Pneumatic gross leak detector

Claim 1

Apparatus for gross leak testing of a micro-electronic package comprising: (a) a frame having a vertically movable upper section and a stationary lower section; (b) a chamber provided with walls secured to said upper section for movement therewith, said chamber including upper, lower and intermediate portions disposed in communication; (c) a test chamber base secured to said lower stationary section and disposed to receive said micro-electronic package therein for testing thereof; (d) a first piston mounted in said upper chamber section, said upper chamber section disposd in communication with a first source of air for movement of said piston whereby said upper frame section is moved downwardly for sealing engagement of said lower chamber portion with said test chamber base; (e) a second piston mounted in said lower chamber portion, said lower chamber portion disposed in communication with a second source of air for movement of said second piston whereby air in said lower chamber portion is compressed to a predetermined value whereby some of said compressed air will leak into said micro-electronic package if said package is defective; (f) pressure transducer means communicating into said test chamber base for indicating the pressure therein; and, (g) spring biasing means secured between said first and second pistons for biased relation thereof.