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US4443409A
Expired / Lapsed
US
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Apparatus for improved low temperature ashing in a plasma
Assignee: Alcatel Lucent NV
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Filing: 1982-06-16
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Granted: 1984-04-17
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Expires: 2002-06-16
Abstract
Abstract Reactor apparatus for use with a gaseous plasma includes a grounded electrode in contact with the plasma. The electrode includes one or more bores in which plasma jets form.
Inventors
- 👤 Edward J. Saccocio
- 👤 Mark E. Holycross
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:57
CPC Classifications
B; B01; B01J; B01J12/00; B01J12/002; B01J2219/00; B01J2219/08; B01J2219/0894
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
83 words
A gaseous plasma reaction apparatus comprising: a nonmetallic, inorganic cylinder; a first end wall sealing one end of said cylinder; a second end wall sealing the other end of said cylinder; a plurality of electrodes surrounding said cylinder and connected to a source of RF energy; said second end wall being of metallic conductive material and being connectable to an RF ground common to said source of RF energy; said second end wall having one or more apertures wherein plasma jets may form.
Claim 2
Dependent Claim
83 words
A gaseous plasma reaction apparatus comprising: a nonmetallic, inorganic cylinder; a first end wall sealing one end of said cylinder; a second end wall sealing the other end of said cylinder; a plurality of electrodes surrounding said cylinder and connected to a source of RF energy; said second end wall being of metallic conductive material and being connectable to an RF ground common to said source of RF energy; said second end wall having one or more apertures wherein plasma jets may form.
Claim 3
Dependent Claim
20 words
Apparatus in accordance with claim 1, wherein each of said one or more apertures terminates in a nonconductive, closed-end tube.
Claim 4
Dependent Claim
21 words
Apparatus in accordance with claim 2, wherein each said closed end tube comprises a halogen substituted hydrocarbon polymer in solid form.
Claim 5
Dependent Claim
15 words
Apparatus in accordance with claim 3, wherein said halogen substituted hydrocarbon polymer comprises polyvinyl chloride.
Claim 6
Dependent Claim
14 words
Apparatus in accordance with claim 4, wherein said halogen substituted hydrocarbon polymer comprises polytetrafluoroethylene.
Claim 7
Dependent Claim
22 words
Apparatus in accordance with claims 1 or 2, wherein a halogen substituted hydrocarbon polymer in solid form is disposed in said aperture.
Claim 8
Dependent Claim
12 words
Apparatus in accordance with claim 6, wherein said polymer comprises polyvinyl chloride.
Claim 9
Dependent Claim
11 words
Apparatus in accordance with claim 6, wherein said polymer comprises polytetrafluorethylene.
Claim 10
Dependent Claim
22 words
Apparatus in accordance with claim 1, wherein said first end wall comprises a metallic conductive material being connectable to said RF ground.
Claim 11
Dependent Claim
105 words
A gaseous plasma reaction apparatus comprising: a nonmetallic, inorganic cylinder; a first end wall sealing one end of said cylinder; said first end wall being of metallic conductive material; a second end wall sealing the other end of said cylinder; a plurality of spaced apart, metallic, conductive electrodes supported within said cylinder; means for connecting said electrodes to a source of RF energy; means for connecting said first end wall to an RF ground; means for introducing a gas into said cylinder; means for exhausting gas from said cylinder; at least one of said electrodes including one or more bores for forming a plasma jet.
Claim 12
Dependent Claim
105 words
A gaseous plasma reaction apparatus comprising: a nonmetallic, inorganic cylinder; a first end wall sealing one end of said cylinder; said first end wall being of metallic conductive material; a second end wall sealing the other end of said cylinder; a plurality of spaced apart, metallic, conductive electrodes supported within said cylinder; means for connecting said electrodes to a source of RF energy; means for connecting said first end wall to an RF ground; means for introducing a gas into said cylinder; means for exhausting gas from said cylinder; at least one of said electrodes including one or more bores for forming a plasma jet.
Claim 13
Dependent Claim
32 words
Apparatus in accordance with claim 10, wherein one of said electrodes is supported by a member comprising heat conductive material; said member being in heat conductive contact with said first end wall.
Claim 14
Dependent Claim
46 words
Apparatus in accordance with claim 11, wherein said member is a metallic tube having a central passage way; said one electrode comprises a central aperture in communication with said passageway; said exhausting means comprises an aperture in said one wall and in communication with said passageway.
Claim 15
Dependent Claim
23 words
Apparatus in accordance with claims 10, 11, or 12, wherein a halogen substituted hydrocarbon polymer in solid form is disposed between said electrodes.
Claim 16
Dependent Claim
12 words
Apparatus in accordance with claim 13, wherein said polymer comprises polyvinyl chloride.
Claim 17
Dependent Claim
11 words
Apparatus in accordance with claim 13, wherein said polymer comprises polytetrafluorethylene.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-04-17 | 1987-10-17 | 1988-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-17 | 1991-10-17 | 1992-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-17 | 1995-10-17 | 1996-04-17 | $7700.00 | Window Closed / Lapsed |