US4426582A
Expired / Lapsed
US
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Charged particle beam apparatus and method utilizing liquid metal field ionization source and asymmetric three element lens system
Assignee: FEI Co
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Filing: 1981-10-02
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Granted: 1984-01-17
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Expires: 2001-10-02
Abstract
Abstract A liquid metal field ionization source is used in conjunction with a three element asymmetric lens system to provide an ion gun having greater magnitude beam currents focused on a smaller spot size than has been previously possible for intermediate energy beams. An ultra-clean emitter surface is achieved by means of an argon sputtering and/or plasma etching process applied to the emitter surface before liquid metal is applied to the emitter surface to ensure uniform and sufficient flow of liquid metal to the apex of the emitter. The three element asymmetric lens system has a very low chromatic aberration coefficient, enabling precise focusing of beams with large energy spreads. For beam accelerating ratios in the range from 0.2 to 6, the ion gun produces very high current densities in beams focused on very small spot areas, despite the relatively large energy spread of beams produced by liquid metal ionization sources. The energy spread of the ion beam is minimized by operating the emitter at a voltage close to the onset voltage and at a temperature close to the melting point of the liquid metal.
Inventors
- 👤 Jonathan H. Orloff
- 👤 Lynwood W. Swanson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J37/10; H01J37/12; H01J37/30; H01J37/3002; H01J37/3007; H01J2237/00; H01J2237/06; H01J2237/08; H01J2237/0802; H01J2237/0807
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
323 words
An apparatus for producing a high current beam of charged particles along an axis and focusing said beam onto a small target spot, said apparatus comprising in combination: (a) pointed emitter means for emitting said beam along said axis; said beam having an angular intensity in the range of approximately 10 -4 to 10 -5 amperes per steradian; (b) an electrostatic lens system spaced from and disposed about said axis beneath said pointed emitter means for focusing said beam onto said target spot, said electrostatic lens system including (i) a first lens element conducting a first voltage and including a first disc having therein a first aperture through which said beam passes, said first aperture being circular and centered about said axis; (ii) a second lens element conducting a second voltage and including a second aperture through which said beam passes after it leaves said first aperture, said second lens element being spaced from and disposed beneath said first lens element, said second aperture having an upper portion which is circular, and is centered about said axis, and has a first diameter, said second aperture having a lower portion which is approximately cylindrical, and is centered about said axis, and has a second diameter, and has a predetermined thickness in the direction of said axis, said second diameter being substantially greater than said first diameter, said second diameter being approximately 1.3 times as great as said predetermined thickness, and (iii) a third lens element located entirely below said second aperture and conducting a third voltage and having a third aperture through which said beam passes only after it leaves said second aperture, said third aperture being circular and centered about said axis, said second lens element producing an approximately constant rate of reduction in the magnitude of the potential along said axis in said lower portion of said second aperture in order to reduce the chromatic aberration caused by said electrostatic lens system.
Claim 2
Independent Claim
323 words
An apparatus for producing a high current beam of charged particles along an axis and focusing said beam onto a small target spot, said apparatus comprising in combination: (a) pointed emitter means for emitting said beam along said axis; said beam having an angular intensity in the range of approximately 10 -4 to 10 -5 amperes per steradian; (b) an electrostatic lens system spaced from and disposed about said axis beneath said pointed emitter means for focusing said beam onto said target spot, said electrostatic lens system including (i) a first lens element conducting a first voltage and including a first disc having therein a first aperture through which said beam passes, said first aperture being circular and centered about said axis; (ii) a second lens element conducting a second voltage and including a second aperture through which said beam passes after it leaves said first aperture, said second lens element being spaced from and disposed beneath said first lens element, said second aperture having an upper portion which is circular, and is centered about said axis, and has a first diameter, said second aperture having a lower portion which is approximately cylindrical, and is centered about said axis, and has a second diameter, and has a predetermined thickness in the direction of said axis, said second diameter being substantially greater than said first diameter, said second diameter being approximately 1.3 times as great as said predetermined thickness, and (iii) a third lens element located entirely below said second aperture and conducting a third voltage and having a third aperture through which said beam passes only after it leaves said second aperture, said third aperture being circular and centered about said axis, said second lens element producing an approximately constant rate of reduction in the magnitude of the potential along said axis in said lower portion of said second aperture in order to reduce the chromatic aberration caused by said electrostatic lens system.
