US4488045A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metal ion source
Assignee: Jeol Ltd
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Filing: 1982-08-27
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Granted: 1984-12-11
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Expires: 2002-08-27
Abstract
Abstract A reservoir containing a material to be ionized has in its bottom a capillary extending outwardly in symmetrical with the optical axis of an ion source, and has a needle extending coaxially through said capillary in said reservoir so that the apex end of the needle projects slightly beyond the exterior surface of the reservoir. Intensive electric field at the apex end of the needle is formed by an extracting electrode disposed in facing the needle. An electric current is supplied through conductive wires or filaments supporting the reservoir for heating the reservoir. As a result, the liquid material to be ionized in the reservoir seeps smoothly through the capillary of the reservoir toward the apex end of the needle for field evaporation and ionization.
Inventors
- 👤 Norimichi Anazawa
- 👤 Masahiko Okunuki
- 👤 Ryuzo Aihara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:31
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/26
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
171 words
A metal ion source comprising: (a) a funnel-shaped reservoir vessel for containing liquid metal to be ionized, said reservoir having in its bottom a capillary bore, said bottom and bore extending outwardly in symmetrical relation to an optical axis of the metal ion source; (b) a needle extending coaxially through said capillary bore in said reservoir making no contact therewith and having a pointed end projecting beyond an outer surface of said reservoir; (c) a plurality of conductive wires supporting said reservoir and conducting electrical current thereto; (d) an extracting electrode having an opening and being disposed facing said capillary in said reservoir; (e) a grounded electrode disposed below said extracting electrode; (f) a DC voltage supply for maintaining said reservoir at a positive high potential with respect to said grounded electrode; (g) an extracting voltage supply for maintaining said extracting electrode at a negative potential with respect to said reservoir; and (h) a heating power supply for supplying an electric current through said plurality of wires to heat said reservoir.
Claim 2
Dependent Claim
171 words
A metal ion source comprising: (a) a funnel-shaped reservoir vessel for containing liquid metal to be ionized, said reservoir having in its bottom a capillary bore, said bottom and bore extending outwardly in symmetrical relation to an optical axis of the metal ion source; (b) a needle extending coaxially through said capillary bore in said reservoir making no contact therewith and having a pointed end projecting beyond an outer surface of said reservoir; (c) a plurality of conductive wires supporting said reservoir and conducting electrical current thereto; (d) an extracting electrode having an opening and being disposed facing said capillary in said reservoir; (e) a grounded electrode disposed below said extracting electrode; (f) a DC voltage supply for maintaining said reservoir at a positive high potential with respect to said grounded electrode; (g) an extracting voltage supply for maintaining said extracting electrode at a negative potential with respect to said reservoir; and (h) a heating power supply for supplying an electric current through said plurality of wires to heat said reservoir.
Claim 3
Dependent Claim
33 words
A metal ion source according to claim 1, wherein said plurality of wires are at least partly coated with a material which is poorly wet by the liquid metal contained in said reservoir.
Claim 4
Dependent Claim
31 words
A metal ion source according to claim 1, wherein said reservoir is at least partly coated with a material which is poorly wet by the liquid metal contained in said reservoir.
Claim 5
Dependent Claim
32 words
A metal ion source according to claim 1, wherein said wires are shaped to provide a region which is heatable to a temperature higher than that of the rest of the filaments.
Claim 6
Dependent Claim
15 words
A metal ion source according to claim 4, wherein said wires have a coil-shaped portion.
Claim 7
Dependent Claim
15 words
A metal ion source according to claim 4, wherein said wires have a U-shaped portion.
Claim 8
Dependent Claim
30 words
A metal ion source according to claim 1, wherein said wires are made of a material having a temperature coefficient of resistance which is 0.5×10 -3 /degree Celsius or smaller.
Claim 9
Dependent Claim
22 words
A metal ion source according to claim 7, wherein said wires are made of a nickel-chromium alloy or an ion chromium alloy.
Claim 10
Dependent Claim
26 words
A metal ion source according to claim 1, wherein said needle has a surface made of a component of an eutectic alloy contained in said reservoir.
Claim 11
Dependent Claim
26 words
A metal ion source according to claim 1, wherein said reservoir has a surface made of a component of an eutectic alloy contained in said reservoir.
Claim 12
Dependent Claim
20 words
A metal ion source according to claim 2 or claim 3, wherein the coating material is comprised of ceramic material.
Claim 13
Dependent Claim
20 words
A metal ion source according to claim 1, wherein the reservoir is at least partially formed of a ceramic material.
Claim 14
Dependent Claim
24 words
A metal ion source according to claim 1 wherein the outer shape of the reservoir comprises a conical surface symmetrical with the optical axis.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-11 | 1988-06-11 | 1988-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-11 | 1992-06-11 | 1992-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-11 | 1996-06-11 | 1996-12-11 | $7700.00 | Window Closed / Lapsed |