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US4596759A Expired / Lapsed US ⏱️ 0.0 years remaining

Dry film resist containing two or more photosensitive strata

Assignee: BASF SE
•
Filing: 1984-11-07
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Granted: 1986-06-24
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Expires: 2004-11-07
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Abstract

Abstract In the production of imagewise structured resist layers, for example for the manufacture of printed circuits, electronic components, soldering masks, etc., by application, onto a substrate, of a positive-working resist layer (R) which can be rendered soluble by exposure to actinic light, imagewise exposure of the resist layer (R) to actinic light and removal of the exposed parts of the layer by washing out with a developer, the photosensitive resist layer (R) used, in particular in the form of a dry film resist, consists of two or more strata (S) which posses different basic solubilities, at least the upper stratum (U) being photosensitive and the lower stratum (LS) having a higher basic solubility in the developer than has the upper stratum (U).

Inventors

  • 👤 Hans Schupp
  • 👤 Albert Elzer

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 00:28
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/095; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/30; H05K3/32; H05K3/34; H05K3/3452

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 242 words
A dry film resist, in particular for use for the production of imagewise structured etch resists or plating resists or imagewise structured permanent protective and insulating layers, comprising a dimensionally stable temporary base (T) and, applied on this, a solid positive-working resist layer (R) which can be rendered soluble by exposure to actinic light and which consists of two or more strata (S) which have different basic solubilities, wherein the stratum (U) adjacent to the temporary base (T) consists of a photosensitive material which, by exposure to actinic light, is rendered soluble or dispersible in a solvent in which it was previously insoluble, and that stratum (LS) of the photosensitive resist layer (R) which is not bonded to the temporary base (T) has a higher basic solubility in the developer used for washing out the exposed resist layer (R) than has the stratum (U), and can be laminated with a substrate to be permanently modified or protected, lamination being effected with the use of pressure and, if necessary, heat, to produce good adhesion to the substrate different basic solubility are photosensitive containing, as photosensitive component, a compound which possesses two or more aromatic and/or heteroaromatic o-nitrocarbinol ester groups of the general formula ##STR3## where A is a radical of an unsubstituted or substituted aromatic or heteroaromatic ring system possessing 5 to 14 ring members, and X is hydrogen, alkyl of 1 to 8 carbon atoms or unsubstituted or substituted aryl or aralkyl.
Claim 2
Dependent Claim 242 words
A dry film resist, in particular for use for the production of imagewise structured etch resists or plating resists or imagewise structured permanent protective and insulating layers, comprising a dimensionally stable temporary base (T) and, applied on this, a solid positive-working resist layer (R) which can be rendered soluble by exposure to actinic light and which consists of two or more strata (S) which have different basic solubilities, wherein the stratum (U) adjacent to the temporary base (T) consists of a photosensitive material which, by exposure to actinic light, is rendered soluble or dispersible in a solvent in which it was previously insoluble, and that stratum (LS) of the photosensitive resist layer (R) which is not bonded to the temporary base (T) has a higher basic solubility in the developer used for washing out the exposed resist layer (R) than has the stratum (U), and can be laminated with a substrate to be permanently modified or protected, lamination being effected with the use of pressure and, if necessary, heat, to produce good adhesion to the substrate different basic solubility are photosensitive containing, as photosensitive component, a compound which possesses two or more aromatic and/or heteroaromatic o-nitrocarbinol ester groups of the general formula ##STR3## where A is a radical of an unsubstituted or substituted aromatic or heteroaromatic ring system possessing 5 to 14 ring members, and X is hydrogen, alkyl of 1 to 8 carbon atoms or unsubstituted or substituted aryl or aralkyl.
