US4590042A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma reactor having slotted manifold
Assignee: Motorola Solutions Inc
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Filing: 1984-12-24
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Granted: 1986-05-20
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Expires: 2004-12-24
Abstract
Abstract A plasma reactor apparatus is disclosed in which plates having channels are used to redistribute gas uniformly over the surface of a wafer being processed in the reactor. Slot means adjacent the plates provide a final baffle to prevent jetstreams in the gas from impinging directly on the wafer.
Inventors
- 👤 David J. Drage
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:09
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
63 words
A plasma reactor comprising: a gas manifold plate having a first slot for supplying gas and a second slot for exhausting gas; a distribution plate having a plurality of gas supply slots and a plurality of gas exhaust slots, said plates being in contact with each other with the slots of one plate not being parallel to the slots in the other plate.
Claim 2
Dependent Claim
63 words
A plasma reactor comprising: a gas manifold plate having a first slot for supplying gas and a second slot for exhausting gas; a distribution plate having a plurality of gas supply slots and a plurality of gas exhaust slots, said plates being in contact with each other with the slots of one plate not being parallel to the slots in the other plate.
Claim 3
Dependent Claim
49 words
The apparatus as set forth in claim 1 wherein said plates each have first and second major surfaces, said slots are formed in the first major surface of each plate, and the first major surface of said gas manifold plate faces the second major surface of said distribution plate.
Claim 4
Dependent Claim
23 words
The apparatus as set forth in claim 2 wherein the slots of one plate are orthogonal to the slots of the other plate.
Claim 5
Dependent Claim
31 words
The apparatus as set forth in claim 3 wherein said distribution plate comprises a plurality of bores from one major surface to the other for interconnecting respective slots of the plates.
Claim 6
Dependent Claim
22 words
The apparatus as set forth in claim 2 wherein said distribution plate comprises slot means attached to the first major surface thereof.
Claim 7
Dependent Claim
32 words
The apparatus as set forth in claim 5 wherein said slot means at least partially overlies the slots in said distribution plate for re-directing the flow of gas from said distribution plate.
Claim 8
Dependent Claim
26 words
The apparatus as set forth in claim 6 wherein said slot means comprises the same number of slots as there are slots in said distribution plate.
Claim 9
Dependent Claim
24 words
The apparatus as set forth in claim 7 wherein the slots in said slot means are narrower than the slots in said distribution plate.
Claim 10
Dependent Claim
21 words
The apparatus as set forth in claim 2 wherein the slots in said distribution plate comprises interleaved supply and exhaust channels.
Claim 11
Dependent Claim
33 words
The apparatus as set forth in claim 1 wherein there are an odd number of slots in said distribution plate and the number of exhaust slots exceeds the number of gas supply slots.
Claim 12
Dependent Claim
87 words
A plasma reactor comprising: a gas manifold plate having first and second major surfaces and a slot formed in said first major surface for supplying gas to a plurality of locations across said first major surface; a distribution plate having first and second major and a plurality of bores extending through said plate from one major surface to the other; said plates being in contact with each said bores with said locations; and slot means on said distribution plate for deflecting the gas streams from said bores.
Claim 13
Dependent Claim
87 words
A plasma reactor comprising: a gas manifold plate having first and second major surfaces and a slot formed in said first major surface for supplying gas to a plurality of locations across said first major surface; a distribution plate having first and second major and a plurality of bores extending through said plate from one major surface to the other; said plates being in contact with each said bores with said locations; and slot means on said distribution plate for deflecting the gas streams from said bores.
Claim 14
Dependent Claim
27 words
The apparatus as set forth in claim 11 wherein said slot means comprises: a plurality of slots located in offset relationship the bores in said distribution plate.
Claim 15
Dependent Claim
21 words
The apparatus as set forth in claim 12 wherein said plurality of slots in said slot means comprises straight line segments.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-05-19 | 1989-11-18 | 1990-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-05-19 | 1993-11-18 | 1994-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-05-19 | 1997-11-18 | 1998-05-20 | $7700.00 | Window Closed / Lapsed |