US4645684A
Expired / Lapsed
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Method for forming deposited film
Assignee: Canon Inc
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Filing: 1985-10-03
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Granted: 1987-02-24
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Expires: 2005-10-03
Abstract
Abstract A method for forming a deposited film comprises forming in a vacuum chamber housing a substrate therein a deposited film containing silicon on the substrate by subjecting a gas represented by the general formula: ##STR1## wherein R 1 , R 2 , R 3 and R 4 , can be the same or different and are each independently hydrogen or a hydrocarbon group, to polymerization.
Inventors
- 👤 Yoshiyuki Osada
- 👤 Hisanori Tsuda
- 👤 Masafumi Sano
- 👤 Satoshi Omata
- 👤 Katsuji Takasu
- 👤 Yutaka Hirai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:17
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; B05D1/62; B05D3/00; B05D3/06; B05D3/061; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/549
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
83 words
A method for forming a deposited film, comprising subjecting a gas represented by the formula: ##STR4## wherein R 1 , R 2 , R 3 and R 4 are the same or different and are each independently hydrogen or a hydrocarbon group, in a vacuum chamber housing a substrate therein, to at least one energy selected from the group consisting of plasma energy, light energy and heat energy to hereby polymerize said gas and form a deposited film containing silicon on the substrate.
Claim 2
Independent Claim
83 words
A method for forming a deposited film, comprising subjecting a gas represented by the formula: ##STR4## wherein R 1 , R 2 , R 3 and R 4 are the same or different and are each independently hydrogen or a hydrocarbon group, in a vacuum chamber housing a substrate therein, to at least one energy selected from the group consisting of plasma energy, light energy and heat energy to hereby polymerize said gas and form a deposited film containing silicon on the substrate.
Claim 3
Dependent Claim
12 words
The method according to claim 1, wherein the energy is plasma energy.
Claim 4
Dependent Claim
12 words
The method according to claim 1, wherein the energy is heat energy.
Claim 5
Dependent Claim
11 words
The method according to claim 1, wherein energy is light energy.
Claim 6
Dependent Claim
24 words
The method according to claim 1, wherein at least one of R 1 , R 2 , R 3 and R 4 is hydrogen.
Claim 7
Dependent Claim
24 words
The method according to claim 1, wherein at least one of R 1 , R 2 , R 3 and R 4 is alkyl.
Claim 8
Dependent Claim
24 words
The method according to claim 1, wherein at least one of R 1 , R 2 , R 3 and R 4 is aryl.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-23 | 1990-08-25 | 1991-02-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-23 | 1994-08-25 | 1995-02-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-23 | 1998-08-25 | 1999-02-24 | $7700.00 | Window Closed / Lapsed |