US4550014A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for production of free-standing polycrystalline boron phosphide film
Assignee: United States Department of Energy
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Filing: 1982-09-09
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Granted: 1985-10-29
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Expires: 2002-09-09
Abstract
Abstract A process for producing a free-standing polycrystalline boron phosphide film comprises growing a film of boron phosphide in a vertical growth apparatus on a metal substrate. The metal substrate has a coefficient of thermal expansion sufficiently different from that of boron phosphide that the film separates cleanly from the substrate upon cooling thereof, and the substrate is preferably titanium. The invention also comprises a free-standing polycrystalline boron phosphide film for use in electronic device fabrication.
Inventors
- 👤 Richard J. Baughman
- 👤 David S. Ginley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:36
CPC Classifications
C; C01; C01B; C01B25/00; C01B25/08; C01B25/082; C01B25/084; C23; C23C; C23C16/00; C23C16/01; C23C16/22; C23C16/30; H; H10; H10D; H10D62/00; H10D62/80; H10D62/85; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2923; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/36; Y; Y10; Y10S; Y10S117/00; Y10S117/915
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
148 words
A process for producing a free-standing boron phosphide film comprising the sequential steps of: (1) heating a metal substrate, selected from the group consisting of titanium, molybdenum, tantalum or tungsten, in a vertical growth apparatus to a temperature of about 650°-1050° C.; (2) flowing reactant gases over said metal substrate thereby growing a boron phosphide film thereon by chemical vapor deposition, the flow time being sufficient to grow a boron phosphide film of a predetermined thickness on said substrate; and (3) cooling said substrate and grown boron phosphide film to cause separation of said boron phosphide film from said substrate as a result of the difference in rate of contraction of said metal substrate with respect to said boron phosphide film thereby producing a free-standing crystalline boron phosphide film, said difference in rates of contraction on cooling being sufficient to cause separation of the substrate from the film.
Claim 2
Dependent Claim
148 words
A process for producing a free-standing boron phosphide film comprising the sequential steps of: (1) heating a metal substrate, selected from the group consisting of titanium, molybdenum, tantalum or tungsten, in a vertical growth apparatus to a temperature of about 650°-1050° C.; (2) flowing reactant gases over said metal substrate thereby growing a boron phosphide film thereon by chemical vapor deposition, the flow time being sufficient to grow a boron phosphide film of a predetermined thickness on said substrate; and (3) cooling said substrate and grown boron phosphide film to cause separation of said boron phosphide film from said substrate as a result of the difference in rate of contraction of said metal substrate with respect to said boron phosphide film thereby producing a free-standing crystalline boron phosphide film, said difference in rates of contraction on cooling being sufficient to cause separation of the substrate from the film.
Claim 3
Dependent Claim
61 words
A process according to claim 1 further comprising etching and cleaning said metal substrate prior to placing it in the vertical growth apparatus, and preheating said substrate after placing it in the vertical growth apparatus to a temperature higher than said growth temperature for a time sufficient to evaporate cleaning material impurities therefrom before lowering its temperature to the growth temperature.
Claim 4
Dependent Claim
27 words
A process according to claim 1 or 2 further comprising purging the vertical growth apparatus of all reactant gas before commencing cooling of said substrate and film.
Claim 5
Dependent Claim
13 words
A process according to claim 1, wherein said substrate is a titanium substrate.
Claim 6
Dependent Claim
33 words
A process according to claim 1, wherein said etching and cleaning comprises etching with an HF/HNO 3 /H 2 O solution for about 30 seconds, and subsequently cleaning with hot absolute methyl alcohol.
Claim 7
Dependent Claim
13 words
A process according to claim 1, wherein said temperature is about 950° C.
Claim 8
Dependent Claim
45 words
A process according to claim 6, wherein said flowing reactant gases step comprises flowing a mixture of B 2 H 6 in H 2 carrier gas by weight and a mixture of PH 3 in H 2 carrier gas by weight onto the titanium substrate.
Claim 9
Dependent Claim
33 words
A process according to claim 7, wherein the gas flow rate of B 2 H 6 is 80 standard cc/min, and the gas flow rate of the PH 3 is 40 standard cc/min.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-10-28 | 1989-04-29 | 1989-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-10-28 | 1993-04-29 | 1993-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-10-28 | 1997-04-29 | 1997-10-29 | $7700.00 | Window Closed / Lapsed |