US4409520A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microwave discharge ion source
Assignee: Hitachi Ltd
•
Filing: 1981-03-24
•
Granted: 1983-10-11
•
Expires: 2001-03-24
Abstract
Abstract A microwave discharge ion source according to this invention comprises a microwave generator, a discharge chamber having ridged electrodes, and a waveguide connecting the microwave generator with the discharge chamber. This waveguide consists of a waveguide having no ridged electrode, and a waveguide having ridged electrodes. Further, a vacuum-sealing dielectric plate is disposed at an intermediate position or an end part of the waveguide having no ridged electrode. A space in the waveguide as extends from the vacuum-sealing dielectric plate to the discharge chamber is filled with a dielectric. As a result, the design and fabrication of the vacuum-sealing dielectric plate are facilitated, and a microwave discharge ion source of high performance is provided.
Inventors
- 👤 Hidemi Koike
- 👤 Noriyuki Sakudo
- 👤 Katsumi Tokiguchi
- 👤 Ichiro Kanomata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:11
CPC Classifications
H; H01; H01J; H01J23/00; H01J23/36; H01J27/00; H01J27/02; H01J27/16; H01J27/18; H01J37/00; H01J37/02; H01J37/04; H01J37/08
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
170 words
A microwave discharge ion source comprising means for generating microwaves, a discharge chamber which has ridged electrodes for introducing the microwaves generated by the microwave generating means and establishing a microwave electric field and which is maintained in a vacuum state, and a waveguide which guides said microwaves generated by said microwave generating means to said discharge chamber; said waveguide consisting of a section which has no ridged electrode and which serves to guide said microwaves generated by said microwave generating means to said discharge chamber without reflecting them, and a section which has ridged electrodes; a vacuum-sealing dielectric plate being disposed in said section of said waveguide having no ridged electrode, said vacuum-sealing dielectric plate serving to maintain the vacuum state of said discharge chamber and also to propagate said microwaves without reflecting them; an insulating packed material being packed in a space in said waveguide existent between said vacuum-sealing dielectric plate and said discharge chamber, said insulating packed material serving to prevent any discharge outside said discharge chamber.
Claim 2
Dependent Claim
170 words
A microwave discharge ion source comprising means for generating microwaves, a discharge chamber which has ridged electrodes for introducing the microwaves generated by the microwave generating means and establishing a microwave electric field and which is maintained in a vacuum state, and a waveguide which guides said microwaves generated by said microwave generating means to said discharge chamber; said waveguide consisting of a section which has no ridged electrode and which serves to guide said microwaves generated by said microwave generating means to said discharge chamber without reflecting them, and a section which has ridged electrodes; a vacuum-sealing dielectric plate being disposed in said section of said waveguide having no ridged electrode, said vacuum-sealing dielectric plate serving to maintain the vacuum state of said discharge chamber and also to propagate said microwaves without reflecting them; an insulating packed material being packed in a space in said waveguide existent between said vacuum-sealing dielectric plate and said discharge chamber, said insulating packed material serving to prevent any discharge outside said discharge chamber.
Claim 3
Dependent Claim
40 words
A microwave discharge ion source according to claim 1, wherein said waveguide is constructed of a first waveguide having no ridged electrode and a second waveguide having ridged electrodes, and said first waveguide is provided with said vacuum-sealing dielectric plate.
Claim 4
Dependent Claim
29 words
A microwave discharge ion source according to claim 2, wherein said vacuum-sealing dielectric plate is disposed at an end part of said first waveguide on the second waveguide side.
Claim 5
Dependent Claim
24 words
A microwave discharge ion source according to claim 2, wherein said vacuum-sealing dielectric plate is disposed at an intermediate position of said first waveguide.
Claim 6
Dependent Claim
16 words
A microwave discharge ion source according to claim 1, wherein said waveguide is a rectangular waveguide.
Claim 7
Dependent Claim
16 words
A microwave discharge ion source according to claim 1, wherein said waveguide is a circular waveguide.
Claim 8
Dependent Claim
30 words
A microwave discharge ion source according to claim 1, wherein said vacuum-sealing dielectric plate is made of one member selected from the group consisting of forsterite ceramics and aluminous ceramics.
Claim 9
Dependent Claim
18 words
A microwave discharge ion source according to claim 1, wherein said insulating packed material is sintered boron nitride.
References Cited (Backward Citations)
DE28303C
Cited
US2698421A
Cited
US2886742A
Cited
US3518691A
Cited
US3778656A
Cited
US4214187A
Cited
US4316090A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-10 | 1987-04-11 | 1987-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-10 | 1991-04-11 | 1991-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-10 | 1995-04-11 | 1995-10-11 | $7700.00 | Window Closed / Lapsed |