US4608268A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for making a mask used in x-ray photolithography
Assignee: Micronix Corp
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Filing: 1985-07-23
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Granted: 1986-08-26
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Expires: 2005-07-23
Abstract
Abstract A method of manufacturing a mask for use in x-ray photolithography includes the steps of coating a set of wafers (20) with boron nitride (22). The tension in the boron nitride is measured by using a capacitive probe (26) to measure bowing in a set of test wafers. The remaining wafers are attached to a pyrex ring (28), and the boron nitride is removed from one side of the wafers. A circular hole is then eteched in the wafer, and a layer of tantalum (32) and gold (34) are formed on the remaining boron nitride membrane. The gold (34) is patterned via a sputter etching process. Power is reduced at the end of the sputter etching process slowly to reduce mechanical stress in the mask. The tantalum (32) is then etched via a reactive ion etching process. In this way, an x-ray transparent boron nitride membrane is used to support x-ray opaque gold.
Inventors
- 👤 Alexander R. Shimkunas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 09:03
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
138 words
A method for measuring the displacement of a wafer due to bowing from a reference plane comprising the steps of: providing a wafer having a first side and a second side; coating said first side and said second side with a substance; placing said coated wafer on a support, said wafer being in proximity to a capacitive probe, the distance between said capacitive probe and said coated wafer being determined in response to the capacitance measured by said capacitive probe; removing said substance from said first side of said wafer; and placing said wafer on said support, said capacitive probe being used to determine the distance between said capacitive probe and said wafer, the difference in distance between said capacitive probe and said wafer before and after said step of removing said substance representing displacement due to bowing.
Claim 2
Independent Claim
138 words
A method for measuring the displacement of a wafer due to bowing from a reference plane comprising the steps of: providing a wafer having a first side and a second side; coating said first side and said second side with a substance; placing said coated wafer on a support, said wafer being in proximity to a capacitive probe, the distance between said capacitive probe and said coated wafer being determined in response to the capacitance measured by said capacitive probe; removing said substance from said first side of said wafer; and placing said wafer on said support, said capacitive probe being used to determine the distance between said capacitive probe and said wafer, the difference in distance between said capacitive probe and said wafer before and after said step of removing said substance representing displacement due to bowing.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said wafer is silicon and said substance is boron nitride.
Claim 4
Dependent Claim
77 words
The method of claim 2 wherein a plurality of wafers are coated with boron nitride along with said wafer, said plurality of wafers being annealed for a period of time, said period of time being selected in response to the difference in distance between said measuring means and said wafer before and after said boron nitride is removed from said first side, so that the boron nitride in said plurality of wafers reaches a desired tensile stress.
Claim 5
Dependent Claim
134 words
A process for determining the displacement of a wafer due to bowing from a reference plane comprising the steps of: placing an unbowed wafer in proximity to a capacitive probe, the distance between said capacitive probe and said wafer being determined in response to the capacitance measured by said capacitive probe; forming a layer of material on one side of said wafer, the wafer bowing in response to said layer of material; placing said wafer and said layer of material in proximity to said capacitive probe, the distance between said probe and said wafer being determined in response to the capacitance measured by said capacitive probe, the difference in the distance between said capacitive probe and said wafer when said wafer is bowed and when said wafer is unbowed representing displacement due to bowing.
Claim 6
Dependent Claim
134 words
A process for determining the displacement of a wafer due to bowing from a reference plane comprising the steps of: placing an unbowed wafer in proximity to a capacitive probe, the distance between said capacitive probe and said wafer being determined in response to the capacitance measured by said capacitive probe; forming a layer of material on one side of said wafer, the wafer bowing in response to said layer of material; placing said wafer and said layer of material in proximity to said capacitive probe, the distance between said probe and said wafer being determined in response to the capacitance measured by said capacitive probe, the difference in the distance between said capacitive probe and said wafer when said wafer is bowed and when said wafer is unbowed representing displacement due to bowing.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-25 | 1990-02-24 | 1990-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-25 | 1994-02-24 | 1994-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-25 | 1998-02-24 | 1998-08-26 | $7700.00 | Window Closed / Lapsed |