US4375056A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture
Assignee: Leeds and Northrup Co
•
Filing: 1980-02-29
•
Granted: 1983-02-22
•
Expires: 2000-02-29
Abstract
Abstract A thin film resistance thermometer is manufactured to have a predetermined temperature coefficient of resistance while minimizing the amount of metal in the film. The process involves the production of a metal film deposit on an insulating substrate such that the film deposited has a bulk coefficient substantially higher than the desired coefficient with the film being deposited to a thickness that produces the desired coefficient.
Inventors
- 👤 Ronald D. Baxter
- 👤 Paul J. Freud
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:46
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/02; H01C7/021; G; G01; G01K; G01K7/00; G01K7/16; G01K7/18; G01K7/183; H01C17/00; H01C17/22; H01C17/232
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
54 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with the film being of a thickness between 0.05 and 0.8 microns purity and perfection such that its bulk TCR is substantially above the desired TCR.
Claim 2
Dependent Claim
54 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with the film being of a thickness between 0.05 and 0.8 microns purity and perfection such that its bulk TCR is substantially above the desired TCR.
Claim 3
Dependent Claim
62 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with the film thickness as required to produce a desired TCR and in a range such that the ratio of relative change of TCR to relative change in film thickness is greater than 0.01.
Claim 4
Dependent Claim
62 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with the film thickness as required to produce a desired TCR and in a range such that the ratio of relative change of TCR to relative change in film thickness is greater than 0.01.
Claim 5
Dependent Claim
69 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with a film thickness between 0.05 and 0.8 microns as required to produce a desired TCR and maintain the thickness in a range where the ratio of relative change of TCR to relative change in film thickness is greater than 0.01.
Claim 6
Dependent Claim
69 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with a film thickness between 0.05 and 0.8 microns as required to produce a desired TCR and maintain the thickness in a range where the ratio of relative change of TCR to relative change in film thickness is greater than 0.01.
Claim 7
Dependent Claim
65 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin electrically conductive metal film deposited on said substrate in a pattern to produce a desired ice point resistance with the film thickness being that required to produce a desired TCR and in a range such that the ratio of relative change of TCR to relative change in film thickness is greater than 0.01.
Claim 8
Dependent Claim
65 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin electrically conductive metal film deposited on said substrate in a pattern to produce a desired ice point resistance with the film thickness being that required to produce a desired TCR and in a range such that the ratio of relative change of TCR to relative change in film thickness is greater than 0.01.
Claim 9
Dependent Claim
81 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with the film thickness between 0.05 and 0.8 microns as required to produce a desired TCR, and be below the thickness at which the metal has its bulk value and substantially above the thickness at which nucleation effects predominate in determining those characteristics of the film relating to its conductivity and its TCR.
Claim 10
Dependent Claim
81 words
A resistance thermometer element comprising: an electrically insulating substrate; and a thin platinum film deposited on said substrate in a pattern to produce a desired ice point resistance with the film thickness between 0.05 and 0.8 microns as required to produce a desired TCR, and be below the thickness at which the metal has its bulk value and substantially above the thickness at which nucleation effects predominate in determining those characteristics of the film relating to its conductivity and its TCR.
References Cited (Backward Citations)
US3781749A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-02-21 | 1986-08-23 | 1987-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-02-21 | 1990-08-23 | 1991-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-02-21 | 1994-08-23 | 1995-02-22 | $7700.00 | Window Closed / Lapsed |