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US4131902A Expired / Lapsed US ⏱️ 0.0 years remaining

Novel bipolar transistor with a dual-dielectric tunnel emitter

Assignee: Micron Technology Inc
•
Filing: 1977-09-30
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Granted: 1978-12-26
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Expires: 1997-09-30
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Abstract

Abstract A dual-dielectric emitter bipolar transistor device is disclosed. Two dielectric layers are deposited over the base region of a base-collector junction and are used to emulate an emitter of a conventional bipolar transistor. The transistor device obtained thereby provides for a compatible technology to easily incorporate bipolar transistors with CMOS, MNOS, and CCD structures. Preferably, the first of the two dielectric layers which is in contact with the base region is made from SiO 2 and has a thickness of substantially less than 30A. The second of the two layers which sandwiches the first layer between itself and the base region may be made from a silicon-nitride compound, preferably having substantially equal proportions of silicon and nitrogen and a thickness dimension ranging from 50 to 500A. Means are provided for application of a bias voltage potential of such polarity to inject minority carriers into the base from the emitter across the emitter-base junction and also a sufficient reverse bias voltage potential across the base-collector junction. At suitably chosen forward biased voltage potentials applied across the dual-dielectric emitter junction, minority carriers are injected across the dielectric-semiconductor interface and into the base region. This minority carrier injection is attributed to a direct tunneling mechanism.

Inventors

  • 👤 Francis J. Kub

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 13:19
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/165

