US4632056A
Expired / Lapsed
US
⏱️ 0.0 years remaining
CVD temperature control
Assignee: Tokyo Electron Ltd
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Filing: 1985-08-05
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Granted: 1986-12-30
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Expires: 2005-08-05
Abstract
Abstract Chemical vapor deposition on a semiconductor wafer is obtained in a plasma reactor having a plurality of lamps for radiantly heating the wafer. Calibrated temperature sensing means remote from the wafer is used to control the heating of the wafer. Gases are supplied by way of a plurality of tubes extending radially inwardly from the sides of the chamber. A baffle is provided to form an antechamber which aids in the uniformity of the deposition. The plasma is ignited for less than the whole deposition cycle for deposition of tungsten disilicide.
Inventors
- 👤 Robert W. Stitz
- 👤 J. B. Price
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:46
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/42; C23C16/44; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; C23C16/52
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
52 words
A chemical vapor deposition apparatus comprising: means for enclosing a volume, said means including a thermally translucent window; heating means adjacent the outside of said window for radiantly heating an article within said volume; temperature sensing means within said heating means for detecting the amount of heat produced by said heating means.
Claim 2
Dependent Claim
52 words
A chemical vapor deposition apparatus comprising: means for enclosing a volume, said means including a thermally translucent window; heating means adjacent the outside of said window for radiantly heating an article within said volume; temperature sensing means within said heating means for detecting the amount of heat produced by said heating means.
Claim 3
Dependent Claim
27 words
Apparatus as set forth in claim 1 wherein said temperature sensing means comprises a predetermined mass for simulating the effect of said heating means on said article.
Claim 4
Dependent Claim
29 words
Apparatus as set forth in claim 1 wherein said temperature sensing means comprises a thermocouple junction device; and a disk of predetermined mass in thermal contact with said device.
Claim 5
Dependent Claim
22 words
Apparatus as set forth in claim 3 wherein said temperature sensing means is positioned away from said window within said heating means.
Claim 6
Dependent Claim
26 words
Apparatus as set forth in claim 4 and further comprising: pin means for supporting said disk and for thermally isolating said disk within said heating means.
Claim 7
Dependent Claim
17 words
Apparatus as set forth in claim 5 wherein said disk comprises recesses for receiving said pin means.
Claim 8
Dependent Claim
15 words
Apparatus as set forth in claim 4 and further comprising: means for cooling said disk.
Claim 9
Dependent Claim
16 words
Apparatus as set forth in claim 7 wherein said disk is thin relative to its diameter.
References Cited (Backward Citations)
US4223048A
Cited
US4503807A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-29 | 1990-06-30 | 1990-12-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-29 | 1994-06-30 | 1994-12-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-29 | 1998-06-30 | 1998-12-30 | $7700.00 | Window Closed / Lapsed |