US4551418A
Expired / Lapsed
US
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Process for preparing negative relief images with cationic photopolymerization
Assignee: International Business Machines Corp
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Filing: 1985-02-19
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Granted: 1985-11-05
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Expires: 2005-02-19
Abstract
Abstract Negative relief images are generated by a process comprising the use of cationic polymerization and plasma etching.
Inventors
- 👤 Anders Hult
- 👤 Hiroshi Ito
- 👤 Scott A. MacDonald
- 👤 Carlton G. Willson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 01:06
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/265
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
77 words
A process for generating a negative tone resist image comprising the steps of: (1) coating a substrate with a film that contains a cationic photoinitiator; (2) exposing the film in an imagewise fashion to radiation and thereby generating cationic initiator in the exposed regions of the film; (3) treating the exposed film with a cationicsensitive monomer to form a film of polymer resistant to plasma etching; and (4) developing the resist image by etching with a plasma.
Claim 2
Dependent Claim
77 words
A process for generating a negative tone resist image comprising the steps of: (1) coating a substrate with a film that contains a cationic photoinitiator; (2) exposing the film in an imagewise fashion to radiation and thereby generating cationic initiator in the exposed regions of the film; (3) treating the exposed film with a cationicsensitive monomer to form a film of polymer resistant to plasma etching; and (4) developing the resist image by etching with a plasma.
Claim 3
Dependent Claim
15 words
A process as claimed in claim 1 wherein the cationic photoinitiator is applied from solution.
Claim 4
Dependent Claim
17 words
A process as claimed in claim 1 wherein the cationic photoinitiator is applied by an evaporative technique.
Claim 5
Dependent Claim
17 words
A process as claimed in claim 1 wherein the cationic photoinitiator is dispersed within a carrier polymer.
Claim 6
Dependent Claim
13 words
A process as claimed in claim 4 where the carrier polymer is poly(p-methoxystyrene).
Claim 7
Dependent Claim
15 words
A process as claimed in claim 1 where the cationic photoinitiator is a triarylsulfonium salt.
Claim 8
Dependent Claim
14 words
A process as claimed in claim 1 where the cationic photoinitiator is a trihalomethyltriazine.
Claim 9
Dependent Claim
17 words
A process as claimed in claim 1 wherein the monomer is an epoxy substituted siloxane or silane.
Claim 10
Dependent Claim
15 words
A process as claimed in claim 1 wherein the monomer is a styrene silyl ether.
Claim 11
Dependent Claim
16 words
A process as claimed in claim 1 wherein the monomer is a silyl substituted vinyl ether.
Claim 12
Dependent Claim
15 words
A process as claimed in claim 1 where the monomer is dissolved in a solvent.
Claim 13
Dependent Claim
15 words
A process as claimed in claim 1 wherein the monomer is in the vapor state.
Claim 14
Dependent Claim
12 words
A process as claimed in claim 1 where the substrate is silicon.
Claim 15
Dependent Claim
14 words
A process as claimed in claim 1 wherein the substrate is a planarizing polymer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-11-04 | 1989-05-06 | 1989-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-11-04 | 1993-05-06 | 1993-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-11-04 | 1997-05-06 | 1997-11-05 | $7700.00 | Window Closed / Lapsed |