US4445494A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for supporting crystalline wafers
Assignee: Siltronic AG
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Filing: 1981-09-23
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Granted: 1984-05-01
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Expires: 2001-09-23
Abstract
Abstract A process and apparatus for supporting crystalline wafers utilizing the sion effect of flowing gas on the crystalline wafers. An almost point-like support of the crystalline wafer is achieved. Furthermore, the invention relates to a holding tool for carrying out the process, which tool has at the center of the holding face, a point-like projection.
Inventors
- 👤 Bernd Schiele
- 👤 Johann Niedermeier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:09
CPC Classifications
B; B65; B65G; B65G47/00; B65G47/74; B65G47/90; B65G47/91; B65G47/911; B23; B23B; B23B23/00; B23B23/02; B28; B28D; B28D5/00; B28D5/0058; B28D5/0082; B28D5/0094; H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; B23B2233/00; B23B2233/08; B23B2270/00; B23B2270/28; Y; Y10; Y10T; Y10T83/00; Y10T83/202; Y10T83/2066
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
89 words
A holding tool which comprises a holding plate having a surface which faces an article being held, an annular nozzle, in the holding plate, formed by a conical hole and a conical guide cone, having a base, mounted in the conical hole with the base of the conical guide cone facing the article being held, a point-like projection, protroding from the center of the base of the conical guide cone, for contacting the article being held and means for providing a controlled flow of gas from the annular nozzle.
Claim 2
Dependent Claim
89 words
A holding tool which comprises a holding plate having a surface which faces an article being held, an annular nozzle, in the holding plate, formed by a conical hole and a conical guide cone, having a base, mounted in the conical hole with the base of the conical guide cone facing the article being held, a point-like projection, protroding from the center of the base of the conical guide cone, for contacting the article being held and means for providing a controlled flow of gas from the annular nozzle.
Claim 3
Dependent Claim
23 words
The holding tool of claim 1 wherein the annular nozzle is formed from spaced segments which spacing varies from about 2/3πr to 0.
Claim 4
Dependent Claim
18 words
The holding tool of claim 2 wherein the spacing is zero whereby a continuous annular nozzle is formed.
Claim 5
Dependent Claim
14 words
The holding tool of claim 1 wherein the point-like projection has a spherical surface.
Claim 6
Dependent Claim
29 words
The holding tool of claim 1, 2 or 3 wherein the annular nozzle has a clear width of about 0.02 to 2% of the diameter of the holding plate.
Claim 7
Dependent Claim
20 words
The holding tool of claim 5 wherein the guide cone has an apex angle of from about 20° to 150°.
Claim 8
Dependent Claim
20 words
The holding tool of claim 6 wherein the apex angle of the guide cone is between about 50° and 110°.
Claim 9
Dependent Claim
37 words
The holding tool of claim 5 wherein the diameter of the conical hole is from about 0.02 to 1% of the diameter of the plate, longer than the diameter of the base of the conical guide cone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-01 | 1987-10-31 | 1988-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-01 | 1991-10-31 | 1992-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-01 | 1995-10-31 | 1996-05-01 | $7700.00 | Window Closed / Lapsed |