Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
217 words
Apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices which comprises: a hollow, cylindrical supporting fixture formed from an open material; a plurality of slice supporting members mounted on and within the supporting fixture and extending radially inwardly with respect thereto, each of said slice supporting members comprising a plurality of knife edges each extending angularly with respect to the radius and with respect to the axis of the fixture for supporting a plurality of semiconductor slices by means of point contact; said plurality of slice supporting members defining a plurality of axially spaced sets each including at least three angularly extending knife edges; the knife edges of each set extending at substantially the same angle for supporting slices in a generally radial orientation; said semiconductor slices when supported by said knife edges being stacked in a spaced apart array extending along the axis of the fixture; means for simultaneously applying light sensitive material to the entire surface areas of all of the semiconductor slices supported by the knife edges within the fixture; and means for rotating the fixture about its axis at a predetermined rate and for a predetermined time so that a predetermined thickness of the light sensitive material is uniformly exposed over the entire surface area of each semiconductor slice.
Claim 2
Dependent Claim
217 words
Apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices which comprises: a hollow, cylindrical supporting fixture formed from an open material; a plurality of slice supporting members mounted on and within the supporting fixture and extending radially inwardly with respect thereto, each of said slice supporting members comprising a plurality of knife edges each extending angularly with respect to the radius and with respect to the axis of the fixture for supporting a plurality of semiconductor slices by means of point contact; said plurality of slice supporting members defining a plurality of axially spaced sets each including at least three angularly extending knife edges; the knife edges of each set extending at substantially the same angle for supporting slices in a generally radial orientation; said semiconductor slices when supported by said knife edges being stacked in a spaced apart array extending along the axis of the fixture; means for simultaneously applying light sensitive material to the entire surface areas of all of the semiconductor slices supported by the knife edges within the fixture; and means for rotating the fixture about its axis at a predetermined rate and for a predetermined time so that a predetermined thickness of the light sensitive material is uniformly exposed over the entire surface area of each semiconductor slice.
Claim 3
Dependent Claim
50 words
The apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices according to claim 1 wherrein the supporting fixture comprises a pair of hingedly interconnected half cylinders and means for retaining the half cylinders in a closed relationship and thereby retaining the semiconductor slices within the fixture.
Claim 4
Dependent Claim
47 words
The apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices according to claim 2 wherein the slice supporting members within the fixture comprise a plurality of comb members each extending parallel to the axis of the fixture and radially inwardly with respect thereto.
Claim 5
Dependent Claim
54 words
The apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices according to claim 1 wherein wherein cylindrical structure comprises a cup-shaped structure and wherein the slice supporting members comprise at least three triangularly shaped vanes each extending parallel to the axis of the fixture and radially inwardly with respect thereto.
Claim 6
Dependent Claim
28 words
The apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices according to claim 1 wherein the cylindrical support fixture is formed from screening material.
Claim 7
Dependent Claim
45 words
The apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices according to claim 1 wherein the means for applying light sensitive material comprises means for dipping the fixture and the semiconductor slices contained therein into a quantity of light sensitive material.
Claim 8
Dependent Claim
46 words
The apparatus for simultaneously applying light sensitive material to a plurality of semiconductor slices according to claim 1 wherein the means for applying the light sensitive material comprises spraying means for directing light sensitive material through the cylindrical structure and onto the semiconductor slices contained therein.