US4556897A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Titanium coated aluminum leads
Assignee: NEC Electronics Corp
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Filing: 1983-02-07
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Granted: 1985-12-03
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Expires: 2003-02-07
Abstract
Abstract A semiconductor device has a semiconductor substrate with a first insulating layer formed thereon. A first wiring includes a layer extending over the first insulating layer and a metallic film of refractory metal having high melting point disposed on the wiring layer. A contact hole is formed in the second insulating layer. Then, a second wiring, having the same material as the first wiring layer, is provided as an upper layer. The metallic film is removed inside the contact hole and the second wiring layer is directly connected to the first wiring layer. Aluminum, silicon, aluminum-silicon alloy, copper-aluminum alloy and the like can be used for the first and second wiring layers. The metallic film may be made of titanium, titanium nitride, molybdenum, tungsten, platinum, chromium or may be a composite film or alloy film of these metals. Further, alloys of above-mentioned high melting point materials may be used. The metallic film has the thickness of about 300 to 3,000 Å and preferably, 500 to 1,500 Å. Each of the wiring layers has a thickness of about 0.3 to 2.5 μm, and preferably, 0.8 to 1.8 μm.
Inventors
- 👤 Masaharu Yorikane
- 👤 Noboru Ohseki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:36
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
153 words
A semiconductor device comprising a semiconductor substrate, a silicon oxide film formed on a major surface of said substrate and having a first aperture reaching a part of said substrate, a first wiring comprising a first aluminum layer formed on said silicon oxide film and connected through said first aperture to said part of said substrate and a titanium film provided on an upper surface of said first aluminum layer except on a contact portion of said first aluminum layer, said titanium film being also provided on a side surface of said first aluminum layer, a silicon nitride film covering said first wiring and having a second aperture reaching said first aluminum layer and exposing said contact portion of first aluminum layer, and a second wiring of a second aluminum layer provided on said silicon nitride film and connected directly to said contact portion of said first aluminum layer of said first wiring.
Claim 2
Dependent Claim
153 words
A semiconductor device comprising a semiconductor substrate, a silicon oxide film formed on a major surface of said substrate and having a first aperture reaching a part of said substrate, a first wiring comprising a first aluminum layer formed on said silicon oxide film and connected through said first aperture to said part of said substrate and a titanium film provided on an upper surface of said first aluminum layer except on a contact portion of said first aluminum layer, said titanium film being also provided on a side surface of said first aluminum layer, a silicon nitride film covering said first wiring and having a second aperture reaching said first aluminum layer and exposing said contact portion of first aluminum layer, and a second wiring of a second aluminum layer provided on said silicon nitride film and connected directly to said contact portion of said first aluminum layer of said first wiring.
Claim 3
Dependent Claim
150 words
A semiconductor device comprising a semiconductor substrate, a silicon oxide film formed on a major surface of said substrate and having a first aperture reaching a part of said substrate, a first aluminum layer provided on said silicon oxide film and being connected through said first aperture to said part of said substrate, a silicon nitride film covering said first aluminum layer with a second aperture reaching a contact portion of said first aluminum layer, a second aluminum layer provided on said silicon nitride film and being directly connected through said second aperture to said first aluminum layer, a first titanium film disposed between substantially the entire upper surface of said first aluminum layer and said silicon nitride film except at said second aperture, and a second titanium film disposed between substantially the entire lower surface of said second aluminum layer and said silicon nitride film except said second aperture.
Claim 4
Dependent Claim
150 words
A semiconductor device comprising a semiconductor substrate, a silicon oxide film formed on a major surface of said substrate and having a first aperture reaching a part of said substrate, a first aluminum layer provided on said silicon oxide film and being connected through said first aperture to said part of said substrate, a silicon nitride film covering said first aluminum layer with a second aperture reaching a contact portion of said first aluminum layer, a second aluminum layer provided on said silicon nitride film and being directly connected through said second aperture to said first aluminum layer, a first titanium film disposed between substantially the entire upper surface of said first aluminum layer and said silicon nitride film except at said second aperture, and a second titanium film disposed between substantially the entire lower surface of said second aluminum layer and said silicon nitride film except said second aperture.
References Cited (Backward Citations)
US3668484A
Cited
US3751292A
Cited
US3936865A
Cited
US4164461A
Cited
US4289834A
Cited
US4352239A
Cited
US4398335A
Cited
US4386116A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-02 | 1989-06-03 | 1989-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-02 | 1993-06-03 | 1993-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-02 | 1997-06-03 | 1997-12-03 | $7700.00 | Window Closed / Lapsed |