Claims Analysis

Total Claims: 34
Claim 1
Independent Claim 246 words
A transistor device having a dual-dielectric tunnel emitter, comprising: a collector region of semiconductor material doped with a p-type doping impurity; a base region of semiconductor material doped with a n-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a n-p, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; means for applying a voltage potential between the other surface of said second dielectric layer and said base region to cause injection of minority carriers across the dielectric-semiconductor interface and into the base region, said minority carrier injection occurring at times when a positive potential of sufficient magnitude is applied to said other dielectric surface of the second layer with respect to said n-type doped base region; and means for applying a voltage potential across the n-p, base-collector junction to transport said injected minority carriers across said n-p, base-collector junction, said base minority carrier transport mechanism occurring when a negative potential of sufficient magnitude is applied to said collector region with respect to said base region.
Claim 2
Dependent Claim 246 words
A transistor device having a dual-dielectric tunnel emitter, comprising: a collector region of semiconductor material doped with a p-type doping impurity; a base region of semiconductor material doped with a n-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a n-p, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; means for applying a voltage potential between the other surface of said second dielectric layer and said base region to cause injection of minority carriers across the dielectric-semiconductor interface and into the base region, said minority carrier injection occurring at times when a positive potential of sufficient magnitude is applied to said other dielectric surface of the second layer with respect to said n-type doped base region; and means for applying a voltage potential across the n-p, base-collector junction to transport said injected minority carriers across said n-p, base-collector junction, said base minority carrier transport mechanism occurring when a negative potential of sufficient magnitude is applied to said collector region with respect to said base region.
Claim 3
Dependent Claim 39 words
A transistor device according to claim 1 wherein said first layer is of a thickness to promote a direct tunneling mechanism for injecting minority carriers across the dielectric-semiconductor interface when a positive potential of sufficient magnitude is applied thereacross.
Claim 4
Dependent Claim 18 words
A transistor device according to claim 1 wherein the dielectric material of the first layer is silicon dioxide.
Claim 5
Dependent Claim 21 words
A transistor device according to claim 3 wherein the thickness of the silicon dioxide first layer is less than approximately 30A.
Claim 6
Dependent Claim 25 words
A transistor device according to claim 1 wherein the dielectric material of the second layer is a compound comprising the elements of silicon and nitrogen.
Claim 7
Dependent Claim 19 words
A transistor device according to claim 5 wherein the elements of silicon and nitrogen are substantially equal in proportion.
Claim 8
Dependent Claim 19 words
A transistor device according to claim 5 wherein a range of thickness dimensions for the second layer is 50-500A.
Claim 9
Dependent Claim 245 words
A transistor device having a dual-dielectric tunnel emitter, comprising: a collector region of semiconductor material doped with a n-type doping impurity; a base region of semiconductor material doped with a p-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a p-n, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; means for applying a voltage potential between the other surface of said second dielectric layer and said base region to cause injection of minority carriers across the dielectric-semiconductor interface and into the base region, said minority carrier injection occuring at times when a nagative potential of sufficient magnitude is applied to the other dielectric surface of said second layer with respect to said p-type doped base region; and means for applying a potential across the p-n, base-collector junction to transport said injected minority carriers across said p-n, base-collector junction, said base minority carrier transport mechanism occurring when a positive potential of sufficient magnitude is applied to said collector region with respect to said base region.
Claim 10
Dependent Claim 245 words
A transistor device having a dual-dielectric tunnel emitter, comprising: a collector region of semiconductor material doped with a n-type doping impurity; a base region of semiconductor material doped with a p-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a p-n, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; means for applying a voltage potential between the other surface of said second dielectric layer and said base region to cause injection of minority carriers across the dielectric-semiconductor interface and into the base region, said minority carrier injection occuring at times when a nagative potential of sufficient magnitude is applied to the other dielectric surface of said second layer with respect to said p-type doped base region; and means for applying a potential across the p-n, base-collector junction to transport said injected minority carriers across said p-n, base-collector junction, said base minority carrier transport mechanism occurring when a positive potential of sufficient magnitude is applied to said collector region with respect to said base region.
Claim 11
Dependent Claim 39 words
A transistor device according to claim 8 wherein the first layer is of a thickness to promote a direct tunneling mechanism for injecting minority carriers across the dielectric-semiconductor interface when a negative potential of sufficient magnitude is applied thereacross.
Claim 12
Dependent Claim 17 words
A transistor device according to claim 8 wherein the dielectric material of the first layer is silicon-dioxide.
Claim 13
Dependent Claim 21 words
A transistor device according to claim 10 wherein the thickness of the silicon dioxide first layer is less than approximately 30A.
Claim 14
Dependent Claim 25 words
A transistor device according to claim 8 wherein the dielectric material of the second layer is a compound comprising the elements of silicon and nitrogen.
Claim 15
Dependent Claim 19 words
A transistor device according to claim 12 wherein the elements of silicon and nitrogen are substantially equal in proportion.
Claim 16
Dependent Claim 19 words
A transistor device according to claim 12 wherein a range of thickness dimensions for the second layer is 50-500A.
Claim 17
Dependent Claim 312 words
A transistor circuit for supplying current to a load of predetermined impedance, said circuit comprising: a collector region of semiconductor material doped with a p-type doping impurity; a base region of semiconductor material doped with a n-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a n-p, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; a first means for applying a voltage potential to the other surface of said second dielectric layer; a second means for applying a voltage potential to said base region; a third means for connecting said collector region to said load of predetermined impedance to allow current therebetween; a first source of voltage potential connected to said first means; a second source of voltage potential connected to said second means, said second source having a voltage potential sufficiently negative with respect to said first source such that injection of minority carriers is caused to occur across the dielectric-semiconductor interface and into the base region; and a third source of voltage potential connected to said load of predetermined impedance, said third source having a voltage potential sufficiently negative with respect to said second source to cause a substantial portion of said injected minority carriers to flow across said base-collector junction into said collector region and therefrom through said load, the amount of said minority carrier flow being governed by the voltage differential between said first and second sources.
