US4428795A
Expired / Lapsed
US
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Process for polishing indium phosphide surfaces
Assignee: Siltronic AG
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Filing: 1983-06-15
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Granted: 1984-01-31
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Expires: 2003-06-15
Abstract
Abstract Indium phosphide surfaces can be polished if, during the mechanical polishing operation, which is carried out in a customary manner, a component that yields free chlorine in an aqueous acidic medium, and, at the same time, a component that yields free carbon dioxide are applied to the surface to be polished.
Inventors
- 👤 Franz Kohl
- 👤 Anton Schnegg
- 👤 Karl Lener
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 09:41
CPC Classifications
C; C30; C30B; C30B33/00; C30B29/00; C30B29/10; C30B29/40; H; H10; H10P; H10P52/00; H10P52/40; H10P52/402
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
49 words
A process for polishing indium phosphide surfaces comprising the steps of: mechanically polishing an indium phosphide surface; and during the mechanical polishing operation, applying to the surface being polished an oxidizing component that yields free chlorine in an aqueous acidic medium and a component that yields free carbon dioxide.
Claim 2
Dependent Claim
49 words
A process for polishing indium phosphide surfaces comprising the steps of: mechanically polishing an indium phosphide surface; and during the mechanical polishing operation, applying to the surface being polished an oxidizing component that yields free chlorine in an aqueous acidic medium and a component that yields free carbon dioxide.
Claim 3
Dependent Claim
30 words
The process of claim 1, wherein said oxidizing component that yields free chlorine in an aqueous acidic medium is a member selected from the group consisting of alkali metal hypochlorites.
Claim 4
Dependent Claim
14 words
The process of claim 1, wherein sodium hypochlorite is used as said oxidizing component.
Claim 5
Dependent Claim
37 words
The process of claim 1, wherein said component that yields carbon dioxide is a member selected from the group consisting of those carboxylic acids which are attacked by the oxidizing component with the evolution of carbon dioxide.
Claim 6
Dependent Claim
19 words
The process of claim 1, wherein a carbonate/acid mixture is used as said component that yields free carbon dioxide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-30 | 1987-08-01 | 1988-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-30 | 1991-08-01 | 1992-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-30 | 1995-08-01 | 1996-01-31 | $7700.00 | Window Closed / Lapsed |