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US4540464A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of renewing defective copper conductors on the external planes of multilayer circuit boards

Assignee: International Business Machines Corp
•
Filing: 1984-04-30
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Granted: 1985-09-10
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Expires: 2004-04-30
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Abstract

Abstract After cleaning and removal of oxidic layers, the defective copper conductors are completely etched off the surface of the external planes of a multilayer circuit board, and the copper on the walls of the plated through holes is etched at an etching rate continuously decreasing toward the center of the hole walls. Subsequently, an activating layer of copper is applied on the surface of the substrate and on the adjacent parts of the surface of the hole walls. Copper conductors defined by a photoresist mask in a known manner, are deposited on the surface of the activating layer following the additive technique, the copper is deposited on the entire surface of the hole walls. As the maximum etching depth of the copper on the hole wall is approximately 0.2 mm maximum, and as the activating layer is applied up to a depth of approximately 1.2 mm a perfect copper overlap on the walls is ensured.

Inventors

  • 👤 Harald Mueller
  • 👤 Friedrich Schwerdt

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 12:30
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; H05K3/225; H05K3/02; H05K3/06; H05K3/10; H05K3/108; H05K3/18; H05K3/181; H05K3/40; H05K3/42; H05K3/425; H05K3/426; H05K3/429; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 133 words
A method of renewing defective copper conductors on the external plane of a multilayer circuit board, comprising the following process steps: (1) pre-processing of the multilayer circuit board by (a) cleaning, and rinsing; (b) removing oxidic layers from the copper to be etched, and rinsing; (2) etching off the defective copper conductors, and etching the copper on the wall of a through hole, with an etching rate continuously decreasing toward the center of the hole wall, and rinsing; (3) applying an activating layer of copper on the surface of the substrate, and on the adjacent parts of the wall of the through hole; and (4) depositing copper conductors on the surface regions of the activating layer defined by a photoresist mask and depositing copper on the entire surface of the through hole wall.
Claim 2
Independent Claim 133 words
A method of renewing defective copper conductors on the external plane of a multilayer circuit board, comprising the following process steps: (1) pre-processing of the multilayer circuit board by (a) cleaning, and rinsing; (b) removing oxidic layers from the copper to be etched, and rinsing; (2) etching off the defective copper conductors, and etching the copper on the wall of a through hole, with an etching rate continuously decreasing toward the center of the hole wall, and rinsing; (3) applying an activating layer of copper on the surface of the substrate, and on the adjacent parts of the wall of the through hole; and (4) depositing copper conductors on the surface regions of the activating layer defined by a photoresist mask and depositing copper on the entire surface of the through hole wall.
Claim 3
Dependent Claim 32 words
The method as claimed in claim 1, wherein the multilayer circuit board is cleaned for 2 minutes at approximately 65° C. with an alkaline solution of sodium-m-silicate comprising sodium laurylsulphate and diglycol.
Claim 4
Dependent Claim 25 words
The method as claimed in claim 1 wherein the copper oxide is removed from the copper to be etched with 25 volume percent hydrochloric acid.
Claim 5
Dependent Claim 30 words
The method as claimed in claim 1 wherein the defective conductors and the copper of the boring wall of the through hole are etched with a hydrochloric CuCl 2 solution.
Claim 6
Dependent Claim 37 words
The method as claimed in claim 1 wherein during etching, the multilayer circuit board is oscillated in a direction perpendicular to the axis of the through hole and air is bubbled through the bath from the bottom.
Claim 7
Dependent Claim 37 words
The method as claimed in claim 4 wherein during etching, the multilayer circuit board is oscillated in a direction perpendicular to the axis of the through hole and air is bubbled through the bath from the bottom.
Claim 8
Independent Claim 75 words
The method as claimed in any one of claims 1, 4, 5 and 6 wherein the multilayer circuit board to be etched is immersed in the hydrochloric etching bath in such a manner that the through hole is arranged orthogonal to the bath flow and to the direction of movement of the multilayer circuit board so that the copper etching rate in the through hole approaches zero toward the center of the through hole wall.
Claim 9
Independent Claim 26 words
The method as claimed in any one of claims 1 to 6 wherein the etching takes place with the hydrochloric CuCl 2 solution at room temperature.
Claim 10
Dependent Claim 21 words
The method as claimed in claim 7 wherein the etching takes place with the hydrochloric CuCl 2 solution at room temperature.
Claim 11
Dependent Claim 16 words
The method as claimed in claim 1 wherein flowing water is used in the rinsing steps.
Claim 12
Dependent Claim 33 words
The method as claimed in claim 1 wherein the activating layer is applied on the substrate and the surface of the wall of the through hole by magnetic field-supported high rate cathode sputtering.
Claim 13
Dependent Claim 30 words
The method as claimed in claim 11 wherein the activating layer is applied with a sputter rate of 1.0 to 1.5 nm/s up to a layer thickness of 500 nm.
Claim 14
Independent Claim 54 words
The method as claimed in any one of claims 1, 11 and 12 wherein the activating layer is applied fully automatically in a continuous system to both sides of the multilayer circuit board simultaneously through the use of two cathodes, one on the front and one on the back of the multilayer circuit board.
Claim 15
Independent Claim 30 words
The method as claimed in any one of claims 1, 11 and 12 wherein the wall of the through hole is copper coated to an aspect ratio of approximately 3:1.
Claim 16
Dependent Claim 24 words
The method as claimed in claim 13 wherein the wall of the through hole is copper coated to an aspect ratio of approximately 3:1.

References Cited (Backward Citations)

US3702284A Cited
US3717520A Cited
US3923567A Cited
US4418264A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-09-09 1989-03-11 1989-09-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-09-09 1993-03-11 1993-09-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-09-09 1997-03-11 1997-09-10 $7700.00 Window Closed / Lapsed

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