US4534049A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fluorescent X-ray film thickness gauge
Assignee: Seiko Instruments Inc
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Filing: 1983-08-10
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Granted: 1985-08-06
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Expires: 2003-08-10
Abstract
Abstract A fluorescent X-ray film thickness gauge comprises an X-ray tube for irradiating X-rays along an X-ray axis to a sample having a film coating whose thickness is to be measured, a detector for detecting fluorescent X-rays emitted from the sample, viewing means including a mirror for enabling an observer to view along the X-ray axis a target spot on the sample at which the X-ray beam is to be directed, and a collimator for collimating the X-rays into an X-ray beam and directing the X-ray beam along the X-ray axis to the target spot on the sample. In a preferred embodiment, the collimator and mirror are both mounted on a displaceable shutter member which is displaceable between a viewing position, in which the mirror is positioned along the X-ray axis to enable viewing of the target spot on the sample while the shutter member blocks the X-rays from irradiating the sample, and an irradiating position, in which the collimator is positioned along the X-ray axis to direct the X-ray beam to the target spot on the sample.
Inventors
- 👤 Toshiyuki Koga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:57
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/223; G01B; G01B15/00; G01B15/02; G01R; G01R31/00; G01R31/26; G01R31/265; G01N2223/00; G01N2223/07; G01N2223/076
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
129 words
In a fluorescent X-ray film thickness gauge having an X-ray tube for irradiating X-rays along an X-ray axis to a sample having a film whose thickness is to be measured, and a detector for detecting fluorescent X-rays emitted from the sample: viewing means for enabling an observer to view along the X-ray axis the spot on the sample at which the X-ray beam is to be directed, the viewing means including a mirror positionable along the X-ray axis at a predetermined position to enable viewing of the spot on the sample, the mirror being displaceable into and out of the predetermined position; and collimating means for collimating the X-rays into an X-ray beam and directing the X-ray beam along the X-ray axis to the said spot on the sample.
Claim 2
Dependent Claim
129 words
In a fluorescent X-ray film thickness gauge having an X-ray tube for irradiating X-rays along an X-ray axis to a sample having a film whose thickness is to be measured, and a detector for detecting fluorescent X-rays emitted from the sample: viewing means for enabling an observer to view along the X-ray axis the spot on the sample at which the X-ray beam is to be directed, the viewing means including a mirror positionable along the X-ray axis at a predetermined position to enable viewing of the spot on the sample, the mirror being displaceable into and out of the predetermined position; and collimating means for collimating the X-rays into an X-ray beam and directing the X-ray beam along the X-ray axis to the said spot on the sample.
Claim 3
Dependent Claim
31 words
A gauge according to claim 1 wherein the viewing means further includes a microscope coacting with the mirror to enable viewing of the spot on the sample on an enlarged scale.
Claim 4
Dependent Claim
79 words
A gauge according to claim 1 further including a displaceable shutter member having mounted thereon the collimating means; and actuating means for displacing the shutter member to an irradiating position in which the collimating means is positioned along the X-ray axis to enable the X-ray beam to be irradiated on the spot on the sample and for displacing the shutter member to a blocking position in which the shutter member blocks the transmission of X-rays along the X-ray axis.
Claim 5
Dependent Claim
91 words
A gauge according to claim 1; further comprising a displaceable shutter member having mounted thereon the collimating means and the mirror; and actuating means for displacing the shutter member to a viewing position in which the mirror is positioned in its predetermined position along the X-ray axis to enable viewing of the spot on the sample and for displacing the shutter member to an irradiating position in which the collimating means is positioned along the X-ray axis to enable the X-ray beam to be irradiated on the spot on the sample.
Claim 6
Dependent Claim
31 words
A gauge according to claim 4; wherein the shutter member includes means for blocking the transmission of X-rays along the X-ray axis when the shutter member is in the viewing position.
