US4592924A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a reaction vessel for crystal growth purposes
Assignee: US Philips Corp
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Filing: 1984-08-22
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Granted: 1986-06-03
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Expires: 2004-08-22
Abstract
Abstract In order to prevent impurities, in particular a chlorine impurity, present in the wall of the vessel from diffusing into the interior of the vessel and there disturb the growth process of the crystal, a hollow member, in particular a tube (1), of quartz is provided on its inside with a coating of silicon dioxide, while argon, gaseous silane and a gaseous oxidant, for example, dinitrogen oxide and/or carbon dioxide are introduced into the hollow member heated at 250° to 350° C. and are converted by means of a microwave resonator (2) into a porous coating of silicon dioxide at a pressure between 20 and 30 mbar, which coating is sintered to form a coating which is preferably at least 50 μm thick.
Inventors
- 👤 Paul D. Kuppers
- 👤 Karl H. Schelhas
- 👤 Cornelis H. J. van den Brekel
- 👤 Giok D. Khoe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 01:35
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/001; C03C17/003; C03C17/004; C30; C30B; C30B35/00; C30B35/002; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/213
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
81 words
A method of manufacturing a reaction vessel for crystal growing by providing a coating of silicon dioxide on the inside of a hollow member of quartz, characterized in that a mixture of argon, chlorine-free gaseous silane and a gaseous oxidant is introduced into the hollow member heated at 250° to 350° C. and is converted by means of a microwave resonator into a porous coating of siicon dioxide at a pressure between 20 and 30 mbar, which coating is then sintered.
Claim 2
Independent Claim
81 words
A method of manufacturing a reaction vessel for crystal growing by providing a coating of silicon dioxide on the inside of a hollow member of quartz, characterized in that a mixture of argon, chlorine-free gaseous silane and a gaseous oxidant is introduced into the hollow member heated at 250° to 350° C. and is converted by means of a microwave resonator into a porous coating of siicon dioxide at a pressure between 20 and 30 mbar, which coating is then sintered.
Claim 3
Dependent Claim
24 words
A method as claimed in claim 1, characterized in that dinitrogen oxide and/or carbon dioxide are introduced into the hollow member as gaseous oxidants.
Claim 4
Dependent Claim
26 words
A method as claimed in claim 1, characterized in that the conversion is continued until the sintered coating has a thickness of at least 50 μm.
Claim 5
Dependent Claim
27 words
A method as claimed in claim 2 characterized in that the conversion is continued until the sintered coating has a thickness of at least 50 μl m.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-06-02 | 1989-12-02 | 1990-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-06-02 | 1993-12-02 | 1994-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-06-02 | 1997-12-02 | 1998-06-03 | $7700.00 | Window Closed / Lapsed |