Claim 3
Dependent Claim 42 words
A dry film resist according to claim 1, wherein the stratum (LS) of the photosensitive resist layer (R) also consists of a positive-working photosensitive material which, after exposure to actinic light, is soluble in the same developer which dissolves the stratum (U).
Claim 4
Dependent Claim 25 words
A dry film resist according to claim 1, wherein the strata (U) and (LS) of the photosensitive resist layer (R) have substantially the same composition.
Claim 5
Dependent Claim 29 words
A dry film resist according to claim 1, wherein the ratio of the thickness of the stratum (U) to that of the stratum (LS) is from 1:10 to 10:1.
Claim 6
Dependent Claim 29 words
A dry film resist according to claim 1, wherein the ratio of the thickness of the stratum (U) to that of the stratum (LS) is from 1:5 to 2:1.
Claim 7
Dependent Claim 42 words
A dry film resist according to claim 1, wherein a cover sheet (C) is also applied on the photosensitive resist layer (R), which cover sheet can be peeled off from the said layer (R) without simultaneous removal of the temporary base (T).
Claim 8
Dependent Claim 50 words
A dry film resist according to claim 1 wherein the photosensitive component comprises a polymer which has a molecular weight higher than 500 and contains less than 5% by weight, based on the molecular weight of the polymer, of aromatic and/or heteroaromatic o-nitrocarbinol ester groups of the general formula (I).
Claim 9
Dependent Claim 22 words
A dry film resist according to claim 7 wherein said aromatic or heteroaromatic ring system A comprises mononuclear or polynuclear ring system.
Claim 10
Dependent Claim 55 words
A dry film resist according to claim 8 wherein said aromatic ring system comprises benzene which may be monosubstituted or polysubstituted by C 1 -C 8 -alkyl, in particular methyl, by C 1 -C 6 -alkoxy, in particular methoxy, by halogen, such as chlorine or bromine, or by nitro, amino, monomethylamino, dimethylamino, nitrile or sulfo.
Claim 11
Dependent Claim 24 words
A dry film resist according to claim 8 wherein said polynuclear aromatic ring systems comprise naphthalene, anthracene, anthraquinone, phenanthrene and the corresponding substituted derivatives.
Claim 12
Dependent Claim 17 words
A dry film resist according to claim 10 wherein said heteroaromatic ring system comprises the pyridine radical.
Claim 13
Dependent Claim 40 words
A dry film resist according to claim 1 wherein said aromatic or heteroaromatic o-nitrocarbinol ester groups of the general formula (I) are derived from o-nitrobenzyl alcohol, 2-nitro-6-chlorobenzyl alcohol, 2-nitro-4-cyanobenzyl alcohol, 2-nitro-4,5-dimethoxybenzyl alcohol, α-methyl-o-nitrobenzyl alcohol, α-phenyl-o-nitrobenzyl alochol, α-(o-nitrophenyl)-o-nitrobenzyl alcohol and 2-nitro-3-hydroxymethylpyridine.
Claim 14
Dependent Claim 34 words
A dry film resist according to claim 1 wherein compounds possessing the aromatic and/or heteroaromatic o-nitrocarbinol ester groups are low molecular weight esters having two or more ester groups of the general formula (I).
Claim 15
Dependent Claim 33 words
A dry film resist according to claim 13 wherein said low molecular weight esters comprise the di- and/or polyesters of low molecular weight di- and/or polycarboxylic acids with said aromatic and/or heteroaromatic o-nitrocarbinols.
Claim 16
Dependent Claim 32 words
A dry film resist according to claim 14 wherein the photosensitive material for the upper stratum (U) of resist layers (R) also contains a polymeric binder which is compatible with said esters.
Claim 17
Dependent Claim 17 words
A dry film resist according to claim 15 wherein said polymeric binder comprises acrylate and/or methacrylate polymers.
Claim 18
Dependent Claim 26 words
A dry film resist according to claim 15 wherein said polymeric binder comprises high molecular weight compounds possessing functional groups which undergo crosslinking with carboxyl groups.
Claim 19
Dependent Claim 16 words
A dry film resist according to claim 17 wherein said high molecular weight compounds comprises polyeporides.
Claim 20
Dependent Claim 22 words
A dry film resist according to claim 7 wherein said polymer has a mean number average molecular weight of 10,000 to 100,000.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-06-23 1989-12-23 1990-06-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-06-23 1993-12-23 1994-06-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-06-23 1997-12-23 1998-06-24 $7700.00 Window Closed / Lapsed

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