Patent EP0417986A2 successfully refreshed from Google Patents.
US4453078A
Expired / Lapsed
US
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Ion source
Assignee: Jeol Ltd
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Filing: 1982-06-07
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Granted: 1984-06-05
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Expires: 2002-06-07
Abstract
Abstract A reservoir, extracting electrode and circular tungsten filament are maintained at high positive D.C. potential relative to a grounded electrode. Thermal electrons emanated from the filament irradiates and heats the bottom of the reservoir. As a result, powdered CsI held in the reservoir is melted and then forms a liquid CsI cone-shaped portion below the capillary formed at the reservoir bottom. Vaporized CsI molecules are created by further heating the cone-shaped portion, and are ionized by electron beam irradiation, so that a Cs + ion beam is obtained.
Inventors
- 👤 Ryuichi Shimizu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:52
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/20; H01J27/22; H01J27/26; H01J37/00; H01J37/02; H01J37/04; H01J37/08
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
173 words
An ion source having elements positioned along an optical axis comprising: (a) a reservoir for holding a compound of an alkali metal, said reservoir forming a capillary from the interior to the exterior of the reservoir, said capillary being symmetrical with the optical axis of the source at the open end thereof; (b) an extracting electrode having an opening spaced from the capillary of the reservoir; (c) an electron source for generating thermal electrons, spaced beyond the extracting electrode from the reservoir being at about the same potential as the extracting electrode such that electrons emitted from the source are accelerated toward the opening of the reservoir for bombarding the compound to heat and ionize it; (d) a grounded electrode having an opening, said grounded electrode being spaced beyond the electron source from the reservoir; (e) a high D.C. voltage supply for maintaining the reservoir at positive high potential relative to the grounded electrode; and (f) an extracting D.C. voltage supply for maintaining the extracting electrode at negative potential relative to the reservoir.
Claim 2
Dependent Claim
173 words
An ion source having elements positioned along an optical axis comprising: (a) a reservoir for holding a compound of an alkali metal, said reservoir forming a capillary from the interior to the exterior of the reservoir, said capillary being symmetrical with the optical axis of the source at the open end thereof; (b) an extracting electrode having an opening spaced from the capillary of the reservoir; (c) an electron source for generating thermal electrons, spaced beyond the extracting electrode from the reservoir being at about the same potential as the extracting electrode such that electrons emitted from the source are accelerated toward the opening of the reservoir for bombarding the compound to heat and ionize it; (d) a grounded electrode having an opening, said grounded electrode being spaced beyond the electron source from the reservoir; (e) a high D.C. voltage supply for maintaining the reservoir at positive high potential relative to the grounded electrode; and (f) an extracting D.C. voltage supply for maintaining the extracting electrode at negative potential relative to the reservoir.
Claim 3
Dependent Claim
15 words
An ion source according to claim 1 in which said reservoir is made of tantalum.
Claim 4
Dependent Claim
31 words
An ion source according to claim 2 in which said grounded electrode incorporates a mesh electrode arranged above grounded electrode maintained at negative several hundred volts relative to the grounded electrode.
Claim 5
Dependent Claim
15 words
An ion source according to claim 1 in which said reservoir is made of tungsten.
Claim 6
Dependent Claim
18 words
An ion source according to claim 1 in which said electron source comprises a circularly turned tungsten filament.
Claim 7
Dependent Claim
203 words
An ion source having elements positioned along an optical axis comprising: (a) a reservoir for holding a chemical compound of alkali metal, said reservoir forming a capillary from the interior to the exterior of the reservoir, said capillary being symmetrical with the optical axis of the source at the open end thereof; (b) a needle arranged through the center of the capillary of the reservoir so that the apex end of the needle projects slightly beyond the exterior surface of the reservoir; (c) an extracting electrode having an opening, spaced from the capillary of the reservoir; (d) an electron source for generating thermal electrons, spaced beyond the extracting electrode from the reservoir being at about the same potential as the extracting electrode such that electrons emitted from the source are accelerated toward the opening of the reservoir for bombarding a compound to heat and ionize it; (e) a grounded electrode having an opening, said grounded electrode being spaced beyond the electron source from the reservoir; (f) a high D.C. voltage supply for maintaining the reservoir at positive high potential relative to the grounded electrode; and (g) an extracting D.C. voltage supply for maintaining the extracting electrode at negative potential relative to the reservoir.
Claim 8
Dependent Claim
203 words
An ion source having elements positioned along an optical axis comprising: (a) a reservoir for holding a chemical compound of alkali metal, said reservoir forming a capillary from the interior to the exterior of the reservoir, said capillary being symmetrical with the optical axis of the source at the open end thereof; (b) a needle arranged through the center of the capillary of the reservoir so that the apex end of the needle projects slightly beyond the exterior surface of the reservoir; (c) an extracting electrode having an opening, spaced from the capillary of the reservoir; (d) an electron source for generating thermal electrons, spaced beyond the extracting electrode from the reservoir being at about the same potential as the extracting electrode such that electrons emitted from the source are accelerated toward the opening of the reservoir for bombarding a compound to heat and ionize it; (e) a grounded electrode having an opening, said grounded electrode being spaced beyond the electron source from the reservoir; (f) a high D.C. voltage supply for maintaining the reservoir at positive high potential relative to the grounded electrode; and (g) an extracting D.C. voltage supply for maintaining the extracting electrode at negative potential relative to the reservoir.
Claim 9
Dependent Claim
15 words
An ion source according to claim 6 in which said needle is made of tantalum.
Claim 10
Dependent Claim
15 words
An ion source according to claim 6 in which said reservoir is made of tungsten.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-06-05 | 1987-12-05 | 1988-06-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-06-05 | 1991-12-05 | 1992-06-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-06-05 | 1995-12-05 | 1996-06-05 | $7700.00 | Window Closed / Lapsed |