US4621242A
Expired / Lapsed
US
⏱️ 0.0 years remaining
R.F. impedance match control system
Assignee: Lam Research Corp
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Filing: 1984-03-19
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Granted: 1986-11-04
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Expires: 2004-03-19
Abstract
Abstract An R.F. impedance match control system. The reflection coefficient of the system is compared to a threshold to determine a mismatch condition which is corrected by selectively changing in incremental steps the turns ratio of an autotransformer provided at the input to the load until the mismatch condition is corrected. Timing means are provided to delay each mismatch correction until initial transient conditions are stabilized and to shut off R.F. power during each turns ratio change.
Inventors
- 👤 C. Earle Theall, Jr.
- 👤 Hans G. Ludwig
- 👤 Michael J. Gustin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:09
CPC Classifications
H; H03; H03H; H03H11/00; H03H11/02; H03H11/28; H03H11/30
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
294 words
In a system for supplying R.F. power to a load, an automatic impedance matching system comprising; R.F. power source means; bidirectional coupler means connecting said R.F. power source means to the load, said bidirectional coupler means also providing separate output voltages proportional to incident and reflected power, respectively; autotransformer means connected between the load and said bidirectional coupler means; divider means connected to said bidirectional coupler means for receiving said output voltages proportional to incident and reflected power and providing an output voltage proportional to the reflection coefficient; a source of threshold voltage; comparator means connected to receive the outputs of said divider means and said source of threshold voltage and providing an output voltage indicative of a mismatch when said voltage proportional to the reflection coefficient is greater than said threshold voltage; first flip-flop means connected to said comparator means and providing output pulses each having a positive edge and a negative edge in response to said output voltage from said comparator means indicative of a mismatch, a search counter having a binary output, first switch means having a first position connecting said first flip-flop means to an input to said search counter for applying said pulses from said first flip-flop means to change the count of said search counter by one on each occurrence of a pulse from said first flip-flop means; second switch means coupling said autotransformer means to said bidirectional coupler means; solenoid means coupled to said second switch means; circuit means connected between said search counter means and said solenoid means energizing said solenoid means to actuate said second switch means for changing the turns ratio of said autotransformer means when the count in said search counter is changed on occurrence of a pulse from said first flip-flop means.
Claim 2
Dependent Claim
294 words
In a system for supplying R.F. power to a load, an automatic impedance matching system comprising; R.F. power source means; bidirectional coupler means connecting said R.F. power source means to the load, said bidirectional coupler means also providing separate output voltages proportional to incident and reflected power, respectively; autotransformer means connected between the load and said bidirectional coupler means; divider means connected to said bidirectional coupler means for receiving said output voltages proportional to incident and reflected power and providing an output voltage proportional to the reflection coefficient; a source of threshold voltage; comparator means connected to receive the outputs of said divider means and said source of threshold voltage and providing an output voltage indicative of a mismatch when said voltage proportional to the reflection coefficient is greater than said threshold voltage; first flip-flop means connected to said comparator means and providing output pulses each having a positive edge and a negative edge in response to said output voltage from said comparator means indicative of a mismatch, a search counter having a binary output, first switch means having a first position connecting said first flip-flop means to an input to said search counter for applying said pulses from said first flip-flop means to change the count of said search counter by one on each occurrence of a pulse from said first flip-flop means; second switch means coupling said autotransformer means to said bidirectional coupler means; solenoid means coupled to said second switch means; circuit means connected between said search counter means and said solenoid means energizing said solenoid means to actuate said second switch means for changing the turns ratio of said autotransformer means when the count in said search counter is changed on occurrence of a pulse from said first flip-flop means.
Claim 3
Dependent Claim
97 words
In a system according to claim 1 further including; preset counter means having an output operably connected to said search counter, said first switch means having a second position operably connecting said first flip-flop means to said preset counter, said preset counter providing an output pulse to said search counter to change the count of said search counter means only on the occurrence of a predetermined number of pulses from said first flip-flop means, the turns ratio of said autotransformer means being changed on each occurrence of a predetermined number of pulses from said first flip-flop means.
Claim 4
Dependent Claim
175 words
In a system according to claim 2 further comprising; timing pulse generator means providing continuously recurring timing pulses each having a positive edge and a negative edge of a first time period, one shot multivibrator means connected to said timing pulse generator means and responsive to said timing pulses to provide clocking pulses each having a positive edge and a negative of a second time period shorter than said first period, said first flip-flop means having a data input terminal connected to said comparator means for receiving said output voltage from said comparator means indicative of a mismatched, a clock input terminal connected to said one shot multivibrator means and a reset input terminal connected to said timing pulse generator such that when an output voltage exists on said data input terminal, said first flip-flop means is set by the positive edge of said clocking pulses and reset by the negative edge of said timing pulses, said search counter being changed in count by the negative edge of said pulse from said first flip-flop means.
Claim 5
Dependent Claim
106 words
In a system according to claim 3 further comprising; second flip-flop means having a data input, a clock input, a set input and an output, said data input being connected to said comparator, said clock input being connected to said one shot multivibrator, said set input connected to said timing generator and said output connected to said preset counter means such that when said comparator means has no output voltage said second flip-flop means is reset by the positive edge of said clocking pulses and set by the negative edge of said timing pulses, said preset counter being reset when said second flip-flop means is set.
Claim 6
Dependent Claim
87 words
In a system according to claim 4 further comprising; phase detector means connected to said bidirectional coupler determining and providing an output voltage indicative of the phase relationship of said reflected and incident voltages, third switch means for connecting said phase detector means to said search counter whereby said search counter changes count in the up or down direction in response to an out-of-phase condition or an in-phase condition, respectively, of said incident and reflected voltages in response to said output voltage from said phase detector means.
Claim 7
Dependent Claim
32 words
In a system according to claim 5 further comprising; means connected between said first flip-flop means and said search counter for disabling said search counter after a predetermined number of match trials.
Claim 8
Dependent Claim
87 words
In a system according to claim 3 further comprising; phase detector means connected to said bidirectional coupler determining and providing an output voltage indicative of the phase relationship of said reflected and incident voltages, third switch means for connecting said phase detector means to said search counter whereby said search counter changes count in the up or down direction in response to an out-of-phase condition or an in-phase condition, respectively, of said incident and reflected voltages in response to said output voltage from said phase detector means.
Claim 9
Dependent Claim
32 words
In a system according to claim 7 further comprising; means connected between said first flip-flop means and said search counter for disabling said search counter after a predetermined number of match trials.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-03 | 1990-05-05 | 1990-11-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-03 | 1994-05-05 | 1994-11-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-03 | 1998-05-05 | 1998-11-04 | $7700.00 | Window Closed / Lapsed |