US4068019A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spin coating process for prevention of edge buildup
Assignee: International Business Machines Corp
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Filing: 1976-11-08
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Granted: 1978-01-10
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Expires: 1996-11-08
Abstract
Abstract A spin coating process produces a constant film thickness across a planar substrate by placing a frame around the substrate boundary to act as an auxiliary surface to allow a continuous film of the fluid to be spin coated. The auxiliary surface is elevated with respect to the plane of the substrate surface.
Inventors
- 👤 Richard Stefan Boeckl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162; B; B05; B05C; B05C11/00; B05C11/02; B05C11/08; B05D; B05D1/00; B05D1/002; B05D1/005
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
107 words
In a spin coating process, the steps for minimizing the edge buildup of a coating material to be coated onto a substrate comprising: attaching a frame boundary immediate to the periphery of the substrate with a surface of the he frame boundary elevated above the planar surface of the substrate that is to be coated; depositing the coating material onto the framed substrate; and rotating the framed substrate in a horizontal upright position with the deposited material about its approximate center, said frame boundary elevated surface becoming an auxiliary surface extension to the substrate for the deposited coating material during the step of rotating the framed substrate.
Claim 2
Dependent Claim
107 words
In a spin coating process, the steps for minimizing the edge buildup of a coating material to be coated onto a substrate comprising: attaching a frame boundary immediate to the periphery of the substrate with a surface of the he frame boundary elevated above the planar surface of the substrate that is to be coated; depositing the coating material onto the framed substrate; and rotating the framed substrate in a horizontal upright position with the deposited material about its approximate center, said frame boundary elevated surface becoming an auxiliary surface extension to the substrate for the deposited coating material during the step of rotating the framed substrate.
Claim 3
Dependent Claim
28 words
A spin coating process as defined in claim 1 wherein the step of rotating the framed substrate is performed prior to the step of depositing the coating material.
Claim 4
Dependent Claim
22 words
A spin coating process as defined in claim 1 wherein the step of depositing the coating material deposits a liquid photoresist material.
Claim 5
Dependent Claim
25 words
A spin coating process as defined in claim 1 further including the step of stopping the rotating framed substrate when the desired coating is reached.
Claim 6
Dependent Claim
38 words
A spin coating process as defined in claim 1 wherein the frame boundary is attached immediate to the periphery of the substrate with its elevated surface between 40 to 100 microns above the planar surface of the substrate.
Claim 7
Dependent Claim
106 words
A spin coating apparatus for minimizing edge buildup of a coating material comprising: framing means for attachment immediate to the periphery of a substrate to be coated, said framing means having a surface elevated above the planar surface of the substrate; means for rotating the framed substrate in a horizontal upright position about its approximate center; and means for depositing the coating material onto the substrate, said elevated surface of said framing means forming an auxiliary surface extension to the substrate for the coating material while rotated by said rotating means to minimize the edge buildup of the coating material at the edges of the substrate.
Claim 8
Dependent Claim
106 words
A spin coating apparatus for minimizing edge buildup of a coating material comprising: framing means for attachment immediate to the periphery of a substrate to be coated, said framing means having a surface elevated above the planar surface of the substrate; means for rotating the framed substrate in a horizontal upright position about its approximate center; and means for depositing the coating material onto the substrate, said elevated surface of said framing means forming an auxiliary surface extension to the substrate for the coating material while rotated by said rotating means to minimize the edge buildup of the coating material at the edges of the substrate.
Claim 9
Dependent Claim
26 words
A spin coating apparatus as defined in claim 6 wherein the framing means is in the shape of a square for attachment to a square substrate.
Claim 10
Dependent Claim
82 words
In an upright, horizontally operated spin coating apparatus, the improvement comprising a framing means for attachment immediate to the periphery of a substrate to be coated, said framing means having a surface elevated above the planar surface of the substrate, said elevated surface of said framing means forming an auxiliary surface extension to the substrate for the coating material to minimize the edge buildup of the coating material at the edges of the substrate during the operation of the spin coating apparatus.
Claim 11
Dependent Claim
82 words
In an upright, horizontally operated spin coating apparatus, the improvement comprising a framing means for attachment immediate to the periphery of a substrate to be coated, said framing means having a surface elevated above the planar surface of the substrate, said elevated surface of said framing means forming an auxiliary surface extension to the substrate for the coating material to minimize the edge buildup of the coating material at the edges of the substrate during the operation of the spin coating apparatus.
References Cited (Backward Citations)
FR54387E
Cited
US3323491A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-01-09 | 1981-07-11 | 1982-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-01-09 | 1985-07-11 | 1986-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-01-09 | 1989-07-11 | 1990-01-10 | $7700.00 | Window Closed / Lapsed |