US4087239A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for imparting combined centrosymmetric and noncentro-symmetric rotation to semiconductor bodies
Assignee: General Electric Co
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Filing: 1976-10-18
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Granted: 1978-05-02
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Expires: 1996-10-18
Abstract
Abstract An apparatus for imparting combined centro-symmetric and noncentro-symmetric rotation to semiconductor bodies comprises a liquid-cooled sun gear, a stationary liquid-cooled ring gear coaxial with and radially spaced outwardly from the sun gear, and at least one planet gear disposed between and driven in engagement with the sun and ring gears. Means are provided for supporting a semiconductor body on each of the planet gears while minimizing the conduction of heat from the semiconductor body to the planet gear. Means are also provided for guiding a semiconductor body onto the supporting means and centering the semiconductor body on the planet gear. Thermal distortion of the apparatus is minimized when heated to extreme temperatures making the apparatus ideally suited for processing the semiconductor bodies with heat as in processing by temperature gradient zone melting.
Inventors
- 👤 Harvey E. Cline
- 👤 Thomas R. Anthony
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:26
CPC Classifications
C; C30; C30B; C30B13/00; C30B13/16; C30B13/22; C30B13/24; C30B13/32; Y; Y10; Y10S; Y10S117/00; Y10S117/90; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
143 words
An apparatus for imparting combined centro-symmetric and noncentro-symmetric rotation to at least one body of semiconductor material during processing thereof by heating, said apparatus comprising: a sun gear adapted to be rotatably driven; a ring gear coaxial with and radially spaced outwardly from said sun gear; at least one planet gear disposed between and in driven engagement with said sun and ring gears; a base, said base being co-planar with said sun gear and providing a support for each of said planet gears; the gear teeth of said ring gear comprising a multiplicity of first pins fixed to and upstanding from said base, said first pins being disposed in a circular arrangement around said sun gear, and means for supporting a semiconductor body on each such planet gear, and restricting the conduction of heat from said semiconductor body to each such planet gear.
Claim 2
Independent Claim
143 words
An apparatus for imparting combined centro-symmetric and noncentro-symmetric rotation to at least one body of semiconductor material during processing thereof by heating, said apparatus comprising: a sun gear adapted to be rotatably driven; a ring gear coaxial with and radially spaced outwardly from said sun gear; at least one planet gear disposed between and in driven engagement with said sun and ring gears; a base, said base being co-planar with said sun gear and providing a support for each of said planet gears; the gear teeth of said ring gear comprising a multiplicity of first pins fixed to and upstanding from said base, said first pins being disposed in a circular arrangement around said sun gear, and means for supporting a semiconductor body on each such planet gear, and restricting the conduction of heat from said semiconductor body to each such planet gear.
Claim 3
Dependent Claim
19 words
The apparatus of claim 1 wherein said first pins are fixed to said base by a threaded engagement therewith.
Claim 4
Dependent Claim
24 words
The apparatus of claim 1 wherein said base includes an internal coolant passage adapted for connection to a source and drain of liquid coolant.
Claim 5
Dependent Claim
10 words
The apparatus of claim 3 wherein said base is aluminum.
Claim 6
Dependent Claim
15 words
The apparatus of claim 3 wherein said base is coated with a radiation absorbant coating.
Claim 7
Dependent Claim
12 words
The apparatus of claim 5 wherein said radiation absorbant coating comprises carbon.
Claim 8
Dependent Claim
24 words
The apparatus of claim 3 wherein each planet gear comprises an annulus with a plurality of gear teeth disposed on the outer periphery thereof.
Claim 9
Dependent Claim
36 words
The apparatus of claim 1 wherein said means for supporting a semiconductor body on each of said planet gears comprises a plurality of first refractory pins supported on and upstanding from each of said planet gears.
Claim 10
Dependent Claim
39 words
The apparatus of claim 8 and further including a plurality of third pins fixed to and upstanding from each of said planet gears, each of said first refractory pins being seated on a corresponding one of said third pins.
Claim 11
Dependent Claim
18 words
The apparatus of claim 9 wherein the material of said planet gears and said third pins comprises nickel.
Claim 12
Dependent Claim
13 words
The apparatus of claim 8 wherein said first refractory pins are of quartz.
Claim 13
Dependent Claim
19 words
The apparatus of claim 8 wherein said refractory pins are pointed on ends adapted to contact said semiconductor bodies.
