Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
122 words
A semiconductor wafer chuck for carrying thin, substantially planar semiconductor workpieces comprising: a substantially planar surface having a workpiece receiving area thereon comprising a vacuum platen for attachment of a workpiece thereto; a plurality of channels adjacent one edge of said planar surface and superimposed thereof; a conduit in fluid communication with said channels, and a foraminous diffuser element in said conduit to equalize the pressure of fluid entering said channels; a source of at least Class 100 gaseous media connected to said conduit for supplying said channels with said gaseous media, whereby gaseous media emanating from said channels flows across the work area to create a laminar flow and a surface attachment effect of the gaseous media over said work area.
Claim 2
Dependent Claim
122 words
A semiconductor wafer chuck for carrying thin, substantially planar semiconductor workpieces comprising: a substantially planar surface having a workpiece receiving area thereon comprising a vacuum platen for attachment of a workpiece thereto; a plurality of channels adjacent one edge of said planar surface and superimposed thereof; a conduit in fluid communication with said channels, and a foraminous diffuser element in said conduit to equalize the pressure of fluid entering said channels; a source of at least Class 100 gaseous media connected to said conduit for supplying said channels with said gaseous media, whereby gaseous media emanating from said channels flows across the work area to create a laminar flow and a surface attachment effect of the gaseous media over said work area.
Claim 3
Dependent Claim
24 words
A chuck in accordance with claim 1 including means to effect attachment of a workpiece to said planar surface in said workpiece receiving area.
Claim 4
Dependent Claim
26 words
A chuck in accordance with claim 2 wherein said means to effect attachment of said workpiece to said workpiece receiving area comprises a source of vacuum.
Claim 5
Dependent Claim
53 words
A chuck in accordance with claim 1 including a cap member having side skirt portions respectively joined by an arcuate portion and connected to said platen, said arcuate portion including said means defining a plurality of channels, and said side skirt portions extending therefrom to form a side boundary for said work area.
Claim 6
Dependent Claim
30 words
A chuck in accordance with claim 4 including depending side walls on said skirt portions which merge into said planar surface and extend outwardly therefrom substantially parallel to said channels.
Claim 7
Dependent Claim
35 words
A chuck in accordance with claim 1 including a second plurality of channels superimposed of said first mentioned plurality and means to supply at least Class 100 gaseous media to said second plurality of channels.
Claim 8
Dependent Claim
36 words
A chuck in accordance with claim 6 wherein said means to supply at least Class 100 gaseous media to said second plurality of channels comprises branch means from said conduit to said second plurality of channels.
Claim 9
Dependent Claim
29 words
A chuck in accordance with claim 7 including means to supply a lower volume of gaseous media to said second plurality of channels than said first plurality of channels.
Claim 10
Dependent Claim
35 words
A chuck in accordance with claim 7 wherein said branch means from said conduit and supplying said second plurality of channels is smaller than the portion of said conduit supplying said first plurality of channels.