Claim 3
Dependent Claim
28 words
The apparatus of claim 1 wherein the diameter of said first aperture and the diameter of said upper portion of said second aperture are approximately equal in magnitude.
Claim 4
Dependent Claim
39 words
The apparatus of claim 2 wherein a thickness of said first lens element, and a thickness of said upper portion of said second aperture, and a spacing between said first and second lens elements are approximately equal in magnitude.
Claim 5
Dependent Claim
17 words
The apparatus of claim 1 wherein said pointed emitter means includes a tip coated with liquid metal.
Claim 6
Dependent Claim
18 words
The apparatus of claim 1 wherein said beam has an energy spread of at least 0.5 electron volts.
Claim 7
Dependent Claim
57 words
The apparatus of claim 1 wherein said first and second discs are flat and parallel to each other and wherein said second lens element has a flat upper surface which is parallel to said first and second discs and wherein said second lens element has a bottom surface which is parallel to said first and second discs.
Claim 8
Dependent Claim
91 words
The apparatus of claim 6 wherein the diameter of said first aperture is approximately 3 millimeters, the diameter of said upper portion of said second aperture is approximately 3 millimeters, the diameter of said lower portion of said second aperture is approximately 18 millimeters, said predetermined thickness is approximately 14 millimeters, the spacing between said first disc and said flat upper surface of said second lens element is approximately 3 millimeters, and the spacing between the bottom surface of said second lens element and said second disc is approximately 3 millimeters.
Claim 9
Independent Claim
318 words
A method of producing a high current beam of charged particles and focusing said beam onto a small target spot, said method comprising the steps of: (a) applying an emitter voltage to a pointed emitter to cause said pointed emitter to emit a beam of charged particles along an axis; said beam having an angular intensity in the range of approximately 10 -4 to 10 -5 amperes per steradian; (b) passing said beam along said axis through a first aperture disposed in a first lens element after said beam leaves said pointed emitter, said first lens element having a first voltage thereon; (c) passing said beam along said axis through a first portion of a second aperture disposed in a second lens element, said first portion of said second aperture having a first diameter, said second lens element having a second voltage thereon, and also passing said beam along said axis directly from said first portion of said second aperture into and through a second portion of said second aperture, said second portion of said second aperture having a second diameter that is substantially greater than said first diameter and said second portion of said second aperture extending a predetermined distance along said second axis, said second diameter being approximately 1.3 times as great as said predetermined distance in order to produce an approximately constant rate of reduction in the magnitude of the potential along said axis in said second portion of said second aperture to thereby reduce the chromatic aberration caused by said second lens element; (d) passing said beam along said axis through a third aperture that is disposed in a third lens element, said third lens element being spaced a predetermined distance from said second portion of said second aperture, said third lens element having a third voltage thereon; and (e) passing said beam along said axis from said third aperture to said target spot.
Claim 10
Independent Claim
318 words
A method of producing a high current beam of charged particles and focusing said beam onto a small target spot, said method comprising the steps of: (a) applying an emitter voltage to a pointed emitter to cause said pointed emitter to emit a beam of charged particles along an axis; said beam having an angular intensity in the range of approximately 10 -4 to 10 -5 amperes per steradian; (b) passing said beam along said axis through a first aperture disposed in a first lens element after said beam leaves said pointed emitter, said first lens element having a first voltage thereon; (c) passing said beam along said axis through a first portion of a second aperture disposed in a second lens element, said first portion of said second aperture having a first diameter, said second lens element having a second voltage thereon, and also passing said beam along said axis directly from said first portion of said second aperture into and through a second portion of said second aperture, said second portion of said second aperture having a second diameter that is substantially greater than said first diameter and said second portion of said second aperture extending a predetermined distance along said second axis, said second diameter being approximately 1.3 times as great as said predetermined distance in order to produce an approximately constant rate of reduction in the magnitude of the potential along said axis in said second portion of said second aperture to thereby reduce the chromatic aberration caused by said second lens element; (d) passing said beam along said axis through a third aperture that is disposed in a third lens element, said third lens element being spaced a predetermined distance from said second portion of said second aperture, said third lens element having a third voltage thereon; and (e) passing said beam along said axis from said third aperture to said target spot.
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| 3.5 Years (Year 4) | 1987-01-16 | 1987-07-18 | 1988-01-17 | $2000.00 | Window Closed / Lapsed |
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