US3865655A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for diffusing impurities into nitride semiconductor crystals
Assignee: RCA Corp
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Filing: 1973-09-24
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Granted: 1975-02-11
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Expires: 1993-09-24
Abstract
Abstract A nitride semiconductor crystal is heated in an ammonia atmosphere and exposed to vaporized acceptor impurities to introduce the impurities into the crystal.
Inventors
- 👤 Jacques Isaac Pankove
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:05
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/12; C; C30; C30B; C30B29/00; C30B29/10; C30B29/40; C30B31/00; C30B31/06; C30B31/18; C30B31/185; H10P32/17; H10P32/174; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/113; Y10S438/00; Y10S438/909
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
29 words
A METHOD OF DIFFUSING A DOPANT INTO A NITRIDE BODY COMPRISING THE STEPS OF: CONTACTING THE NITRIDE BODY WITH THE DOPANT IN AN AMMONIA ATOMOSPHERE WHILE HEATING SAID BODY.
Claim 2
Independent Claim
29 words
A METHOD OF DIFFUSING A DOPANT INTO A NITRIDE BODY COMPRISING THE STEPS OF: CONTACTING THE NITRIDE BODY WITH THE DOPANT IN AN AMMONIA ATOMOSPHERE WHILE HEATING SAID BODY.
Claim 3
Dependent Claim
23 words
The method of claim 1 in which the nitride body is selected from the group consisting of GaN, InN, AlN and their alloys.
Claim 4
Dependent Claim
15 words
The method of claim 1 in which the dopant is either Li, Mg, or Zn.
Claim 5
Dependent Claim
70 words
The method of claim 3 in which the nitride body is of GaN which is heated in the range of 900*C to 1,100*C, if the dopant is Zn it is heated in the range of 400*C to 700*C, or if the dopant is Mg, it is heated in the range of 500*C to 900*C, or if the dopant is Li, it is heated in the range of 600*C to 1,000*C.
References Cited (Backward Citations)
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Cited
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US3592704A
Cited
US3603833A
Cited
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Cited
US3764414A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-02-10 | 1978-08-12 | 1979-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-02-10 | 1982-08-12 | 1983-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-02-10 | 1986-08-12 | 1987-02-11 | $7700.00 | Window Closed / Lapsed |