US4403567A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Workpiece holder
Assignee: Commonwealth Scientific Corp
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Filing: 1980-08-21
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Granted: 1983-09-13
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Expires: 2000-08-21
Abstract
Abstract A workpiece holder for semiconductor workpieces during treatment with a substantially cylindrical casing shaped like a hockey puck having an upper surface for receiving a workpiece, a lower surface, at least one bore between the surfaces for applying a vacuum and a hollow interior for a heat absorbing composition preferably one which melts above ambient temperature but below temperatures which might damage workpieces. Suitable compositions include Glauber's salt, and calcium chloride hexahydrate. In one embodiment, curved, substantially radially extending vanes are preferably provided in the interior space for causing radial flow when the casing is rotated or oscillated. In a second embodiment, a plurality of bores extend between a manifold which extends radially and a plurality of circumferential grooves.
Inventors
- 👤 Harry daCosta
- 👤 Hugh K. Howerton
- 👤 William E. Hughes
- 👤 Gaines W. Monk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:46
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
64 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface and a hollow interior having a fixed space; and a heat absorbing composition chosen from the group consisting of Glauber's salt and calcium chloride hexahydrate sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 2
Dependent Claim
64 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface and a hollow interior having a fixed space; and a heat absorbing composition chosen from the group consisting of Glauber's salt and calcium chloride hexahydrate sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 3
Dependent Claim
74 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, and a hollow interior; a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment; and a plurality of curved, substantially radially extending vanes in said interior space for causing radial flow of said composition when said casing is rotated or oscillated.
Claim 4
Dependent Claim
74 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, and a hollow interior; a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment; and a plurality of curved, substantially radially extending vanes in said interior space for causing radial flow of said composition when said casing is rotated or oscillated.
Claim 5
Dependent Claim
29 words
A holder as in claim 1, wherein said casing includes a bore communicating with said upper surface for removing air therefrom, to adhere said workpiece to said upper surface.
Claim 6
Dependent Claim
93 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, a hollow interior, a bore extending axially between said surfaces for removing air from said upper surface to adhere said workpiece to said upper surface, a plurality of circular grooves on said upper surface and a plurality of grooves on said upper surface extending radially outward from said bore; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 7
Dependent Claim
93 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, a hollow interior, a bore extending axially between said surfaces for removing air from said upper surface to adhere said workpiece to said upper surface, a plurality of circular grooves on said upper surface and a plurality of grooves on said upper surface extending radially outward from said bore; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 8
Dependent Claim
131 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, a hollow interior, a bore communicating with said upper surface for removing air therefrom to adhere said workpiece to said upper surface, a plurality of circular grooves on said upper surface, a plurality of bores extending in an axial direction toward said lower surface from said grooves and a radially extending manifold connected to said bores and adapted to be connected to a vacuum source at the peripheral surface of said casing for removing air from said upper surface to adhere said workpiece to said upper surface; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 9
Dependent Claim
131 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, a hollow interior, a bore communicating with said upper surface for removing air therefrom to adhere said workpiece to said upper surface, a plurality of circular grooves on said upper surface, a plurality of bores extending in an axial direction toward said lower surface from said grooves and a radially extending manifold connected to said bores and adapted to be connected to a vacuum source at the peripheral surface of said casing for removing air from said upper surface to adhere said workpiece to said upper surface; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 10
Dependent Claim
61 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing formed of a threaded base and threaded top which are screwed together and having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, and a hollow interior; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 11
Dependent Claim
61 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing formed of a threaded base and threaded top which are screwed together and having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, and a hollow interior; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 12
Dependent Claim
23 words
A holder as in claim 1, wherein said casing has a groove extending about the peripheral surface between said upper and lower surfaces.
Claim 13
Dependent Claim
13 words
A holder as in claim 1, wherein said casing is made of copper.
Claim 14
Dependent Claim
91 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, a hollow interior and a bore communicating with said upper surface for removing air therefrom to adhere said workpiece to said upper surface, a metal filled elastomer disc on said upper surface for receiving said workpiece and having perforations extending therethrough and in communication with said bore; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 15
Dependent Claim
91 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface, a hollow interior and a bore communicating with said upper surface for removing air therefrom to adhere said workpiece to said upper surface, a metal filled elastomer disc on said upper surface for receiving said workpiece and having perforations extending therethrough and in communication with said bore; and a heat absorbing composition sealed within said interior for absorbing heat from said workpiece during treatment.
Claim 16
Dependent Claim
93 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface and a hollow interior having a fixed space; a heat absorbing composition chosen from the group consisting of Glauber's salt and calcium chloride hexahydrate sealed within said interior for absorbing heat from said workpiece during treatment; and a flexure disc mounted in a recess in the peripheral surface between the upper and lower surfaces for engaging a workpiece clamp to attach said clamp to said holder.
Claim 17
Dependent Claim
93 words
A workpiece holder for semiconductor workpieces during treatment comprising: a casing having an upper exterior surface for receiving and holding a workpiece thereon, an opposed lower surface and a hollow interior having a fixed space; a heat absorbing composition chosen from the group consisting of Glauber's salt and calcium chloride hexahydrate sealed within said interior for absorbing heat from said workpiece during treatment; and a flexure disc mounted in a recess in the peripheral surface between the upper and lower surfaces for engaging a workpiece clamp to attach said clamp to said holder.
Claim 18
Dependent Claim
14 words
A holder as in claim 1 or 10 wherein said casing is substantially cylindrical.
Claim 19
Dependent Claim
66 words
A workpiece holder for a semiconductor workpiece during treatment, which treatment heats said workpiece comprising: a closed case having a hollow interior with a fixed space and an upper exterior surface for receiving a workpiece to be treated; and a composition sealed in said case which changes between solid and liquid states in the range of 20°-30° C. for absorbing heat from said workpiece during treatment.
Claim 20
Dependent Claim
66 words
A workpiece holder for a semiconductor workpiece during treatment, which treatment heats said workpiece comprising: a closed case having a hollow interior with a fixed space and an upper exterior surface for receiving a workpiece to be treated; and a composition sealed in said case which changes between solid and liquid states in the range of 20°-30° C. for absorbing heat from said workpiece during treatment.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-09-12 | 1987-03-14 | 1987-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-09-12 | 1991-03-14 | 1991-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-09-12 | 1995-03-14 | 1995-09-13 | $7700.00 | Window Closed / Lapsed |