portion of said fourth layer between said spaced regions at said interface being substantially aligned with said isolated portion of said actve layer.
Claim 18
Dependent Claim 230 words
In a double heterostructure laser diode including a semiconductor body having a light emitting active layer, a highly doped first layer of a first conductivity type overlying one major surface of said active layer, a second layer of said first conductivity type overlying said first layer, a third highly doped layer of the opposite conductivity type overlying the opposite major surface of said active layer and a fourth layer of said opposite conductivity type overlying said third layer, said first and third layers being formed of a material whose band spacing between the valance band and the conductive band is greater than that of the material which forms said active layer, the improvement comprising means for confining the current flow through said active layer to a narrow path and for blocking current flow through laterally extending portions of said active layer, said means including spaced portions of said first layer extending through said active layer and into said third layer and isolating a narrow portion of said active layer between said spaced portions, and narrowly spaced apart semiconductor regions of said first conductivity type within said fourth layer at the interface of said third and fourth layers and forming respective barrier layers with said fourth layer, the portion of said fourth layer between said spaced regions at said interface being substantially aligned with said isolated portion of said actve layer.

References Cited (Backward Citations)

US3341937A Cited
US3445303A Cited
US3303432A Cited
US3697336A Cited
US3479613A Cited
US3495140A Cited
US3579055A Cited
US3691476A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-11-18 1978-05-20 1978-11-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-11-18 1982-05-20 1982-11-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-11-18 1986-05-20 1986-11-19 $7700.00 Window Closed / Lapsed

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