US4412153A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dual filament ion source
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1981-08-14
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Granted: 1983-10-25
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Expires: 2001-08-14
Abstract
Abstract An electron bombardment ion source of the Freeman type incorporates an electrode having multiple segments which are electrically connected in parallel to provide increased surface area for constant cross section.
Inventors
- 👤 Charles R. Kalbfus
- 👤 Norman L. Turner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:23
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J27/00; H01J27/02; H01J27/20
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
103 words
An electron-bombardment ion source having an electrode mounted within an ionization chamber, a power supply to provide electrical current to said electrode to heat it resistively to produce thermionic emission of electrons, an external magnet for superimposing a magnetic field on the interior of the ionization chamber, means for providing ionizable material to said ionization chamber, and an ion extraction aperture formed in a wall of said ionization chamber, the improvement comprising: the electrode is composed of two parallel segments mounted symmetrically inside said ionization chamber along opposing edges of said extraction aperture and oriented with parallel axes aligned with said magnetic field.
Claim 2
Dependent Claim
103 words
An electron-bombardment ion source having an electrode mounted within an ionization chamber, a power supply to provide electrical current to said electrode to heat it resistively to produce thermionic emission of electrons, an external magnet for superimposing a magnetic field on the interior of the ionization chamber, means for providing ionizable material to said ionization chamber, and an ion extraction aperture formed in a wall of said ionization chamber, the improvement comprising: the electrode is composed of two parallel segments mounted symmetrically inside said ionization chamber along opposing edges of said extraction aperture and oriented with parallel axes aligned with said magnetic field.
Claim 3
Dependent Claim
34 words
An electron-bombardment ion source as defined in claim 1 wherein said two parallel electrode segments are mounted so that no line of sight, electrode to target, passage exists for electrons emitted from said segments.
Claim 4
Dependent Claim
44 words
An electron-bombardment ion source as defined in claim 2 wherein said two parallel electrode segments are positioned in the range of from 1/5 to 1/3 of the distance from the inner side of said extraction aperture to the back wall of said ionization chamber.
Claim 5
Dependent Claim
170 words
An electron-bombardment ion source having an electrode mounted within an ionization chamber, a power supply to provide electrical current to said electrode to heat it resistively to produce thermionic emission of electrons, an external magnet for superimposing a magnetic field on the interior of the ionization chamber, means for providing ionizable material to said ionization chamber, and an ion extraction aperture formed in a wall of said ionization chamber, the improvement comprising: the electrode is composed of two segments electrically connected in parallel and oriented with parallel axes aligned with said magnetic field so that when the cumulative electrode cross section for said two segments is equivalent to that of a single electrode the total surface area for emission of said two segments is √2 the surface area of emission of said single electrode, said two parallel electrode segments being mounted symmetrically inside said ionization chamber along opposing edges of said extraction aperture so that no line of sight, electrode to target, passage exists for electrons emitted from said segments.
Claim 6
Dependent Claim
170 words
An electron-bombardment ion source having an electrode mounted within an ionization chamber, a power supply to provide electrical current to said electrode to heat it resistively to produce thermionic emission of electrons, an external magnet for superimposing a magnetic field on the interior of the ionization chamber, means for providing ionizable material to said ionization chamber, and an ion extraction aperture formed in a wall of said ionization chamber, the improvement comprising: the electrode is composed of two segments electrically connected in parallel and oriented with parallel axes aligned with said magnetic field so that when the cumulative electrode cross section for said two segments is equivalent to that of a single electrode the total surface area for emission of said two segments is √2 the surface area of emission of said single electrode, said two parallel electrode segments being mounted symmetrically inside said ionization chamber along opposing edges of said extraction aperture so that no line of sight, electrode to target, passage exists for electrons emitted from said segments.
Claim 7
Dependent Claim
24 words
An electron-bombardment ion source in accordance with claim 4 wherein said two parallel electrode segments are composed of tungsten and are of equal diameter.
Claim 8
Dependent Claim
44 words
An electron-bombardment ion source in accordance with claim 5 wherein said two parallel electrode segments are positioned in the range of from 1/5 to 1/3 of the distance from the inner side of said extraction aperture to the back wall of said ionization chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-24 | 1987-04-25 | 1987-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-24 | 1991-04-25 | 1991-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-24 | 1995-04-25 | 1995-10-25 | $7700.00 | Window Closed / Lapsed |