US4399115A
Expired / Lapsed
US
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Synthesis of silicon nitride
Assignee: AGC Inc
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Filing: 1982-03-29
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Granted: 1983-08-16
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Expires: 2002-03-29
Abstract
Abstract A process for synthesizing silicon nitride by reacting a silicon halide and ammonia at a high temperature, which is characterized in that at least while the reaction product is amorphous, hydrogen and chlorine are burned in the reaction zone where a halogen containing inorganic silicon compound and ammonia are reacting, and the reaction of said reactants is effected by the heat of combustion thus obtained.
Inventors
- 👤 Kimihiko Sato
- 👤 Kunihiko Terase
- 👤 Hitoshi Kijimuta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:05
CPC Classifications
C; C01; C01B; C01B21/00; C01B21/06; C01B21/068
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
71 words
A process for producing α-silicon nitride comprising: reacting a silicon halide and ammonia to form silicon nitride, wherein, at least while the reaction product of said silicon halide and said ammonia is amorphous, supplying the heat necessary to sustain the reaction by burning hydrogen and chlorine in the presence of said silicon halide and said ammonia, whereby the reaction is effected by the heat of combustion of said hydrogen and chlorine.
Claim 2
Dependent Claim
71 words
A process for producing α-silicon nitride comprising: reacting a silicon halide and ammonia to form silicon nitride, wherein, at least while the reaction product of said silicon halide and said ammonia is amorphous, supplying the heat necessary to sustain the reaction by burning hydrogen and chlorine in the presence of said silicon halide and said ammonia, whereby the reaction is effected by the heat of combustion of said hydrogen and chlorine.
Claim 3
Dependent Claim
64 words
The process according to claim 1, wherein the molar ratio of ammonia to the silicon halide is from 0.1 to 5, the molar ratio of hydrogen to the silicon halide is from 0.7 to 15.1, the molar ratio of chlorine to the silicon halide is from 0.6 to 13.1 and the reaction is effected for a reaction time of from 0.1 to 30 seconds.
Claim 4
Dependent Claim
87 words
The process according to claim 1, wherein the molar ratio of ammonia to the silicon halide is from 0.1 to 3, the molar ratio of hydrogen to the silicon halide is from 0.4 to 8.5, the molar ratio of chlorine to the silicon halide is from 0.3 to 7.4 and the reaction is effected for a reaction time of from 0.1 to 30 seconds, and thereafter the reaction product is held at a temperature of from 600°-1700° C. for 0.2-8 hours under a nitrogen and/or ammonia atmosphere.
Claim 5
Dependent Claim
17 words
The process according to claim 2 or 3 wherein the silicon halide is a chloride of silicon.
Claim 6
Dependent Claim
18 words
The process according to claim 4, wherein the chloride of silicon is SiCl 4 or SiHCl 3 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-08-15 | 1987-02-14 | 1987-08-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-08-15 | 1991-02-14 | 1991-08-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-08-15 | 1995-02-14 | 1995-08-16 | $7700.00 | Window Closed / Lapsed |