US4385434A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Alignment system
Assignee: Visidyne Inc
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Filing: 1981-06-08
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Granted: 1983-05-31
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Expires: 2001-06-08
Abstract
Abstract An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer including: a support member for mounting a wafer to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally deforming the zones of the support member for realigning corresponding portions of a wafer mounted on the support member.
Inventors
- 👤 Theodore F. Zehnpfennig
- 👤 Giuseppe Aurilio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; B; B23; B23Q; B23Q1/00; B23Q1/03; B23Q1/032; B23Q1/25; B23Q1/26; B23Q1/34; Y; Y10; Y10S; Y10S438/00; Y10S438/975; Y10T; Y10T29/00; Y10T29/53; Y10T29/53961
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
61 words
An alignment system for realigning one portion of a part relative to another portion of the same part comprising: a support member for mounting a part to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally, deforming said zones of said support member for realigning corresponding portions of a part mounted on said support member.
Claim 2
Dependent Claim
61 words
An alignment system for realigning one portion of a part relative to another portion of the same part comprising: a support member for mounting a part to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally, deforming said zones of said support member for realigning corresponding portions of a part mounted on said support member.
Claim 3
Dependent Claim
41 words
The alignment system of claim 1 in which said means for deforming includes drive pins having one end connected with said support member, and means for selectively, laterally driving each of said drive pins for laterally deforming the associated said zones.
Claim 4
Dependent Claim
31 words
The alignment system of claim 2 in which said drive pins and said support member are separate and said support member includes sockets for receiving said ends of said drive pins.
Claim 5
Dependent Claim
31 words
The alignment system of claim 3 in which said ends of said drive pins extend into said sockets and bear laterally on said sockets proximate the mid-plane of said support member.
Claim 6
Dependent Claim
26 words
The alignment system of claim 2 in which said means for deforming includes a base member, spaced from said support member for supporting said drive pins.
Claim 7
Dependent Claim
26 words
The alignment system of claim 5 in which said means for selectively, laterally driving said drive pins is between said support member and said base member.
Claim 8
Dependent Claim
17 words
The alignment system of claim 1 in which said means for selectively, laterally deforming includes heating/cooling means.
Claim 9
Dependent Claim
30 words
The alignment system of claim 7 in which said means for selectively, laterally deforming includes a truss structure connected with said support member for channeling heat transmission along said trusses.
Claim 10
Dependent Claim
23 words
The alignment system of claim 1 in which said means for selectively, laterally deforming includes pressurized fluid actuators disposed in said support member.
Claim 11
Dependent Claim
104 words
An alignment system for realigning one portion of a part relative to another portion of the same part comprising: a support member, for mounting a part to be realigned, and having a plurality of laterally disposed zones and a plurality of sockets in a lateral array; a plurality of drive pins each having an end engaged with one of said sockets; a base member, spaced from said support member, for supporting said drive pins in said lateral array; and means for selectively, laterally driving each of said drive pins for laterally deforming said zones of said support member, and realigning a part mounted thereon.
Claim 12
Dependent Claim
104 words
An alignment system for realigning one portion of a part relative to another portion of the same part comprising: a support member, for mounting a part to be realigned, and having a plurality of laterally disposed zones and a plurality of sockets in a lateral array; a plurality of drive pins each having an end engaged with one of said sockets; a base member, spaced from said support member, for supporting said drive pins in said lateral array; and means for selectively, laterally driving each of said drive pins for laterally deforming said zones of said support member, and realigning a part mounted thereon.
Claim 13
Dependent Claim
63 words
An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer comprising: a support member for mounting a wafer to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally, deforming said zones of said support member for realigning corresponding portions of a wafer mounted on said support member.
Claim 14
Dependent Claim
63 words
An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer comprising: a support member for mounting a wafer to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally, deforming said zones of said support member for realigning corresponding portions of a wafer mounted on said support member.
Claim 15
Dependent Claim
41 words
The alignment system of claim 11 in which said means for deforming includes drive pins having one end connected with said support member, and means for selectively, laterally driving each of said drive pins for laterally deforming the associated said zones.
Claim 16
Dependent Claim
31 words
The alignment system of claim 12 in which said drive pins and said support member are separate and said support member includes sockets for receiving said ends of said drive pins.
Claim 17
Dependent Claim
31 words
The alignment system of claim 13 in which said ends of said drive pins extend into said sockets and bear laterally on said sockets proximate the mid-plane of said support member.
Claim 18
Dependent Claim
26 words
The alignment system of claim 12 in which said means for deforming includes a base member, spaced from said support member for supporting said drive pins.
Claim 19
Dependent Claim
26 words
The alignment system of claim 15 in which said means for selectively, laterally driving said drive pins is between said support member and said base member.
Claim 20
Dependent Claim
17 words
The alignment system of claim 11 in which said means for selectively, laterally deforming includes heating/cooling means.
Claim 21
Dependent Claim
30 words
The alignment system of claim 17 in which said means for selectively, laterally deforming includes a truss structure connected with said support member for channeling heat flow along said trusses.
Claim 22
Dependent Claim
23 words
The alignment system of claim 11 in which said means for selectively, laterally deforming includes pressurized fluid actuators disposed in said support member.
Claim 23
Dependent Claim
106 words
An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer comprising: a support member, for mounting a wafer to be realigned, and having a plurality of laterally disposed zones and a plurality of sockets in a lateral array; a plurality of drive pins each having an end engaged with one of said sockets; a base member, spaced from said support member, for supporting said drive pins in said lateral array; and means for selectively, laterally driving each of said drive pins for laterally deforming said zones of said support member, and realigning a wafer mounted thereon.
Claim 24
Dependent Claim
106 words
An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer comprising: a support member, for mounting a wafer to be realigned, and having a plurality of laterally disposed zones and a plurality of sockets in a lateral array; a plurality of drive pins each having an end engaged with one of said sockets; a base member, spaced from said support member, for supporting said drive pins in said lateral array; and means for selectively, laterally driving each of said drive pins for laterally deforming said zones of said support member, and realigning a wafer mounted thereon.
References Cited (Backward Citations)
US3875416A
Cited
US4322626A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-05-30 | 1986-11-29 | 1987-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-05-30 | 1990-11-29 | 1991-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-05-30 | 1994-11-29 | 1995-05-31 | $7700.00 | Window Closed / Lapsed |