Claim 18
Dependent Claim 312 words
A transistor circuit for supplying current to a load of predetermined impedance, said circuit comprising: a collector region of semiconductor material doped with a p-type doping impurity; a base region of semiconductor material doped with a n-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a n-p, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; a first means for applying a voltage potential to the other surface of said second dielectric layer; a second means for applying a voltage potential to said base region; a third means for connecting said collector region to said load of predetermined impedance to allow current therebetween; a first source of voltage potential connected to said first means; a second source of voltage potential connected to said second means, said second source having a voltage potential sufficiently negative with respect to said first source such that injection of minority carriers is caused to occur across the dielectric-semiconductor interface and into the base region; and a third source of voltage potential connected to said load of predetermined impedance, said third source having a voltage potential sufficiently negative with respect to said second source to cause a substantial portion of said injected minority carriers to flow across said base-collector junction into said collector region and therefrom through said load, the amount of said minority carrier flow being governed by the voltage differential between said first and second sources.
Claim 19
Dependent Claim 53 words
A transistor circuit according to claim 15 wherein the first layer is of a thickness to promote a direct tunneling mechanism for injecting minority carriers across the dielectric-semiconductor interface when a positive potential of sufficient magnitude being affected by the difference in voltage potentials of the first and second sources is applied thereacross.
Claim 20
Dependent Claim 18 words
A transistor circuit according to claim 15 wherein the dielectric material of the first layer is silicon dioxide.
Claim 21
Dependent Claim 21 words
A transistor circuit according to claim 17 wherein the thickness of the silicon dioxide first layer is less than approximately 30A.
Claim 22
Dependent Claim 18 words
A transistor circuit according to claim 15 wherein the dielectric material of the first layer is aluminum oxide.
Claim 23
Dependent Claim 25 words
A transistor circuit according to claim 15 wherein the dielectric material of the second layer is a compound comprising the elements of silicon and nitrogen.
Claim 24
Dependent Claim 19 words
A transistor circuit according to claim 20 wherein the elements of silicon and nitrogen are substantially equal in proportion.
Claim 25
Dependent Claim 19 words
A transistor circuit according to claim 20 wherein a range of thickness dimensions for the second layer is 50-500A.
Claim 26
Dependent Claim 311 words
A transistor circuit for supplying current to a load of predetermined impedance, said circuit comprising: a collector region of semiconductor material doped with a n-type doping impurity; a base region of semiconductor material doped with a p-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a p-n, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; a first means for applying a voltage potential to the other surface of said second dielectric layer; a second means for applying a voltage potential to said base region; a third means for connecting said collector region to said load of predetermined impedance to allow current therebetween; a first source of voltage potential connected to said first means; a second source of voltage potential connected to said second means, said second source having a voltage potential sufficiently positive with respect to said first source such that injection of minority carriers is caused to occur across the dielectric-semiconductor interface and into the base region; and a third source of voltage potential connected to said load of predetermined impedance, said third source having a voltage potential sufficiently positive with respect to said second source to cause a substantial portion of said injected minority carriers to flow across said base-collector junction into said collector region and therefrom through said load, the amount of said load current being governed by the voltage differential between said first and second sources.
Claim 27
Dependent Claim 311 words
A transistor circuit for supplying current to a load of predetermined impedance, said circuit comprising: a collector region of semiconductor material doped with a n-type doping impurity; a base region of semiconductor material doped with a p-type doping impurity and disposed adjacent to and in physical contact with the collector region to form a p-n, base-collector junction; a first layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with said base region to form a dielectric-semiconductor interface; a second layer of dielectric material of a predetermined thickness having one surface disposed adjacent to and in physical contact with the other surface of said first dielectric layer, said first dielectric layer being sandwiched between said base region and said second dielectric layer to form a dual-dielectric emitter-base junction; a first means for applying a voltage potential to the other surface of said second dielectric layer; a second means for applying a voltage potential to said base region; a third means for connecting said collector region to said load of predetermined impedance to allow current therebetween; a first source of voltage potential connected to said first means; a second source of voltage potential connected to said second means, said second source having a voltage potential sufficiently positive with respect to said first source such that injection of minority carriers is caused to occur across the dielectric-semiconductor interface and into the base region; and a third source of voltage potential connected to said load of predetermined impedance, said third source having a voltage potential sufficiently positive with respect to said second source to cause a substantial portion of said injected minority carriers to flow across said base-collector junction into said collector region and therefrom through said load, the amount of said load current being governed by the voltage differential between said first and second sources.
Claim 28
Dependent Claim 53 words
A transistor circuit according to claim 23 wherein the first layer is of a thickness to promote a direct tunneling mechanism for injecting minority carriers across the dielectric-semiconductor interface when a negative potential of sufficient magnitude being affected by the difference in voltage potentials of the first and second sources is applied thereacross.
Claim 29
Dependent Claim 17 words
A transistor circuit according to claim 23 wherein the dielectric material of the first layer is silicon-dioxide.
Claim 30
Dependent Claim 18 words
A transistor circuit according to claim 23 wherein the dielectric material of the first layer is aluminum oxide.
Claim 31
Dependent Claim 21 words
A transistor circuit according to claim 10 wherein the thickness of the silicon dioxide first layer is less than approximately 30A.
Claim 32
Dependent Claim 25 words
A transistor circuit according to claim 8 wherein the dielectric material of the second layer is a compound comprising the elements of silicon and nitrogen.
Claim 33
Dependent Claim 19 words
A transistor circuit according to claim 12 wherein the elements of silicon and nitrogen are substantially equal in proportion.
Claim 34
Dependent Claim 19 words
A transistor circuit according to claim 12 wherein a range of thickness dimensions for the second layer is 50-500A.

References Cited (Backward Citations)

US3060327A Cited
US3831185A Cited
US3831186A Cited
US4042945A Cited
US3979613A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-12-25 1982-06-26 1982-12-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-12-25 1986-06-26 1986-12-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-12-25 1990-06-26 1990-12-26 $7700.00 Window Closed / Lapsed

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