Method for post fabrication frequency trimming of surface acoustic wave devices
Abstract
Abstract A method for trimming the resonant frequency of fabricated SAW devices. The resonant frequency of SAW devices of the type having a substrate with structures made of a second material, other than the substrate material, upon its surface, is decreased by removing quantities of the substrate material until the desired change in frequency is obtained. In one embodiment, the substrate material of the SAW device is removed by etching the substrate in a fluorocarbon plasma, which leaves the structure made of the second material substantially unchanged. In a second embodiment, the resonant frequency of SAW resonators is increased by heating the SAW device at a temperature in excess of 250° C. until the desired change in resonant frequency is obtained.
Inventors
- 👤 William J. Tanski
Bibliographic Details
Claims Analysis
Total Claims: 3References Cited (Backward Citations)
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