Claim 14
Dependent Claim
32 words
The apparatus of claim 1 and further including means disposed on said planet gears for guiding said semiconductor bodies onto said supporting means and centering said semiconductor bodies on said planet gears.
Claim 15
Dependent Claim
61 words
The apparatus of claim 13 wherein said guiding and centering means comprises a plurality of second refractory pins supported on each of said planet gears and making an acute angle with a portion of a major surface of said planet gear disposed radially outward from said second refractory pins, said second refractory pins being disposed radially outwardly from said supporting means.
Claim 16
Dependent Claim
39 words
The apparatus of claim 14 and further including a plurality of fourth pins fixed to and upstanding from each of said planet gears, each of said second refractory pins being seated on a corresponding one of said fourth pins.
Claim 17
Dependent Claim
12 words
The apparatus of claim 15 wherein said fourth pins are of nickel.
Claim 18
Dependent Claim
13 words
The apparatus of claim 14 wherein said second refractory pins are of quartz.
Claim 19
Dependent Claim
82 words
The apparatus of claim 1 and further including means for indicating a predetermined position of said planet gears, said indicating means comprising: signaling means; sensing means and a rotatable shutter, the rotation of said shutter being synchronized with said sun gear and disposed between said signaling and sensing means said shutter being constructed and arranged to allow a signal from said signaling means to be received by said sensing means only upon the location of said sun gear in a predetermined position.
Claim 20
Dependent Claim
15 words
The apparatus of claim 18 wherein said signaling and sensing means comprise an optical switch.
Claim 21
Dependent Claim
43 words
The apparatus of claim 18 wherein said shutter comprises a gear driven with said sun gear and having an aperture therein said aperture allowing the reception by said receiving means of a said signaling means upon a predetermined orientation of said sun gear.
Claim 22
Dependent Claim
50 words
The apparatus of claim 1 wherein said sun gear comprises: a body member and a multiplicity of gear teeth disposed in a circular arrangement about the axis of rotation of said sun gear, each of said gear teeth comprising a second pin fixed to and upstanding from said body member.
Claim 23
Dependent Claim
19 words
The apparatus of claim 21 wherein said second pins are fixed to said body member by threaded engagement therewith.
Claim 24
Dependent Claim
49 words
The apparatus of claim 21 and further including means for cooling said sun gear, said cooling means comprising: means for introducing liquid coolant into contact with a major surface of said body member and means for draining liquid coolant from contact with said major surface of said body member.
Claim 25
Dependent Claim
69 words
The apparatus of claim 23 wherein said means for introducing liquid coolant comprises a liquid coolant supply tube adapted for connection to a source of liquid coolant, said liquid coolant supply tube having an outlet in proximity to said major surface of said body member and so constructed and arranged as to direct a flow of liquid coolant from said outlet against said major surface of said body member.
Claim 26
Dependent Claim
87 words
The apparatus of claim 23 wherein said means for draining liquid coolant from said major surface of said body member comprises: a cavity in the interior of said body member, said cavity being partially defined by said major surface of said body member and adapted to collect liquid coolant which has been directed against said major surface of said body member and a drain orifice disposed in fluid communication with said cavity, coolant collected in said cavity being drained from said sun gear through said drain orifice.
Claim 27
Dependent Claim
44 words
The apparatus of claim 25 and further including a hollow shaft coaxial with and fixed to said body member, said liquid supply tube extending through said hollow shaft along the central axis thereof and said liquid drain orifice being disposed in said hollow shaft.
Claim 28
Dependent Claim
16 words
The apparatus of claim 21 wherein said body member is coated with a radiation absorbant coating.
Claim 29
Dependent Claim
15 words
The apparatus of claim 27 wherein the material of said radiation absorbant coating comprises carbon.
Claim 30
Dependent Claim
13 words
The apparatus of claim 21 wherein said body member is made of aluminum.
References Cited (Backward Citations)
US2311942A
Cited
US3081648A
Cited
US3422704A
Cited
US3697722A
Cited
US3904442A
Cited
US3971875A
Cited
US4012236A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-05-01 | 1981-10-31 | 1982-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-05-01 | 1985-10-31 | 1986-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-05-01 | 1989-10-31 | 1990-05-02 | $7700.00 | Window Closed / Lapsed |