Abstract A consistently low resistance ohmic contact is made to an aluminum-containing compound semiconductor by a multilayer deposition and heat treatment process. The process includes the deposition of a transition layer on the semiconductor surface to be contacted and an overlying gold layer to provide external contact. The transition layer consists of aluminum and a shallow dopant element which may be deposited as successive layers or together. After the transition layer and the gold overlay are deposited, the composite is raised to a temperature at which the transition layer is liquid. In cases in which the gold-dopant binary system has a polyphase region, it is preferable to select the thickness of the gold layer such that the gold-dopant alloy is in the solid solution region of the phase diagram of that binary system, to prevent enhanced diffusion to the upper gold surface along grain boundaries. In an exemplary realization, an Al-Sn layer was used to contact n-type GaAlAs.
Method for making ohmic contact to a semiconductor body including a surface layer at least one micrometer thick consisting primarily of an aluminum-containing compound semiconductor,, comprising a. depositing a transition layer of aluminum and at least one shallow dopant element on the body b. depositing a layer of gold over and in contact with the transition layer and then c. heating the body with said transition and gold layers thereon in a nonoxidizing atmosphere to a temperature above the temperature at which the transition layer is liquid and below the melting temperature of gold.
Claim 2
Dependent Claim
94 words
Method for making ohmic contact to a semiconductor body including a surface layer at least one micrometer thick consisting primarily of an aluminum-containing compound semiconductor,, comprising a. depositing a transition layer of aluminum and at least one shallow dopant element on the body b. depositing a layer of gold over and in contact with the transition layer and then c. heating the body with said transition and gold layers thereon in a nonoxidizing atmosphere to a temperature above the temperature at which the transition layer is liquid and below the melting temperature of gold.
Claim 3
Dependent Claim
17 words
Method of claim 1 in which the constituents of the transition layer are deposited as successvie layers.
Claim 4
Dependent Claim
11 words
Method of claim 2 in which the aluminum is deposited first.
Claim 5
Dependent Claim
20 words
Method of claim 1 in which the body is n-type and the shallow dopant element is tin, germanium or silicon.
Claim 6
Dependent Claim
18 words
Method of claim 4 in which the body is gallium aluminum arsenide and the shallow dopant is tin.
Claim 7
Dependent Claim
18 words
Method of claim 1 in which the body is p-type and the shallow dopant is beryllium or zinc.
Claim 8
Dependent Claim
18 words
A method of claim 1 including the further step of applying an external contact to the gold layer.