US4415420A
Expired / Lapsed
US
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Cubic boron nitride preparation
Assignee: Battelle Development Corp
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Filing: 1983-02-07
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Granted: 1983-11-15
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Expires: 2003-02-07
Abstract
Abstract Cubic boron nitride is deposited on a substrate by an activated reactive evaporation method involving heating a substrate in a vacuum, evaporating metal vapors into a zone between the substrate and the metals source, said source consisting of pure boron or boron and a material selected from the group consisting of the elements chromium, nickel, cobalt, and manganese co-evaporated, or an alloy consisting essentially of from 0.1 weight percent to 5.0 weight percent of at least one of the elements chromium, nickel, cobalt, and manganese, the balance being boron, introducing ammonia gas into the zone, and generating an electrical field in the zone in order to ionize the metal vapors and gas atoms in the zone.
Inventors
- 👤 Harry A. Beale
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:28
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/583; C04B35/5831; C23C14/06; C23C14/0641; C23C14/0647; C23C30/00; C23C30/005
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
134 words
A method for depositing cubic boron nitride on a substrate, comprising the steps of: (a) heating a supported substrate in a vacuum; (b) supplying metal vapors into a zone between said substrate and a metals source, said source comprising a material selected from the group consisting of: boron, boron and a material selected from the group consisting of the elements chromium, nickel, cobalt, and manganese, and a metal alloy consisting essentially of from 0.1 weight percent to 5.0 weight percent of at least one of the elements chromium, nickel, cobalt, and manganese, the balance being boron; (c) introducing ammonia gas into said zone; and (d) generating an electrical field in said zone ionizing the metal vapors and gas atoms in the zone; whereby cubic boron nitride is deposited on the surface of said substrate.
Claim 2
Independent Claim
134 words
A method for depositing cubic boron nitride on a substrate, comprising the steps of: (a) heating a supported substrate in a vacuum; (b) supplying metal vapors into a zone between said substrate and a metals source, said source comprising a material selected from the group consisting of: boron, boron and a material selected from the group consisting of the elements chromium, nickel, cobalt, and manganese, and a metal alloy consisting essentially of from 0.1 weight percent to 5.0 weight percent of at least one of the elements chromium, nickel, cobalt, and manganese, the balance being boron; (c) introducing ammonia gas into said zone; and (d) generating an electrical field in said zone ionizing the metal vapors and gas atoms in the zone; whereby cubic boron nitride is deposited on the surface of said substrate.
Claim 3
Dependent Claim
22 words
The method of claim 1 including directing an electron beam onto the metals alloy source for providing the metal vapors by evaporation.
Claim 4
Dependent Claim
17 words
The method of claim 1 wherein the metal vapors are supplied by means of a sputtering cathode.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein the metal vapors are supplied by means of an arc discharge-type evaporation or sublimation process.
Claim 6
Dependent Claim
18 words
The method of claim 1 wherein the substrate is heated to between about 500° C. and 1100° C.
Claim 7
Dependent Claim
30 words
The method of claim 5 wherein the ammonia is introduced in an amount providing a gas partial pressure between about 1×10- 4 torr to 8×10- 3 torr in said zone.
Claim 8
Dependent Claim
37 words
The method of claim 6 involving generating the electrical field in said zone by imposing a voltage potential positive with respect to said source on a deflection electrode positioned between the substrate and the metals alloy source.
Claim 9
Dependent Claim
21 words
The method of claim 4 wherein the arc discharge-type evaporation or sublimation process involves the use of a hot hollow cathode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-14 | 1987-05-16 | 1987-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-14 | 1991-05-16 | 1991-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-14 | 1995-05-16 | 1995-11-15 | $7700.00 | Window Closed / Lapsed |