US3852181A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Continuous cathode sputtering system
Assignee: Siemens AG
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Filing: 1973-10-30
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Granted: 1974-12-03
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Expires: 1993-10-30
Abstract
Abstract Apparatus for coating substrate members by sputtering comprises a sputtering chamber having two circular cylindrical tubes of insulating material connected together in axial alignment by a metal ring carrying sputtering electrodes and connections for the sputtering voltage, a source of sputtering gas, and a source of coolant. Vacuum-tight ports are provided at both ends of the sputtering chamber, with means for heating, in a vacuum, the substrates to be coated prior to their admission into the sputtering chamber, and means for cooling such substrates, in a vacuum, prior to their removal into the atmosphere. The substrates are transported through the sputtering chamber by means of a conveyor device. The apparatus provides for the rapid manufacture of thin-layer electrical circuits formed by sputtering metallic material on the insulating substrates.
Inventors
- 👤 W Cirkler
- 👤 A Schauer
- 👤 H Kausche
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 18:47
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/56
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
147 words
Coating apparatus comprising an input chamber, a heating chamber, a sputtering chamber, a cooling chamber, and an output chamber, means for connecting said chambers in series to permit a substrate member to be transported sequentially therethrough, said sputtering chamber comprising two cylindrical tubes formed of insulating material interconnected in axially aligned relationship by a metal connector, means for supporting a plurality of electrodes on said ring in position to envelop said chamber internally thereof, means on said ring for establishing a connection between at least one of said electrodes and a source of d.c. voltage, means for evacuating said sputtering chamber, means for introducing a gas into said sputtering chamber, a high frequency coil surrounding said sputtering chamber, and a transport means mounted centrally within said sputtering chamber and adapted to transPort a plurality of groups of said substrates sequentially through the center of said sputtering chamber.
Claim 2
Dependent Claim
147 words
Coating apparatus comprising an input chamber, a heating chamber, a sputtering chamber, a cooling chamber, and an output chamber, means for connecting said chambers in series to permit a substrate member to be transported sequentially therethrough, said sputtering chamber comprising two cylindrical tubes formed of insulating material interconnected in axially aligned relationship by a metal connector, means for supporting a plurality of electrodes on said ring in position to envelop said chamber internally thereof, means on said ring for establishing a connection between at least one of said electrodes and a source of d.c. voltage, means for evacuating said sputtering chamber, means for introducing a gas into said sputtering chamber, a high frequency coil surrounding said sputtering chamber, and a transport means mounted centrally within said sputtering chamber and adapted to transPort a plurality of groups of said substrates sequentially through the center of said sputtering chamber.
Claim 3
Dependent Claim
47 words
Apparatus according to claim 1, including an auxiliary coil arranged at each end of said sputtering chamber, and means for connecting a source of a low-frequency alternating current to said auxiliary coils for creating a low-frequency magnetic field for permeating the sputtering chamber in an axial direction.
Claim 4
Dependent Claim
19 words
Apparatus according to claim 2, including means for connecting an alternating current of 50 Hz to said auxiliary coils.
Claim 5
Dependent Claim
38 words
Apparatus according to claim 2, including means for applying a pulsating d.c. voltage to electrodes within said sputtering chamber, and means for applying an a.c. current to said coils which is in phase with said pulsating d.c. voltage.
Claim 6
Dependent Claim
18 words
Apparatus according to claim 2, wherein the distance between said auxiliary coils exceeds the radius of said coils.
Claim 7
Dependent Claim
48 words
Apparatus according to claim 1, wherein said electrodes enveloping the sputtering chamber comprise two circular cylindrical shell members, one of said members serving as the anode and the other as the cathode, said cathode shell covering an angle of approximately 135* relative to the axis of the chamber.
Claim 8
Dependent Claim
33 words
Apparatus according to claim 6, including a disk-shaped cathode electrode arranged at an end of said sputtering chamber, the diameter of said cathode disk being approximately half the diameter of said anode shell.
Claim 9
Dependent Claim
38 words
Apparatus according to claim 1, wherein said transport means comprises a plurality of carriers supported for axial movement within said sputtering chamber, each of said carriers being adapted to support two pairs of substrate members in back-to-back relationship.
Claim 10
Dependent Claim
38 words
Apparatus according to claim 8, wherein each of said carriers comprises a roller, a substrate member supporting member, and a depending arm, said roller supporting said carrier and said arm maintaining said carrier in a generally vertical orientation.
Claim 11
Dependent Claim
48 words
Apparatus according to claim 1, wherein said electrodes comprise a circular cylindrical shell connected as the anode of the sputtering system, and a plurality of rods spaced inwardly a small distance from said anode and covering an angle of approximately 135* relative to the axis of the chamber.
Claim 12
Dependent Claim
24 words
Apparatus according to claim 10, wherein the distance between the cathode rods corresponds to approximately three times the diameter of each of said rods.
Claim 13
Dependent Claim
29 words
Apparatus according to claim 1, including a pair of metal bellows for interconnecting said sputtering chamber with said heating and cooling chambers, to compensate for thermal expansion and contraction.
Claim 14
Dependent Claim
25 words
Apparatus according to claim 1, including means mounted on said metal connector for supporting a conduit for introducing an inert gas into said sputtering chamber.
Claim 15
Dependent Claim
39 words
Apparatus according to claim 1, including a choke window interconnecting each end of said sputtering chamber with the heating chamber and the cooling chamber, respectively, said means for evacuating said chamber being connected with said heating and cooling chambers.
Claim 16
Dependent Claim
30 words
Apparatus according to claim 1, including means for connecting a plurality of said sputtering chambers in series with each other, whereby several coatings can be successively applied to said substrates.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-02 | 1978-06-03 | 1978-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-02 | 1982-06-03 | 1982-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-02 | 1986-06-03 | 1986-12-03 | $7700.00 | Window Closed / Lapsed |