US4636268A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical beam deposition method utilizing alkyl compounds in a carrier gas
Assignee: Nokia Bell Labs
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Filing: 1984-11-30
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Granted: 1987-01-13
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Expires: 2004-11-30
Abstract
Abstract Epitaxial layers of semiconductor materials such as, e.g., III-V and II-VI materials are deposited on a substrate under high-vacuum conditions. Molecules of a compound of a constituent of such material travel essentially line-of-sight towards the substrate admixed to a carrier gas such as, e.g., hydrogen. For III-V layers the use of compounds, such as, e.g., trimethyl- and triethylgallium, trimethyl- and triethylindium, triethylphosphine, and trimethylarsine is advantageous and economical in the manufacture of electronic and opto-electronic devices.
Inventors
- 👤 Won-Tien Tsang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:56
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/40; C30B29/46; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/34; H10P14/3402; Y; Y10; Y10S; Y10S148/00; Y10S148/11; Y10S148/169
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
71 words
Method for making a device, said method comprising epitaxially depositing a layer of a semiconductor material on a substrate, said method comprising a step of exposing said substrate to a beam comprising at least one species of molecules of an alkyl compound comprising a constituent of said material, said substrate being heated in a high-vacuum environment, and said molecules being admitted to the vicinity of said substrate in a carrier gas.
Claim 2
Dependent Claim
71 words
Method for making a device, said method comprising epitaxially depositing a layer of a semiconductor material on a substrate, said method comprising a step of exposing said substrate to a beam comprising at least one species of molecules of an alkyl compound comprising a constituent of said material, said substrate being heated in a high-vacuum environment, and said molecules being admitted to the vicinity of said substrate in a carrier gas.
Claim 3
Dependent Claim
28 words
Method of claim 1 in which said carrier gas consists essentially of one or several gases selected from the group consisting of hydrogen, nitrogen, neon, helium, and argon.
Claim 4
Dependent Claim
28 words
Method of claim 1 in which said carrier gas arrives at said substrate at a rate which is greater than or equal to 10 13 atoms/cm 2 .
Claim 5
Dependent Claim
36 words
Method of claim 1 in which said high-vacuum environment provides for a mean free path of said molecules which is greater than the distance between a common point of origin of said molecules and said substrate.
Claim 6
Dependent Claim
16 words
Method of claim 4 in which said high vacuum environment is less than 10 -2 torr.
Claim 7
Dependent Claim
27 words
Method of claim 4, said method further comprising a step of placing a mechanical shutter in the path between said common point of origin and said substrate.
Claim 8
Dependent Claim
12 words
Method of claim 1 in which said species is an organo-metallic compound.
Claim 9
Dependent Claim
12 words
Method of claim 1 in which said material is a III-V material.
Claim 10
Dependent Claim
12 words
Method of claim 1 in which said material is a II-VI material.
Claim 11
Dependent Claim
12 words
Method of claim 1 in which said material is a IV-VI material.
Claim 12
Dependent Claim
13 words
Method of claim 1 in which said material is a Group IV material.
References Cited (Backward Citations)
US4063974A
Cited
US4147573A
Cited
US4239584A
Cited
US4330360A
Cited
JPS58116A
Cited
US4392453A
Cited
US4477311A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-12 | 1990-07-14 | 1991-01-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-12 | 1994-07-14 | 1995-01-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-12 | 1998-07-14 | 1999-01-13 | $7700.00 | Window Closed / Lapsed |