US4579616A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabrication of an optically flat membrane
Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1983-11-14
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Granted: 1986-04-01
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Expires: 2003-11-14
Abstract
Abstract A method for tensioning a thin film on a support ring to achieve an optically flat membrane. The support ring is optically flat with a slight bevel at its outside edge where the membrane is epoxied to the support ring.
Inventors
- 👤 Henry Windischmann
- 👤 W. D. Buckley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 18:55
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168; Y10T; Y10T156/00; Y10T156/10; Y10T156/1052; Y10T156/108; Y10T156/1089; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24959
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
153 words
A method for fabricating an optically flat x-ray mask, comprising the steps of: forming a thin membrane fixed to a transfer ring; forming an annular support ring having an optically flat top and a beveled outer edge extending radially from said optically flat top; applying an epoxy to said beveled outer edge only, leaving said optically flat top devoid of epoxy; placing said thin membrane fixed to said transfer ring on said optically flat top substantially concentric with said optically flat top; applying an annular weight to the outer periphery of said thin membrane around said transfer ring to stretch said thin membrane tautly over said optically flat top and to place said thin membrane adhesively in contact with said epoxy; permitting the epoxy to cure thereby securing said thin membrane to said support ring in an optically flat condition; removing the excess portion of said thin membrane from around said support ring.
Claim 2
Independent Claim
153 words
A method for fabricating an optically flat x-ray mask, comprising the steps of: forming a thin membrane fixed to a transfer ring; forming an annular support ring having an optically flat top and a beveled outer edge extending radially from said optically flat top; applying an epoxy to said beveled outer edge only, leaving said optically flat top devoid of epoxy; placing said thin membrane fixed to said transfer ring on said optically flat top substantially concentric with said optically flat top; applying an annular weight to the outer periphery of said thin membrane around said transfer ring to stretch said thin membrane tautly over said optically flat top and to place said thin membrane adhesively in contact with said epoxy; permitting the epoxy to cure thereby securing said thin membrane to said support ring in an optically flat condition; removing the excess portion of said thin membrane from around said support ring.
Claim 3
Dependent Claim
22 words
A method according to claim 1 wherein, said inner surface is polished to a flatness less than one quarter of a wavelength.
Claim 4
Dependent Claim
24 words
A method according to claim 2 wherein, said membrane is tensioned to a flatness of less than one half a wavelength over its diameter.
Claim 5
Dependent Claim
13 words
A method according to claim 3 wherein, said membrane is made of titanium.
Claim 6
Dependent Claim
13 words
A method according to claim 3 wherein, said membrane is made of SiC.
Claim 7
Dependent Claim
13 words
A method according to claim 3 wherein, said membrane is made of polymide.
Claim 8
Dependent Claim
15 words
A method according to claim 3 wherein, said membrane is made of poly methyl methacrylate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-31 | 1989-09-30 | 1990-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-31 | 1993-09-30 | 1994-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-31 | 1997-09-30 | 1998-04-01 | $7700.00 | Window Closed / Lapsed |