US4514192A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Silicon oxide lapping coatings
Assignee: RCA Corp
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Filing: 1982-07-27
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Granted: 1985-04-30
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Expires: 2002-07-27
Abstract
Abstract Enhanced micromachining rates are observed when lapping discs with standard SiOx lapping coatings are doped with trivalent or pentavalent additives, such as boron or phosphorous. Doping can be accomplished by subjecting the SiOx material to a "post glow", i.e., an argon plasma in the presence of a source of the dopant.
Inventors
- 👤 Surendra K. Verma
- 👤 George A. Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:46
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042; B24D; B24D3/00; B24D3/34
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
47 words
In a lapping disc comprising a substrate and an SiO x lapping coating thereon, where 1≦x≦2, the improvement wherein the SiO x coating contains a dopant selected from the group consisting of boron and phosphorous in an amount sufficient to enhance the micromachining abilities of said coating.
Claim 2
Dependent Claim
47 words
In a lapping disc comprising a substrate and an SiO x lapping coating thereon, where 1≦x≦2, the improvement wherein the SiO x coating contains a dopant selected from the group consisting of boron and phosphorous in an amount sufficient to enhance the micromachining abilities of said coating.
Claim 3
Dependent Claim
13 words
A lapping disc in accordance with claim 1 wherein the dopant is boron.
Claim 4
Dependent Claim
13 words
A lapping disc in accordance with claim 1 wherein the dopant is phosphorous.
Claim 5
Dependent Claim
19 words
A lapping disc in accordance with claim 1 wherein the substrate is a homopolymer or copolymer of vinyl chloride.
Claim 6
Dependent Claim
24 words
A lapping disc in accordance with claims 1 and 4 wherein a metal layer is interposed between the substrate and the SiO x layer.
Claim 7
Dependent Claim
87 words
In a method for preparing an abrasive SiO x coating wherein 1≦x≦2, comprising subjecting SiH 4 and N 2 O or CO 2 or H 2 O to a glow discharge and depositing the SiO x product onto a substrate; the improvement comprising the additional step of subjecting the SiO x coated substrate to a post-glow in the presence of a source of a dopant selected from the group consisting of boron and phosphorous in an amount sufficient to increase the abrasiveness of the SiO x coating.
Claim 8
Dependent Claim
87 words
In a method for preparing an abrasive SiO x coating wherein 1≦x≦2, comprising subjecting SiH 4 and N 2 O or CO 2 or H 2 O to a glow discharge and depositing the SiO x product onto a substrate; the improvement comprising the additional step of subjecting the SiO x coated substrate to a post-glow in the presence of a source of a dopant selected from the group consisting of boron and phosphorous in an amount sufficient to increase the abrasiveness of the SiO x coating.
Claim 9
Dependent Claim
10 words
The method of claim 6 wherein the dopant is boron.
Claim 10
Dependent Claim
21 words
The method of claim 7 wherein the coating is provided by post glowing the coating in the presence of boron nitride.
Claim 11
Dependent Claim
10 words
The method of claim 6 wherein the dopant is phosphorous.
Claim 12
Dependent Claim
21 words
The method of claim 9 wherein the coating is provided by post glowing the coating in the presence of silicon hypophosphate.
Claim 13
Dependent Claim
16 words
The method of claim 6 wherein the substrate is a homopolymer or copolymer of vinyl chloride.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-04-29 | 1988-10-29 | 1989-04-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-04-29 | 1992-10-29 | 1993-04-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-04-29 | 1996-10-29 | 1997-04-30 | $7700.00 | Window Closed / Lapsed |