US4504646A
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Positive type, radiation-sensitive organic polymer materials
Assignee: Hitachi Ltd
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Filing: 1983-11-09
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Granted: 1985-03-12
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Expires: 2003-11-09
Abstract
Abstract Aliphatic aldehyde polymer containing at least one Si atom in its molecular chain is a positive type resist having a very high sensitivity to radiation such as electron beams, X-rays, ion beams, etc.
Inventors
- 👤 Kazuo Nate
- 👤 Takashi Inoue
- 👤 Hitoshi Yokono
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 10:47
CPC Classifications
G; G03; G03C; G03C1/00; G03C1/72; C; C08; C08G; C08G2/00; C08G2/14; C08G2/18; C08G2/20; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/0758
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
100 words
A positive type, radiation-sensitive polymer which comprises an aliphatic aldehyde polymer having at least one Si atom in its molecular chain, represented by the general formula (1) or (2): ##STR10## wherein R is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group, each of the groups contains at least one Si atom in its molecular chain at the β-position, and R 1 is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group and m/n is 0.45/0.55.
Claim 2
Dependent Claim
100 words
A positive type, radiation-sensitive polymer which comprises an aliphatic aldehyde polymer having at least one Si atom in its molecular chain, represented by the general formula (1) or (2): ##STR10## wherein R is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group, each of the groups contains at least one Si atom in its molecular chain at the β-position, and R 1 is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group and m/n is 0.45/0.55.
Claim 3
Dependent Claim
52 words
A positive type, radiation-sensitive polymer according to claim 1, wherein an aliphatic aldehyde unit represented by ##STR11## in the formula (1) or (2) is obtained from β-trimethylsilylpropanal, β-triethylsilylpropanal, β-trimethylsilylbutanal or β-triethylsilylbutanal, and aliphatic aldehyde unit represented by ##STR12## in the formula (2) is obtained from ethanal, propanal, n-butanal, n-pentanal, n-hexanal, or β-phenylpropanal.
Claim 4
Dependent Claim
98 words
A radiation-sensitive polymer having (a) 10 to 100% by mole of one or more repeating units of a formula (1): ##STR13## wherein R is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group, each of the groups contains at least one Si atom, and (b) 90 to 0% by mole of one or more repeating units of a formula (2): ##STR14## wherein R 1 is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group.
Claim 5
Dependent Claim
98 words
A radiation-sensitive polymer having (a) 10 to 100% by mole of one or more repeating units of a formula (1): ##STR13## wherein R is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group, each of the groups contains at least one Si atom, and (b) 90 to 0% by mole of one or more repeating units of a formula (2): ##STR14## wherein R 1 is an alkyl group having 1 to 8 carbon atoms, a halogenated alkyl group, an aralkyl group or a halogenated aralkyl group.
Claim 6
Dependent Claim
35 words
A radiation-sensitive polymer according to claim 3, wherein the repeating unit represented by the formula (1) is any one of ##STR15## and the repeating unit represented by the formula (2) is any one of ##STR16##
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-03-11 | 1988-09-10 | 1989-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-03-11 | 1992-09-10 | 1993-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-03-11 | 1996-09-10 | 1997-03-12 | $7700.00 | Window Closed / Lapsed |