Arrangement for testing micro interconnections and a method for operating the same

Claim 1

An arrangement for electrically testing micro-interconnections having a predetermined geometric arrangement, comprising: a test member including a surface and a planar contact structure comprising a plurality of test contacts carried at said surface for electrically contacting respective points of the microinterconnections, said test contacts arranged in said predetermined geometrical arrangement; a plurality of selectively operable switch means embedded in said member and each connected to a respective test contact, selective operation of a pair of said switch means defining an electrical path to be tested; conductors embedded in said member for carrying test voltages for said test contacts and connected to said plurality of switches; and a series circuit including a d.c. voltage source and a current measuring device connected in series with said plurality of switch means to provide and measure current flow through a selectively defined current path.

Claim 14

A method of operating an arrangement for electrically testing a plurality of paths between spaced test points, arranged in a matrix of orthogonal directions, of a microinterconnection, the arrangement comprising a test member including a surface, a plurality of test contacts at the surface spaced in a matrix and in accordance with the spacing of the test points, supply means including first and second terminals and a voltage source and a current detector connected between the first and second terminals, a pair of test current conductors embedded in the test member and connected, respectively, to the first and second terminals, a plurality of first switches arranged in the matrix adjacent and connected to the test contacts and selectively operable to define a plurality of possible series circuits in one orthogonal direction each including a test path and each extending between the test current conductors, and a plurality of selectively operable second switches embedded in the test member adjacent the ends of the series circuits and the test current conductors, said method comprising the steps of: applying the test member to the microinterconnection to engage the test contacts in the same plane and the test points; selectively operating the first switches to define a series circuit including a test path; and selectively operating the second switches at the ends of the defined series circuit to apply voltage thereto and detect the current flow therethrough.

Claim 15

A method of operating an arrangement for electrically testing a plurality of paths between spaced test points, arranged in a matrix of orthogonal directions, of a microinterconnection, the arrangement comprising a test member including a surface, a plurality of test contacts at the surface spaced in a matrix and in accordance with the spacing of the test points, supply means including first and second terminals and a voltage source and a current detector connected between the first and second terminals, a pair of test current conductors embedded in the test member and connected, respectively, to the first and second terminals, a plurality of first switches arranged in the matrix adjacent and connected to the test contacts and selectively operable to define a plurality of possible series circuits in one orthogonal direction each including a test path and each extending between the test current conductors, and a plurality of selectively operable second switches embedded in the test member adjacent the ends of the series circuits and the test current conductors, said method comprising the steps of: applying the test member to the microinterconnection to engage the test contacts in the same plane and the test points; selectively operating the first switches to define a series circuit including a test path; and selectively operating the second switches at the ends of the defined series circuit to apply voltage thereto and detect the current flow therethrough.