US4267456A
Expired / Lapsed
US
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Electron beam type exposure apparatus
Assignee: Toshiba Corp
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Filing: 1979-11-30
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Granted: 1981-05-12
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Expires: 1999-11-30
Abstract
Abstract An electron beam type exposure apparatus includes an electron generator for emitting electron beams modulated in accordance with dot data read out of a memory, a drive unit for vertically moving a table carrying a workpiece on which a pattern is to be drawn, and a scanning unit for scanning the surface of the workpiece by electron beams. The exposure apparatus further includes an image selection circuit for judging from dot pattern data read out of the memory whether a pattern to be drawn on the workpiece represents a regular or mirror image, and the dot data are read out of the memory in the order defined by the direction in which the workpiece-carrying table is moved and also by an output logic signal from the image selection circuit.
Inventors
- 👤 Yutaka Hidai
- 👤 Nobuo Okuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:35
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
277 words
An electron beam type exposure apparatus comprising: a table for carrying a workpiece; memory means for storing dot pattern data corresponding to a dot pattern to be drawn on the workpiece in the unit of words, each of said words being formed of a plurality of dot data and an N number N≧2) of words constituting dot pattern data corresponding to one scanning line; read control means for reading the dot pattern data out of the memory means in the unit of words; data conversion means for converting words read out of the memory means into serial dot data; electron beam generator means for emitting electron beams modulated in accordance with the serial dot data delivered from the data conversion means; first scanning means for scanning the workpiece in a first direction by electron beams issued from the electron beam generator; second scanning means for moving the workpiece relatively to the electron beam generator in a direction perpendicular to the first direction; scanning signal generator means for supplying the second scanning means with a signal instructing the direction in which the workpiece is moved relatively to the electron beam generator means; image selection means for judging whether a pattern to be drawn on the workpiece represents a regular or mirror image and producing a signal corresponding to the selected one of the regular and mirror images; and control signal generator means which, upon receipt of output signals from the image selection means and scanning signal generator means, supplies the read control means with a control signal having a first or second logic level, thereby changing the order in which words are read out of the memory means.
Claim 2
Dependent Claim
277 words
An electron beam type exposure apparatus comprising: a table for carrying a workpiece; memory means for storing dot pattern data corresponding to a dot pattern to be drawn on the workpiece in the unit of words, each of said words being formed of a plurality of dot data and an N number N≧2) of words constituting dot pattern data corresponding to one scanning line; read control means for reading the dot pattern data out of the memory means in the unit of words; data conversion means for converting words read out of the memory means into serial dot data; electron beam generator means for emitting electron beams modulated in accordance with the serial dot data delivered from the data conversion means; first scanning means for scanning the workpiece in a first direction by electron beams issued from the electron beam generator; second scanning means for moving the workpiece relatively to the electron beam generator in a direction perpendicular to the first direction; scanning signal generator means for supplying the second scanning means with a signal instructing the direction in which the workpiece is moved relatively to the electron beam generator means; image selection means for judging whether a pattern to be drawn on the workpiece represents a regular or mirror image and producing a signal corresponding to the selected one of the regular and mirror images; and control signal generator means which, upon receipt of output signals from the image selection means and scanning signal generator means, supplies the read control means with a control signal having a first or second logic level, thereby changing the order in which words are read out of the memory means.
Claim 3
Dependent Claim
24 words
The electron beam type exposure apparatus according to claim 1, wherein the control signal generator means is formed of an exclusive OR gate circuit.
Claim 4
Dependent Claim
178 words
The electron beam type exposure apparatus according to claim 2, wherein the read control circuit comprises; a clock pulse generator; an N-scale counter for counting output clock pulses from the clock pulse generator; an up-down counter which, upon receipt of output pulses from the N-scale counter, produces count data which constitutes a signal for specifying the addresses of the memory means in combination with the count data of the N-scale counter; a set signal generator circuit; an initial value set circuit which, upon receipt of an output signal of first logic level from the set signal generator circuit and an output control signal from the exclusive OR gate circuit, sets the contents of the up-down counter at a minimum value, set said up-down counter for the up-counting mode, and, upon receipt of an output signal from the set signal generator circuit and an output control signal of the second logic level from the exclusive OR gate circuit, sets the contents of the up-down counter to a maximum value, and finally sets the up-down counter for the down-counting mode.
Claim 5
Dependent Claim
64 words
The electron beam type exposure apparatus according to claim 3, wherein, upon receipt of an output pulse from the clock pulse generator, the data conversion means converts words read out of the memory means into serial dot data; and the read control means divides the frequency of an output pulse from the clock pulse generator, and supplies a frequency-divided pulse to the N-scale counter.
Claim 6
Dependent Claim
70 words
The electron beam type exposure apparatus according to claim 3, wherein the initial value set circuit comprises: a first AND gate circuit supplied with output signal from the set signal generator circuit and exclusive OR gate circuit; an inverter circuit supplied with an output signal from the exclusive OR gate circuit; and a second AND gate circuit supplied with output signals from the inverter circuit and set signal generator circuit.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-05-11 | 1984-11-10 | 1985-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-05-11 | 1988-11-10 | 1989-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-05-11 | 1992-11-10 | 1993-05-12 | $7700.00 | Window Closed / Lapsed |