US4504964A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser beam plasma pinch X-ray system
Assignee: Axcelis Technologies Inc
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Filing: 1982-09-20
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Granted: 1985-03-12
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Expires: 2002-09-20
Abstract
Abstract A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma vapor is repeatably generated directly from solid material by impingement of a plurality of circumferentially spaced laser beams to generate an annulus of plasma. X-rays are generated by passing high current through the annular plasma in an axial gap between the solid material target electrode and another electrode, causing magnetic field radial inward plasma pinching to a central constricted area further heating the plasma and emitting X-rays. A central axially directed laser may further heat the plasma in the pinched area.
Inventors
- 👤 Louis Cartz
- 👤 Arnold Weiss
- 👤 Herman P. Schutten
- 👤 Gordon B. Spellman
- 👤 Stanley V. Jaskolski
- 👤 Peter H. Wackman, deceased
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 18:10
CPC Classifications
H; H05; H05G; H05G2/00; H05G2/001; H05G2/007; B; B82; B82Y; B82Y10/00; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70033; G21; G21B; G21B1/00; G21B1/11; G21B1/23; Y; Y02; Y02E; Y02E30/00; Y02E30/10
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
81 words
A method for producing X-rays comprising: generating plasma directly from solid material by laser beam impingement; and generating X-rays by passing high current rectilinearly axially through said plasma causing radially inward magnetic field plasma pinching perpendicularly to the rectilinear axial current flow, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingement location, said laser beam being directed in an axial path parallel to or colinear with the current axis.
Claim 2
Independent Claim
81 words
A method for producing X-rays comprising: generating plasma directly from solid material by laser beam impingement; and generating X-rays by passing high current rectilinearly axially through said plasma causing radially inward magnetic field plasma pinching perpendicularly to the rectilinear axial current flow, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingement location, said laser beam being directed in an axial path parallel to or colinear with the current axis.
Claim 3
Independent Claim
35 words
A method for producing X-rays comprising: repeatably generating plasma in an annulus directly from solid material by laser beam impingements; and generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.
Claim 4
Independent Claim
35 words
A method for producing X-rays comprising: repeatably generating plasma in an annulus directly from solid material by laser beam impingements; and generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.
Claim 5
Dependent Claim
50 words
The invention according to claim 2 comprising directing a plurality of circumferentially spaced laser beams axially on a solid target electrode, and axially passing high current through said plasma across an axial gap between said target electrode and another electrode to cause radial inward magnetic field pinching of said plasma.
Claim 6
Dependent Claim
22 words
The invention according to claim 3 comprising directing said laser beams through a circumferential array of axial passages in said other electrode.
Claim 7
Dependent Claim
42 words
The invention according to claim 4 further comprising directing an additional laser beam through a central axial passage in said other electrode to impinge on the radially inwardly pinched plasma in the gap between said electrodes and further heat said pinched plasma.
Claim 8
Dependent Claim
14 words
The invention according to claim 4 comprising communicating said X-rays axially from said gap.
Claim 9
Dependent Claim
18 words
The invention according to claim 6 comprising communicating said X-rays through an axial passage in said target electrode.
Claim 10
Dependent Claim
27 words
The invention according to claim 6 comprising communicating said X-rays back through an axial passage in said other electrode in the opposite direction of said laser beams.
Claim 11
Independent Claim
46 words
A method for producing X-rays usable for fine line lithography, comprising: repeatably generating plasma in an annulus directly from solid material by laser beam impingement; and generating X-rays by passing high current axially through said plasma causing radial inward magnetic field pinching of said plasma annulus.
Claim 12
Independent Claim
46 words
A method for producing X-rays usable for fine line lithography, comprising: repeatably generating plasma in an annulus directly from solid material by laser beam impingement; and generating X-rays by passing high current axially through said plasma causing radial inward magnetic field pinching of said plasma annulus.
Claim 13
Dependent Claim
30 words
The invention according to claim 9 comprising communicating said X-rays axially from said pinched plasma and placing a masked semiconductor substrate normal to said axis for impingement by said X-rays.
Claim 14
Dependent Claim
82 words
Apparatus for producing X-rays comprising: means for generating plasma directly from solid material by laser beam impingement along a plurality of axially extending laser beam paths impinging said solid material at a plurality of radially spaced locations; and means for generating X-rays by passing high current through said plasma between axially spaced electrodes causing radially inward magnetic field plasma pinching, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingment location.
Claim 15
Dependent Claim
82 words
Apparatus for producing X-rays comprising: means for generating plasma directly from solid material by laser beam impingement along a plurality of axially extending laser beam paths impinging said solid material at a plurality of radially spaced locations; and means for generating X-rays by passing high current through said plasma between axially spaced electrodes causing radially inward magnetic field plasma pinching, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingment location.
Claim 16
Dependent Claim
38 words
Apparatus for producing X-rays comprising: means for repeatably generating plasma in an annulus directly from solid material by laser beam impingement; and means for generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.
Claim 17
Dependent Claim
38 words
Apparatus for producing X-rays comprising: means for repeatably generating plasma in an annulus directly from solid material by laser beam impingement; and means for generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.
Claim 18
Dependent Claim
112 words
The invention according to claim 12 comprising a solid target electrode, and another electrode spaced from said target electrode by an axial gap, said other electrode having a plurality of circumferentially spaced axial passages therethrough, and means for directing a plurality of circumferentially spaced laser beams axially through respective said circumferential array of axial passages in said other electrode such that said circumferential array of laser beams impinge said target electrode in an annular pattern to generate said plasma, and means for discharging a high current axially between said electrodes through said annular plasma in said gap to cause radial inward magnetic field pinching of said plasma to a central constricted area.
Claim 19
Dependent Claim
17 words
The invention according to claim 13 wherein said other electrode further has a central axial passage therethrough.
Claim 20
Dependent Claim
49 words
The invention according to claim 14 further comprising central laser beam means for directing a laser beam through said central axial passage in said other electrode to impinge said radially inwardly pinched plasma in said constricted area in said gap between said electrodes to further heat said pinched plasma.
Claim 21
Dependent Claim
29 words
The invention according to claim 13 wherein said target electrode has a central axial passage therethrough coaxially aligned with said central constricted radially pinched plasma for emitting X-rays therethrough.
Claim 22
Independent Claim
51 words
A method for producing X-rays comprising: initially generating plasma directly from solid material by axial laser beam impingment at radially spaced locations; and subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.
Claim 23
Independent Claim
51 words
A method for producing X-rays comprising: initially generating plasma directly from solid material by axial laser beam impingment at radially spaced locations; and subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.
Claim 24
Dependent Claim
24 words
The invention according to claim 17 wherein the X-ray emitting plasma pinched region is at a different location than the laser beam impingement location.
Claim 25
Dependent Claim
54 words
Apparatus for producing X-rays comprising: means for initially generating plasma directly from solid material by axial laser beam impingement at radially spaced locations; and means for subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.
Claim 26
Dependent Claim
54 words
Apparatus for producing X-rays comprising: means for initially generating plasma directly from solid material by axial laser beam impingement at radially spaced locations; and means for subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.
Claim 27
Dependent Claim
24 words
The invention according to claim 19 wherein the X-ray emitting plasma pinched region is at a different location than the laser beam impingement location.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-03-11 | 1988-09-10 | 1989-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-03-11 | 1992-09-10 | 1993-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-03-11 | 1996-09-10 | 1997-03-12 | $7700.00 | Window Closed / Lapsed |