Thin film SQUID with low inductance

Claim 2

A thin-film SQUID device comprising: a substrate, a superconductive layer on the substrate having an outer closed superconductive loop and a first group of radial superconductive arms extending from the loop and intersecting in a common conductive region, a second group of radial superconductive arms extending inwardly from and in electrical contact with said loop at points intermediate the first group of arms and intersecting in a common conductive region overlying the common conductive region of said first group of arms, an insulating layer between said common regions, thin film Josephson junction means positioned in electrical contact with said two common regions, and a signal coil forming conductive loops, the coil having portions extending parallel to said two groups of arms for inductively coupling the coil to the superconductive arms.

Claim 3

Apparatus of claim 1 wherein said superconductive layers are niobium.

Claim 4

Apparatus of claim 1 wherein said Josephson junction means includes a pair of Josephson junctions in series, and a layer of superconductive material insulated from the common regions of said first and second groups of arms in electrical contact with the two Josephson junctions to form the series connection between the two Josephson junctions.

Claim 5

Apparatus of claim 1 wherein the signal coil is formed from an outer layer of conductive material insulated from the underlying layers on the substrate.

Claim 6

A thin film SQUID comprising: a substrate of non-conductive material, a first layer of superconductive material on the substrate having a pattern including an outer closed loop and a plurality of angularly spaced arms extending inwardly from the outer loop to a common hub, the inner ends of alternate arms being isolated from the hub by a gap in said first layer between the inner ends of the alternate arms and the hub, the hub region having a central terminal electrically isolated by a surrounding gap in said first layer, a second layer of insulating material overlying said first layer and filling said gaps in the first layer, the second layer having openings therein exposing the first layer at the inner ends of said alternate arms, at two positions on said terminal and at one position on said hub adjacent the terminal, a third layer of doped semiconductor material filling said openings in the second layer and directly contacting the first layer, a fourth layer of superconductive material overlying the second and third layers having two isolated areas, one area electrically connecting the semiconducting layer at one of said opening positions in the terminal to the semiconducting layer at each of said openings at the inner end of said alternate arms and a second area electrically connecting the semiconductor layer at the other opening position in the terminal to the semiconducting layer at the opening in the hub, a fifth layer of insulating material overlying the fourth layer, and a sixth layer of conductive material forming a continuous multiturn conductive coil in which each turn has positions extending parallel to each of the arms, said portion being joined alternately by portions overlying the hub and by portions overlying the outer loop.

Claim 7

A thin film SQUID comprising: a substrate of non-conductive material, a first layer of superconductive material on the substrate having a pattern including an outer closed loop and a plurality of angularly spaced arms extending inwardly from the outer loop to a common hub, the inner ends of alternate arms being isolated from the hub by a gap in said first layer between the inner ends of the alternate arms and the hub, the hub region having a central terminal electrically isolated by a surrounding gap in said first layer, a second layer of insulating material overlying said first layer and filling said gaps in the first layer, the second layer having openings therein exposing the first layer at the inner ends of said alternate arms, at two positions on said terminal and at one position on said hub adjacent the terminal, a third layer of doped semiconductor material filling said openings in the second layer and directly contacting the first layer, a fourth layer of superconductive material overlying the second and third layers having two isolated areas, one area electrically connecting the semiconducting layer at one of said opening positions in the terminal to the semiconducting layer at each of said openings at the inner end of said alternate arms and a second area electrically connecting the semiconductor layer at the other opening position in the terminal to the semiconducting layer at the opening in the hub, a fifth layer of insulating material overlying the fourth layer, and a sixth layer of conductive material forming a continuous multiturn conductive coil in which each turn has positions extending parallel to each of the arms, said portion being joined alternately by portions overlying the hub and by portions overlying the outer loop.

Claim 8

Apparatus of claim 5 wherein the two areas of semiconductor at the positions electrically connected to the second area of the fourth layer are sufficiently small to form Josephson junctions.

Claim 9

Apparatus of claim 5 further including means providing separate external connections respectively to the first layer, to the second area of the fourth layer, and to the coil.

Claim 10

A thin film SQUID device comprising: a wheel-shaped thin film superconductive member including an outer conductive rim and a plurality of conductive radial spokes connected to the rim at their outer ends, one set of alternate spokes being joined at their inner ends by a first superconductive layer and a second set of alternate spokes being joined at their ends by a second superconductive layer, the respective layers being electrically insulated from each other except through the spokes and rim, means forming at least one thin film semiconductor Josephson junction connected between the two layers, and a thin film conductive coil layer overlying the wheel-shaped member, the coil layer being insulated electrically from the wheel-shaped member and forming conductive paths extending parallel to each of the spokes.

Claim 11

A thin film SQUID device comprising: a wheel-shaped thin film superconductive member including an outer conductive rim and a plurality of conductive radial spokes connected to the rim at their outer ends, one set of alternate spokes being joined at their inner ends by a first superconductive layer and a second set of alternate spokes being joined at their ends by a second superconductive layer, the respective layers being electrically insulated from each other except through the spokes and rim, means forming at least one thin film semiconductor Josephson junction connected between the two layers, and a thin film conductive coil layer overlying the wheel-shaped member, the coil layer being insulated electrically from the wheel-shaped member and forming conductive paths extending parallel to each of the spokes.

Claim 12

The device of claim 8 further including a second thin film semiconductor Josephson junction, the two junctions being connected in series between the first and second superconductive layers.

Claim 13

The device of claim 9 further including a series connection between the two Josephson junctions.