Radiation-sensitive polyimide precursor composition derived from a diaryl fluoronated diamine compound

Claim 2

A radiation-sensitive polyimide precursor composition, comprising: a. a polymer of the formula ##STR9## wherein n is a positive integer corresponding to the number of units in the polymer and is sufficiently large to provide the polymer with a number average molecular weight of about 1500-15,000 as determined by vapor pressure osmometry, and wherein for any particular unit in the polymer: → denotes isomerism; R 1 is a tetravalent, aromatic, non-halogen containing, organic radical containing at least one ring of six carbon atoms, said ring characterized by benzenoid unsaturation, the four carbonyl groups being attached directly to separate carbon atoms in a ring of the R 1 radical; R 2 and R 3 are selected from the group consisting of a hydrogen radical and any organic radical containing a photopolymerizable olefinic double bond, at least one of R 2 and R 3 being said organic radical; R 4 and R 5 are selected from the group consisting of perfluoro and perhalofluoro aliphatic hydrocarbons having 1 to 8 carbons; and A and A' are selected from the group consisting of H, Cl, Br, and NO 2 ; b. a radiation-sensitive polymerizable polyfunctional acrylate compound; and c. a photopolymerization initiator system comprising hydrogen donor initiator and aromatic biimidazole.

Claim 3

A radiation-sensitive polyimide precursor composition as recited in claim 1 wherein R 4 and R 5 are selected from the group consisting of --CF 3 , --CClF 2 , and --CBrF 2 .

Claim 4

A radiation-sensitive polyimide precursor composition as recited in claim 2 wherein R 2 and R 3 are selected from the group consisting of a hydrogen radical, a hydroxy alkyl acrylate radical, and a hydroxy alkyl methacrylate radical.

Claim 5

A radiation-sensitive polyimide precursor composition as recited in claim 2 wherein R 2 and R 3 are selected from the group consisting of a hydrogen radical, an alkyl acrylate radical, and an alkyl methacrylate radical.

Claim 6

A radiation-sensitive polyimide precursor composition as recited in claims 1, 2, 3 or 4 wherein: a. the radiation-sensitive polymerizable polyfunctional acrylate compound is present in an amount equal to 5-30% by weight of the polymer; and b. the photopolymerization initiator system is present in an amount equal to 0.5-30% by weight of the polymer.

Claim 7

A radiation-sensitive polyimide precursor composition, as recited in claim 5, wherein said radiation sensitive polymerizable polyfunctional acrylate compound is selected from the group consisting of trimethylol propane trimethacrylate, trimethylol propane triacrylate, trimethylol propane ethoxylate trimethacrylate, trimethylol propane ethoxylate triacrylate, trimethylol propane polyethoxylate trimethacrylate, trimethylol propane polyethoxylate triacrylate, penterythritol triacrylate, polyethylene glycol diacrylate, triethylene glycol diacrylate, polyethylene glycol dimethacrylate, polymethylene diacrylate, polymethylene dimethacrylate, trimethylene glycol dimethacrylate, tetraethylene glycol diacrylate, and mixtures thereof.

Claim 8

A radiation-sensitive polyimide precursor composition, as recited in claim 6, in which said aromatic biimidazole of said photopolymerization initiator is selected from the group consisting of bis(2-o-chlorophenyl-4,5-diphenyl and imidazolyl) and bis[2-o-chlorophenyl-4,5-di(m-methoxyphenol)imidazolyl].

Claim 9

A radiation-sensitive polyimide precursor composition, as recited in claim 7, wherein the composition also contains about 0.1-10% by weight, based on the weight of the polymer, of a leuco dye.

Claim 10

A radiation-sensitive polyimide precursor composition, as recited in claim 8, wherein the composition also contains about 0.1-15% by weight, based on the weight of the polymer of a photosensitizer.

Claim 11

A method for the preparation of a radiation-sensitive polyimide precursor composition, as recited in claim 1, comprising: a. reacting a tetracarboxylic acid dianhydride of the formula ##STR10## wherein R 1 is a tetravelent, aromatic, non-halogen containing, organic radical containing at least one ring of six carbon atoms, said ring characterized by benzenoid unsaturation, the four carbonyl groups being attached directly to separate carbon atoms in a ring of the R 1 radical with at least one organic diamine of the formula ##STR11## wherein R 4 and R 5 are selected from the group consisting of perfluoro and perhalofluoro aliphatic hydrocarbons having 1 to 8 carbons; and A and A' are selected from the group consisting of H, Cl, Br, and NO 2 ; in a suitable solvent at a temperature below about 75° C. to form a carboxyl group-containing reaction product; b. reacting said reaction product with an olefinically unsaturated monoepoxide at a temperature from about room temperature to about 100° C. in an organic solvent to form an addition product; c. adding to a solution of said addition product, a radiation-sensitive polymerizable polyfunctional acrylate compound; and d. also adding to said solution a photopolymeriation initiator system comprising hydrogen donor initiator and aromatic biimidazole.

Claim 12

A method as recited in claim 10 wherein R 4 and R 5 are selected from the group consisting of --CF 3 , --CClF 2 , and --CBrF 2 .

Claim 13

A method as recited in claim 10 wherein the reaction product of the dianhydride and the diamine is brought to reaction with a compound from the group consisting of hydroxyethyl acrylate, hydroxyethyl methacrylate, and a combination of the two, prior to the reaction with said olefinically unsaturated monoepoxide.

Claim 14

A method for the preparation of a radiation-sensitive polyimide precursor composition, as recited in claim 1, comprising: a. reacting a tetracarboxylic acid dianhydride of the formula ##STR12## wherein R 1 is as recited in claim 1, with a compound selected from the group consisting of hydroxy alkyl acrylates and hydroxy alkyl methacrylates to form an esterification product; b. forming an acid chloride derivative of said esterification product; c. reacting said acid chloride derivative with a diamine of the formula ##STR13## wherein R 4 , R 5 , A, and A' are as recited in claim 1, to form an addition product; d. adding to a solution of said addition product, a radiation-sensitive polymerizable polyfunctional acrylate compound; and e. also adding to said solution a photopolymerization initiator system comprising hydrogen donor initiator and aromatic biimidazole.

Claim 15

A method as recited in claim 13 wherein R 4 and R 5 are selected from the group consisting of --CF 3 , --CClF 2 , and --CBrF 2 .