Claim 7
Dependent Claim
18 words
A gauge according to claim 5; wherein the shutter member, mirror and collimating means comprise an integral structure.
Claim 8
Dependent Claim
48 words
A gauge according to claim 6; wherein the shutter member has an elongate shape and has an upper portion facing toward the X-ray tube and a lower portion facing toward the sample, the mirror and collimating means both extending downwardly from the lower portion of the shutter member.
Claim 9
Dependent Claim
19 words
A gauge according to claim 7; wherein the upper portion of the shutter member has a substantially flat shape.
Claim 10
Dependent Claim
167 words
In a fluorescent X-ray film thickness gauge having an X-ray tube for irradiating X-rays along an X-ray axis to a sample having a film whose thickness is to be measured, and a detector for detecting fluorescent X-rays emitted from the sample: viewing means including a mirror for enabling an observer to view along the X-ray axis the spot on the sample at which the X-ray beam is to be directed; collimating means for collimating the X-rays into an X-ray beam and directing the X-ray beam along the X-ray axis to the said spot on the sample; and a displaceable shutter member having mounted thereon both the collimating means and the mirror and being displaceable to a viewing position in which the mirror is positioned along the X-ray axis to enable viewing of the spot on the sample and to an irradiating position in which the collimating means is positioned along the X-ray axis to enable the X-ray beam to be irradiated on the spot on the sample.
Claim 11
Dependent Claim
167 words
In a fluorescent X-ray film thickness gauge having an X-ray tube for irradiating X-rays along an X-ray axis to a sample having a film whose thickness is to be measured, and a detector for detecting fluorescent X-rays emitted from the sample: viewing means including a mirror for enabling an observer to view along the X-ray axis the spot on the sample at which the X-ray beam is to be directed; collimating means for collimating the X-rays into an X-ray beam and directing the X-ray beam along the X-ray axis to the said spot on the sample; and a displaceable shutter member having mounted thereon both the collimating means and the mirror and being displaceable to a viewing position in which the mirror is positioned along the X-ray axis to enable viewing of the spot on the sample and to an irradiating position in which the collimating means is positioned along the X-ray axis to enable the X-ray beam to be irradiated on the spot on the sample.
Claim 12
Dependent Claim
31 words
A gauge according to claim 9; wherein the shutter member includes means for blocking the transmission of X-rays along the X-ray axis when the shutter member is in the viewing position.
Claim 13
Dependent Claim
18 words
A gauge according to claim 9; wherein the shutter member, mirror, and collimating means comprise an integral structure.
Claim 14
Dependent Claim
49 words
A gauge according to claim 11; wherein the shutter member has an elongate shape and has an upper portion facing toward the X-ray tube and a lower portion facing toward the sample, the mirror, and the collimating means both extending downwardly from the lower portion of the shutter member.
Claim 15
Dependent Claim
30 words
A gauge according to claim 9; wherein the mirror and collimating means are mounted in spaced-apart relation on the shutter member in the direction of displacement of the shutter member.
Claim 16
Dependent Claim
60 words
A gauge according to claim 13, wherein the collimating means extends completely through the shutter member to permit the X-ray beam to pass therethrough when the shutter member is in the irradiating position; and the shutter member has means for blocking the transmission of the X-ray beam along the X-ray axis when the shutter member is in the viewing position.
References Cited (Backward Citations)
US2455928A
Cited
CH249401A
Cited
GB854762A
Cited
GB899291A
Cited
US2942113A
Cited
US3918793A
Cited
US3705305A
Cited
US3729632A
Cited
NL7705443A
Cited
US4162528A
Cited
US4195229A
Cited
US4178511A
Cited
US4178513A
Cited
GB2040037A
Cited
US4406015A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-08-05 | 1989-02-04 | 1989-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-08-05 | 1993-02-04 | 1993-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-08-05 | 1997-02-04 | 1997-08-06 | $7700.00 | Window Closed / Lapsed |