Patent US3679426A successfully refreshed from Google Patents.
US4520375A
Expired / Lapsed
US
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Fluid jet ejector
Assignee: Seiko Epson Corp
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Filing: 1983-05-13
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Granted: 1985-05-28
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Expires: 2003-05-13
Abstract
Abstract A fluid jet ejector, such as is used in an inkjet printer head, is provided by a pair of spaced capacitor plates, one of which is a thin diaphragm, preferably of semiconductor material, such as silicon. The capacitor plates may be photolithographically developed. Impressing a time varying voltage on the capacitor causes the diaphragm to be set into mechanical motion. A reservoir containing fluid, such as ink, is contiguous the diaphragm and has a nozzle through which fluid exits responsive to diaphragm motion.
Inventors
- 👤 John W. Kroll
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 14:24
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14314
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
63 words
A fluid jet ejector comprising a pair of spaced capacitor plates, one of which is a thin diaphragm of semiconductor material, responsive to a time varying voltage causing a varying electric field between said plates to set said diaphragm into mechanical motion, and reservoir means containing fluid contiguous said diaphragm and including a nozzle through which fluid exits responsive to said diaphragm motion.
Claim 2
Dependent Claim
63 words
A fluid jet ejector comprising a pair of spaced capacitor plates, one of which is a thin diaphragm of semiconductor material, responsive to a time varying voltage causing a varying electric field between said plates to set said diaphragm into mechanical motion, and reservoir means containing fluid contiguous said diaphragm and including a nozzle through which fluid exits responsive to said diaphragm motion.
Claim 3
Dependent Claim
76 words
A fluid jet ejector comprising a pair of spaced capacitor plates, one of which is a thin diaphragm, responsive to a time varying voltage causing a varying electric field between said plates to set said diaphragm into mechanical motion, and a reservoir means containing fluid contiguous said diaphragm and including a nozzle through which fluid exits responsive to said diaphragm motion wherein said reservoir is on the side of said diaphragm opposite said other capacitor plate.
Claim 4
Dependent Claim
76 words
A fluid jet ejector comprising a pair of spaced capacitor plates, one of which is a thin diaphragm, responsive to a time varying voltage causing a varying electric field between said plates to set said diaphragm into mechanical motion, and a reservoir means containing fluid contiguous said diaphragm and including a nozzle through which fluid exits responsive to said diaphragm motion wherein said reservoir is on the side of said diaphragm opposite said other capacitor plate.
Claim 5
Dependent Claim
34 words
The invention according to claim 2 wherein said diaphragm is a thin section of semiconductor material, and wherein said reservoir is formed by side walls of said semiconductor material extending integrally from said diaphragm.
Claim 6
Dependent Claim
22 words
The invention according to claim 3 wherein said reservoir is formed in a semiconductor substrate by a groove or cavity etched thereinto.
Claim 7
Dependent Claim
38 words
The invention according to claim 3 comprising an end wall facing and spaced from said diaphragm and engaging the ends of said side walls to close said cavity, said end wall having a fluid source entry port therethrough.
Claim 8
Dependent Claim
23 words
The invention according to claim 5 wherein said nozzle comprises a passage along the interface of said side wall and said end wall.
Claim 9
Dependent Claim
31 words
The invention according to claim 2 wherein said voltage is varied to drive said diaphragm with a pulsating effect to form discrete fluid drops in the fluid stream exiting said nozzle.
Claim 10
Dependent Claim
19 words
The invention according to claim 2 wherein said voltage is varied to drive said diaphragm at its resonant frequency.
Claim 11
Dependent Claim
104 words
An inkjet printer head comprising a pair of spaced capacitor plates, one of which is a thin silicon diaphragm, responsive to a time varying voltage causing a varying electric field between said plates to set said diaphragm into mechanical motion, and reservoir means containing ink contiguous said diaphragm and including a nozzle through which ink exits responsive to said diaphragm motion, said reservoir being on the side of said diaphragm opposite said other capacitor plate, said reservoir being formed in a silicon substrate by a groove or cavity etched thereinto to provide said reservoir between side walls of silicon extending integrally from said diaphragm.
Claim 12
Dependent Claim
104 words
An inkjet printer head comprising a pair of spaced capacitor plates, one of which is a thin silicon diaphragm, responsive to a time varying voltage causing a varying electric field between said plates to set said diaphragm into mechanical motion, and reservoir means containing ink contiguous said diaphragm and including a nozzle through which ink exits responsive to said diaphragm motion, said reservoir being on the side of said diaphragm opposite said other capacitor plate, said reservoir being formed in a silicon substrate by a groove or cavity etched thereinto to provide said reservoir between side walls of silicon extending integrally from said diaphragm.
Claim 13
Dependent Claim
31 words
The invention according to claim 9 wherein said voltage is varied to drive said diaphragm with a pulsating effect to form discrete ink drops in the ink stream exiting said nozzle.
Claim 14
Dependent Claim
19 words
The invention according to claim 10 wherein said voltage is varied to drive said diaphragm at its resonant frequency.
Claim 15
Dependent Claim
38 words
The invention according to claim 9 comprising an end wall facing and spaced from said diaphragm and engaging the ends of said side walls to close said cavity, said end wall having an ink source entry port therethrough.
Claim 16
Dependent Claim
23 words
The invention according to claim 12 wherein said nozzle comprises a passage along the interface of said side wall and said end wall.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-05-27 | 1988-11-26 | 1989-05-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-05-27 | 1992-11-26 | 1993-05-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-05-27 | 1996-11-26 | 1997-05-28 | $7700.00 | Window Closed / Lapsed |